Michael M. Ludwig — AMTECH SYSTEMS Director Compensation (2025)

What they were paid

AMTECH SYSTEMS Director Compensation Table · all 3 fiscal years held

In US dollars, as AMTECH SYSTEMS reports it. Most recent year first. Totals are the company’s disclosed totals.
Fiscal year	Cash fees	Stock awards	Option awards	Other	Total
FY2025	$47,500	$40,001	$0	$0	$87,501
FY2024	$47,500	$40,001	—	—	$87,501
FY2023	$37,500	$68,835	$0	$0	$106,335

Each year as stated in that year's proxy. A dash means the company reported no figure in that column. Source: AMTECH SYSTEMS INC DEF 14A filed January 23, 2026, accession 0001193125-26-020762, and prior-year filings. Open the filing on EDGAR.

How this board is paid

company policy · FY2025

AMTECH SYSTEMS pays directors a $40,000 cash retainer and $40,000 in RSUs.

Committees

FY2025 · as the proxy prints them

Audit · Compensation · Nominating/Governance (Chair)

The rest of the AMTECH SYSTEMS board

FY2025 · as the company reported each

Director	Role	FY2025 total
Asif Y. Jakwani	Independent Director	$70,001
Michael Garnreiter	Independent Director	$95,001
Robert C. Daigle	Chair of the Board	$0
Robert M. Averick	Independent Director	$87,501

The full AMTECH SYSTEMS compensation record

free company brief

This page is one director within AMTECH SYSTEMS's record. The company brief lists every named executive and director, each linking to their own page.

Velarion Pro: every company page, peer tools and exports, one seat