Vice President, Chief Financial Officer · AMTECH SYSTEMS INC (ASYS)

Wade M. Jenke

A named executive officer of AMTECH SYSTEMS in every fiscal year CompBrief holds from FY2024 to FY2025. Every figure below is printed as the company filed it and cited to the filing it came from.

Total disclosed compensation, FY2025

$428,529

FY2024: $120,955

Compensation figures as of the proxy filed January 23, 2026 (DEF 14A).

Wade M. Jenke compensation by year

AMTECH SYSTEMS Summary Compensation Table · all 2 fiscal years held
In US dollars, as AMTECH SYSTEMS reports it. Most recent year shaded. Totals are the company’s disclosed totals.
ComponentFY2024FY2025
Salary$32,308$292,600
Bonus$0$0
Stock awards$0$124,750
Option awards$87,897$0
Non-equity incentive$0$0
Pension and deferred compensation$0$0
All other$750$11,179
Total$120,955$428,529

Each year as stated in that year's proxy. A dash means the company reported no figure in that column. Source: AMTECH SYSTEMS INC DEF 14A filed January 23, 2026, accession 0001193125-26-020762, and prior-year filings. Open the filing on EDGAR.

$121K
$429K
FY24
FY25
SalaryStock awardsOption awardsAll other

Equity holdings

unvested awards at FY2025 year-end
TypeUnvested unitsValue at year-endExercise price
Option20,000—$5.37

Per the Outstanding Equity Awards at Fiscal Year-End table in AMTECH SYSTEMS INC's FY2025 proxy; value at the fiscal year-end close, as the company printed it.

AMTECH SYSTEMS’s named executive officers, FY2025

as the company reported each
Named executive officerRoleFY2025 total
Robert C. DaigleChief Executive Officer, President and Chairman of the Board$723,580
Wade M. Jenke · this pageVice President, Chief Financial Officer$428,529

The full AMTECH SYSTEMS compensation record

free company brief

This page is one person within AMTECH SYSTEMS's record. The company brief lists every named executive, each linking to their own page.

Compensation, the day it’s disclosed

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How this record is built

Every figure on this page is one figure from a public SEC filing, printed as the filing states it and cited to the document. Compensation totals are AMTECH SYSTEMS's own disclosed totals, not summed by Velarion. Insider transactions are read from Form 4 filings and cover every line filed since the most recent proxy. Nothing is estimated by Velarion; where the company does not disclose a value the cell reads "—", and a section appears only where the company discloses the data. Corrections: records@velarion.ai.

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