What they were paid
AMTECH SYSTEMS Director Compensation Table · all 2 fiscal years held| Fiscal year | Cash fees | Stock awards | Option awards | Other | Total |
|---|---|---|---|---|---|
| FY2025 | $30,000 | $40,001 | $0 | $0 | $70,001 |
| FY2024 | — | — | — | — | — |
Each year as stated in that year's proxy. A dash means the company reported no figure in that column. Source: AMTECH SYSTEMS INC DEF 14A filed January 23, 2026, accession 0001193125-26-020762, and prior-year filings. Open the filing on EDGAR.
How this board is paid
company policy · FY2025AMTECH SYSTEMS pays directors a $40,000 cash retainer and $40,000 in RSUs.
Committees
FY2025 · as the proxy prints themAudit · Compensation · Nominating/Governance
The rest of the AMTECH SYSTEMS board
FY2025 · as the company reported each| Director | Role | FY2025 total |
|---|---|---|
| Michael Garnreiter | Independent Director | $95,001 |
| Michael M. Ludwig | Independent Director | $87,501 |
| Robert C. Daigle | Chair of the Board | $0 |
| Robert M. Averick | Independent Director | $87,501 |
The full AMTECH SYSTEMS compensation record
free company briefThis page is one director within AMTECH SYSTEMS's record. The company brief lists every named executive and director, each linking to their own page.
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