Velarion · Company Intelligence
Compensation Brief
Fiscal year 2025 · Filings through 2026-06-01

Amtech Systems (ASYS)

Fiscal year 2025 executive and director compensation, incentive-plan design, equity activity, and governance — every figure in this brief is traceable to its exact location in the company’s SEC filing — the document, the section, the page, and the table, linked directly.

$723,580
Robert C. Daigle total, FY2025
CEO pay percentile vs peers
CEO-to-median pay ratio
63.02%
Say-on-pay support, latest vote
Companies that benchmark against ASYS
6 companies name ASYS as a compensation peer

Each company listed discloses ASYS in its own benchmarking peer group, as disclosed in each company's most recent proxy statement within the last two proxy seasons. Two companies are therefore absent by design: one that named ASYS in an earlier year and no longer does, and one whose own most recent disclosure is older than the last two seasons.

01

Summary Compensation Table — fiscal year 2025

Named executive officerSalaryBonusStock awardsOption awardsNon-equity incentivePension / NQDCAll otherTotal
Robert C. Daigle$450,000$0$0$259,410$0$0$14,170$723,580
Chief Executive Officer, President and Chairman of the Board
Wade M. Jenke292,6000124,75000011,179428,529
Vice President, Chief Financial Officer

A dash means the company reported no figure in that column; 0 means it reported zero. Figures are as printed in the filing, without adjustment.

Three-year trend — total compensation per named executive

Named executive officerFY2025 totalFY2024 totalFY2023 totalΔ FY20242025
Robert C. Daigle$723,580$1,411,299$1,263,454−687,719
Wade M. Jenke428,529120,955+307,574

Prior-year totals as disclosed in the corresponding proxy; deltas are computed values with the derivation shown in the register.

02

Equity transactions since the proxy statement was filed

Every insider equity transaction reported on Form 4 after the 2025 proxy statement — acquisitions, dispositions, exercises, and withholdings — and therefore not reflected in any table in that document.

InsiderRoleTransaction dateCodeSharesPriceValueSecuritySource
Michael GarnreiterDirector2026-03-04A8,081$0$0CommonForm 4 ↗
Michael M. LudwigDirector2026-03-04A8,08100CommonForm 4 ↗
Michael M. LudwigDirector2026-03-04A2,83900Derivative, Class A CommonForm 4 ↗
Michael M. LudwigDirector2026-03-04D8,08100Derivative, Class A CommonForm 4 ↗
Asif Y. JakwaniDirector2026-03-04A8,08100CommonForm 4 ↗
Robert M. AverickDirector2026-03-04D8,08100Derivative, Class A CommonForm 4 ↗
Michael GarnreiterDirector2026-03-04A2,83900Derivative, Class A CommonForm 4 ↗
Asif Y. JakwaniDirector2026-03-04A2,83900Derivative, Class A CommonForm 4 ↗
Asif Y. JakwaniDirector2026-03-04D8,08100Derivative, Class A CommonForm 4 ↗
Robert M. AverickDirector2026-03-04A8,08100CommonForm 4 ↗
Robert M. AverickDirector2026-03-04A2,83900Derivative, Class A CommonForm 4 ↗
Michael GarnreiterDirector2026-03-04D8,08100Derivative, Class A CommonForm 4 ↗
Thomas B. SabolChief Financial Officer2026-05-14A45,000Derivative, Class A CommonForm 4 ↗
Guy ShechterPresident & COO2026-05-19A50,000Derivative, Class A CommonForm 4 ↗
Robert M. AverickDirector2026-05-28D6,00000Derivative, Class A CommonForm 4 ↗
Robert M. AverickDirector2026-05-28D6,00000Derivative, Class A CommonForm 4 ↗
Robert M. AverickDirector2026-05-28A6,0001061,320CommonForm 4 ↗
Robert M. AverickDirector2026-05-28D6,00000Derivative, Class A CommonForm 4 ↗
Robert M. AverickDirector2026-05-28A6,000744,400CommonForm 4 ↗
Robert M. AverickDirector2026-05-28A6,0001269,060CommonForm 4 ↗

Transaction codes per Form 4: A acquisition · S open-market sale · F tax withholding · M option exercise · G gift. Value = shares × price as reported. Dividend-equivalent and fractional-share accrual rows (derivative Class A, under $10,000 and under 2,000 shares) are aggregated per date; every row appears in full below.

03

Grants of plan-based awards — fiscal year 2025

ExecutiveAwardGrant dateThresholdTargetGrantedMaximumGrant-date fair value
Wade M. JenkeOTHER$124,750
03b

Vehicle mix — grant-date fair value by award type

Grant-level vehicle detail not disclosed.

% performance-vested = PSU grant-date fair value ÷ (RSU + PSU + Options), a computed value with the derivation shown in the register.

04

Outstanding equity awards at fiscal year-end 2025

ExecutiveAwardShares unvestedExercise priceMarket value unvested
Wade M. JenkeOption20,0005.37
Robert C. DaigleOption100,0005.09
05

Incentive-plan design — the Compensation Discussion & Analysis

Our compensation philosophy has the following basic objectives: align the interests of our executives and shareholders by rewarding executives when shareholder value increases and motivate our executives to manage our business to meet our short-term and long-term corporate goals and business objectives, and reward them for meeting these objectives.

CEO STI target (% of salary)
CEO LTI target (% of salary)
Independent consultantnot disclosed
Clawback policytrue
Anti-hedgingtrue
Anti-pledgingtrue
06

Say-on-pay — recent advisory votes

Meeting yearMeeting dateForAgainstAbstainSupportOutcome
20262026-03-045,460,6352,740,790463,77063.02%Passed
20252025-03-053,588,2762,372,2701,945,44860.2%Passed
20242024-03-064,837,4453,183,479545,53860.31%Passed
20232023-03-018,369,822319,268560,79196.33%Passed
20222022-03-028,150,732105,215980,70298.73%Passed
20212021-03-237,963,743242,143843,65197.05%Passed

Rows are labeled by annual-meeting year, with the meeting date beside each; the vote held in a given year acts on the prior fiscal year's compensation.

Say-on-pay — history, company's computation

Meeting yearMeeting dateApproval — company's computation
20262026-03-0463.02%a
20252025-03-0560.2%b
20242024-03-0660.31%c

a. Approved under the standard stated in the filing — “If a proposal requires a majority of votes cast, abstentions typically have no effect because they are not considered "votes cast." If a proposal requires either (i) a majority of shares of Common Stock present at the Annual Meeting or represented by proxy and entitled to vote on the proposal or (ii) a majority of all outstanding shares of Common Stock, abstentions will effectively count as votes against such proposal because they are included in the total number of shares of Common Stock present or outstanding but do not contribute to the affirmative vote count.”.

b. Voting standard not stated in the filing.

c. Voting standard not stated in the filing.

Approval percentages are the company's own reported computations under its own stated standard, not recomputed by Velarion. Where a company does not state a standard, none is assumed.

07

CEO pay ratio

Ratio (CEO : median employee)
CEO total compensation
Median employee compensation
08

Director compensation — fiscal year 2025

DirectorCash feesStock awardsOption awardsNon-equity incentiveAll otherTotal
Michael GarnreiterIndependent · Audit (Chair) · Compensation · Nominating/Governance$55,000$40,001$0$0$0$95,001
Robert M. AverickIndependent · Lead Independent Director · Compensation (Chair) · Audit · Nominating/Governance47,50040,00100087,501
Michael M. LudwigIndependent · Nominating/Governance (Chair) · Audit · Compensation47,50040,00100087,501
Asif Y. JakwaniIndependent · Audit · Compensation · Nominating/Governance · Newly elected30,00040,00100070,001
Robert C. DaigleEmployee director · Board Chair00000
09

Board fee structure and ownership guideline

Annual cash retainer$40,000
Annual equity retainer$75,000
Per board meeting fee
Committee chair fees (audit / comp / nom-gov)15,000 / 7,500 / 7,500
Stock ownership guideline
09b

Total cost of the board

ComponentFY2025
Cash retainers and fees$180,000
Equity awards (grant-date value)$160,004
All other compensation$0
Total cost of the board$340,004

Computed as the sum of the director compensation table rows above; inputs and formula shown in the register.

10b

Chief executive pay against the peer group

Most recent fiscal-year chief executive compensation at each disclosed peer, taken from that company's own proxy statement.

RankCompanyFYChief executiveSalaryStock awardsOption awardsNon-equity incentiveTotal
1Amtech Systems2025Robert C. Daigle$450,000$0$259,410$0$723,580

Each peer's compensation is from its most recently filed proxy; fiscal years differ by company. Each peer's figures come from its own filings; the subject company is highlighted. Peers whose chief executive compensation is outside our coverage universe are stated as such, never left blank.

11

Source register

Each figure's location is given both for the eye (section · page · table · row · column) and for a script (table/row/column index and exact character span in the filed document). Any figure can be independently confirmed against the source.

#SupportsDocumentFiledAccessionLocation in document
1Section 01, Robert C. DaigleDEF 14A2026-01-230001193125-26-020762Section “SUMMARY COMPENSATION TABLE”. As printed: 723,580. Filing ↗machine: t7 · r3 · c26 · span 258228–258235
2Section 01, Wade M. JenkeDEF 14A2026-01-230001193125-26-020762Section “SUMMARY COMPENSATION TABLE”. As printed: 428,529. Filing ↗machine: t7 · r6 · c26 · span 284630–284637
3Section 03, Wade M. Jenke OTHERDEF 14A0001193125-26-020762Section “SUMMARY COMPENSATION TABLE” · grants of plan-based awards table. Filing ↗machine: t7 · r6 · c17 · span 281581–281588
4Section 07, pay ratio10-K2025-12-100001193125-25-314147Section “CEO Pay Ratio”. As printed: —. Filing ↗
5Section 08, Michael GarnreiterDEF 14A2026-01-230001193125-26-020762Section “Director Compensation”. As printed: 95,001. Filing ↗machine: t6 · r4 · c11 · span 186032–186038
6Section 08, Robert M. AverickDEF 14A2026-01-230001193125-26-020762Section “Director Compensation”. As printed: 87,501. Filing ↗machine: t6 · r3 · c11 · span 181566–181572
7Section 08, Michael M. LudwigDEF 14A2026-01-230001193125-26-020762Section “Director Compensation”. As printed: 87,501. Filing ↗machine: t6 · r5 · c11 · span 190497–190503
8Section 08, Asif Y. JakwaniDEF 14A2026-01-230001193125-26-020762Section “Director Compensation”. As printed: 70,001. Filing ↗machine: t6 · r6 · c11 · span 194964–194970
9Section 08, Robert C. DaigleDEF 14A2026-01-230001193125-26-020762Section “Director Compensation”. As printed: 0. Filing ↗machine: t6 · r2 · c11 · span 176945–176946
10Section 02, Michael Garnreiter 2026-03-04Form 42026-03-060001193125-26-096467Insider equity transaction reported since the proxy statement. Filing ↗
11Section 02, Michael M. Ludwig 2026-03-04Form 42026-03-060001256949-26-000003Insider equity transaction reported since the proxy statement. Filing ↗
12Section 02, Michael M. Ludwig 2026-03-04Form 42026-03-060001256949-26-000003Insider equity transaction reported since the proxy statement. Filing ↗
13Section 02, Michael M. Ludwig 2026-03-04Form 42026-03-060001256949-26-000003Insider equity transaction reported since the proxy statement. Filing ↗
14Section 02, Asif Y. Jakwani 2026-03-04Form 42026-03-060001193125-26-096720Insider equity transaction reported since the proxy statement. Filing ↗
15Section 02, Robert M. Averick 2026-03-04Form 42026-03-060001104659-26-024720Insider equity transaction reported since the proxy statement. Filing ↗
16Section 02, Michael Garnreiter 2026-03-04Form 42026-03-060001193125-26-096467Insider equity transaction reported since the proxy statement. Filing ↗
17Section 02, Asif Y. Jakwani 2026-03-04Form 42026-03-060001193125-26-096720Insider equity transaction reported since the proxy statement. Filing ↗
18Section 02, Asif Y. Jakwani 2026-03-04Form 42026-03-060001193125-26-096720Insider equity transaction reported since the proxy statement. Filing ↗
19Section 02, Robert M. Averick 2026-03-04Form 42026-03-060001104659-26-024720Insider equity transaction reported since the proxy statement. Filing ↗
20Section 02, Robert M. Averick 2026-03-04Form 42026-03-060001104659-26-024720Insider equity transaction reported since the proxy statement. Filing ↗
21Section 02, Michael Garnreiter 2026-03-04Form 42026-03-060001193125-26-096467Insider equity transaction reported since the proxy statement. Filing ↗
22Section 02, Thomas B. Sabol 2026-05-14Form 42026-05-290001223192-26-000003Insider equity transaction reported since the proxy statement. Filing ↗
23Section 02, Guy Shechter 2026-05-19Form 42026-05-290002136935-26-000002Insider equity transaction reported since the proxy statement. Filing ↗
24Section 02, Robert M. Averick 2026-05-28Form 42026-06-010001104659-26-068888Insider equity transaction reported since the proxy statement. Filing ↗
25Section 02, Robert M. Averick 2026-05-28Form 42026-06-010001104659-26-068888Insider equity transaction reported since the proxy statement. Filing ↗
26Section 02, Robert M. Averick 2026-05-28Form 42026-06-010001104659-26-068888Insider equity transaction reported since the proxy statement. Filing ↗
27Section 02, Robert M. Averick 2026-05-28Form 42026-06-010001104659-26-068888Insider equity transaction reported since the proxy statement. Filing ↗
28Section 02, Robert M. Averick 2026-05-28Form 42026-06-010001104659-26-068888Insider equity transaction reported since the proxy statement. Filing ↗
29Section 02, Robert M. Averick 2026-05-28Form 42026-06-010001104659-26-068888Insider equity transaction reported since the proxy statement. Filing ↗
30Section 06, 2026 voteForm 8-K2026-03-060000720500-26-000001Item 5.07 · say-on-pay result. As reported: 63.02% (votes for as printed: 5,460,635). Filing ↗
31Section 06, 2025 voteForm 8-K2025-03-070000950170-25-034957Item 5.07 · say-on-pay result. As reported: 60.2% (votes for as printed: 3,588,276). Filing ↗
32Section 06, 2024 voteForm 8-K2024-03-080000950170-24-028631Item 5.07 · say-on-pay result. As reported: 60.31% (votes for as printed: 4,837,445). Filing ↗
33Section 01 trend, Δ column (computed)ComputedcomputedΔ = current-FY total − prior-FY total per named officer.machine: formula: Δ = FY(n) − FY(n−1)
34Section 09b board cost (computed)ComputedcomputedCash 180,000 + equity 160,004 + all other 0 = 340,004, summed across the director compensation table rows.machine: formula: Σ = 340,004
35Amtech Systems (subject), Section 10b CEO totalDEF 14A2026-01-230001193125-26-020762CEO total compensation as printed in Amtech Systems's own proxy. As printed: 723,580. Filing ↗machine: t7 · r3 · c26 · span 258228–258235