Robert C. Daigle compensation by year
AMTECH SYSTEMS Summary Compensation Table · all 3 fiscal years held| Component | FY2023 | FY2024 | FY2025 |
|---|---|---|---|
| Salary | $50,192 | $450,000 | $450,000 |
| Bonus | $0 | $0 | $0 |
| Stock awards | $500,004 | $0 | $0 |
| Option awards | $712,800 | $945,960 | $259,410 |
| Non-equity incentive | $0 | $0 | $0 |
| Pension and deferred compensation | $0 | $0 | $0 |
| All other | $458 | $15,339 | $14,170 |
| Total | $1,263,454 | $1,411,299 | $723,580 |
Each year as stated in that year's proxy. A dash means the company reported no figure in that column. Source: AMTECH SYSTEMS INC DEF 14A filed January 23, 2026, accession 0001193125-26-020762, and prior-year filings. Open the filing on EDGAR.
How this page was built: the AMTECH SYSTEMS INC filed document, accession 0001193125-26-020762. Every figure is read from that document and cited to the page and table it appears in. Filed January 23, 2026.
Equity holdings
unvested awards at FY2025 year-end| Type | Unvested units | Value at year-end | Exercise price |
|---|---|---|---|
| Option | 100,000 | — | $5.09 |
Per the Outstanding Equity Awards at Fiscal Year-End table in AMTECH SYSTEMS INC's FY2025 proxy; value at the fiscal year-end close, as the company printed it.
Insider transactions since the last proxy
1 Form 4 line since the FY2025 proxy (filed January 23, 2026)current to 2026-11-06 · updated nightly
| Date | Transaction | Plan | Shares | Price | Held after |
|---|---|---|---|---|---|
| 2026-08-04 | Grant or award derivative | — | 50,000 | $0.00 | 50,000 |
The 1 most recent of 1 lines, each as reported on the Form 4. "10b5-1" marks a trade the filing reports under a pre-arranged trading plan. View every Form 4 filing on EDGAR →
AMTECH SYSTEMS’s named executive officers, FY2025
as the company reported each| Named executive officer | Role | FY2025 total |
|---|---|---|
| Robert C. Daigle · this page | Chief Executive Officer, President and Chairman of the Board | $723,580 |
| Wade M. Jenke | Vice President, Chief Financial Officer | $428,529 |
Board service
AMTECH SYSTEMS board · FY2023–FY2025| Fiscal year | Cash fees | Stock awards | Option awards | Other | Total |
|---|---|---|---|---|---|
| FY2025 | $0 | $0 | $0 | $0 | — |
| FY2024 | $0 | $0 | $0 | $0 | — |
| FY2023 | $69,130 | $75,006 | — | — | $144,136 |
Each year as the company reported it in AMTECH SYSTEMS's director compensation table. Totals are the company's own disclosed totals.
How this board is paid
Company policy: AMTECH SYSTEMS pays directors a $40,000 cash retainer and $40,000 in RSUs. As stated in AMTECH SYSTEMS's FY2025 proxy.
The full AMTECH SYSTEMS compensation record
free company briefThis page is one person within AMTECH SYSTEMS's record. The company brief lists every named executive, each linking to their own page.
Compensation, the day it’s disclosed
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How this record is built
Every figure on this page is one figure from a public SEC filing, printed as the filing states it and cited to the document. Compensation totals are AMTECH SYSTEMS's own disclosed totals, not summed by Velarion. Insider transactions are read from Form 4 filings and cover every line filed since the most recent proxy. Nothing is estimated by Velarion; where the company does not disclose a value the cell reads "—", and a section appears only where the company discloses the data. Corrections: records@velarion.ai.
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