What they were paid
AMTECH SYSTEMS Director Compensation Table · all 3 fiscal years held| Fiscal year | Cash fees | Stock awards | Option awards | Other | Total |
|---|---|---|---|---|---|
| FY2025 | $47,500 | $40,001 | $0 | $0 | $87,501 |
| FY2024 | $47,500 | $40,001 | — | — | $87,501 |
| FY2023 | $47,500 | $40,005 | — | — | $87,505 |
Each year as stated in that year's proxy. A dash means the company reported no figure in that column. Source: AMTECH SYSTEMS INC DEF 14A filed January 23, 2026, accession 0001193125-26-020762, and prior-year filings. Open the filing on EDGAR.
How this page was built: the AMTECH SYSTEMS INC filed document, accession 0001193125-26-020762. Every figure is read from that document and cited to the page and table it appears in. Filed January 23, 2026.
Get the AMTECH SYSTEMS Board Governance Report
$87,501 Robert M. Averick, FY2025 total director compensation
$500
The free page is the headline figures. The board report is director pay, board composition and committee fees combined into the same kind of document.
Data as of January 23, 2026 · Source: Velarion Executive Compensation Database, deposited on Zenodo (doi:10.5281/zenodo.22283855).
How this board is paid
company policy · FY2025AMTECH SYSTEMS pays directors a $40,000 cash retainer and $40,000 in RSUs.
Committees
FY2025 · as the proxy prints themAudit · Compensation (Chair) · Nominating/Governance
The rest of the AMTECH SYSTEMS board
FY2025 · as the company reported each| Director | Role | FY2025 total |
|---|---|---|
| Asif Y. Jakwani | Independent Director | $70,001 |
| Michael Garnreiter | Independent Director | $95,001 |
| Michael M. Ludwig | Independent Director | $87,501 |
| Robert C. Daigle | Chair of the Board | $0 |
The full AMTECH SYSTEMS compensation record
free company briefThis page is one director within AMTECH SYSTEMS's record. The company brief lists every named executive and director, each linking to their own page.
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