Robert C. Daigle is Chief Executive Officer, President and Chairman of the Board of Amtech Systems Inc (ASYS). The company reported total compensation of $723,580 for fiscal year 2025.
| Salary | $450,000 |
|---|---|
| Bonus | $0 |
| Stock awards | $0 |
| Option awards | $259,410 |
| Non-equity incentive plan | $0 |
| Pension and non-qualified deferred compensation | $0 |
| All other compensation | $14,170 |
| Total | $723,580 |
A dash means the company reported no figure in that column; 0 means it reported zero. Figures are as printed, without adjustment.
Cited to the compensation disclosure Amtech Systems Inc filed January 23, 2026, accession 0001193125-26-020762.
| Fiscal year | Role | Salary | Bonus | Stock awards | Option awards | Non-equity incentive | Pension / NQDC | All other | Total |
|---|---|---|---|---|---|---|---|---|---|
| FY2025 | Chief Executive Officer, President and Chairman of the Board | $450,000 | $0 | $0 | $259,410 | $0 | $0 | $14,170 | $723,580 |
| FY2024 | Chief Executive Officer, President and Chairman of the Board | $450,000 | $0 | $0 | $945,960 | $0 | $0 | $15,339 | $1,411,299 |
| FY2023 | Chief Executive Officer, President and Director | $50,192 | $0 | $500,004 | $712,800 | $0 | $0 | $458 | $1,263,454 |
Totals as disclosed in each year's own compensation disclosure for Amtech Systems Inc.
| Named executive officer | Role | FY2025 total |
|---|---|---|
| Robert C. Daigle this page | Chief Executive Officer, President and Chairman of the Board | $723,580 |
| Wade M. Jenke | Vice President, Chief Financial Officer | $428,529 |
The company's named executive officers for fiscal year 2025, and what it reported for each. See the full Amtech Systems Inc compensation brief.
Robert C. Daigle's compensation sits inside Amtech Systems Inc's full executive and board picture — the peer group, pay against peers, incentive design and the board itself.