What they were paid
ENTEGRIS Director Compensation Table · all 4 fiscal years held| Fiscal year | Cash fees | Stock awards | Option awards | Other | Total |
|---|---|---|---|---|---|
| FY2025 | $86,250 | $210,004 | — | — | $296,254 |
| FY2024 | $112,500 | $210,041 | $0 | $0 | $322,541 |
| FY2022 | $98,750 | $200,098 | — | — | $298,848 |
| FY2021 | $82,500 | $185,005 | — | — | $267,505 |
Each year as stated in that year's proxy. A dash means the company reported no figure in that column. Source: ENTEGRIS INC DEF 14A filed March 23, 2026, accession 0001101302-26-000054, and prior-year filings. Open the filing on EDGAR.
How this page was built: the ENTEGRIS INC filed document, accession 0001101302-26-000054. Every figure is read from that document and cited to the page and table it appears in. Filed March 23, 2026.
Get the ENTEGRIS Board Governance Report
$296,254 Dr. Azita Saleki-Gerhardt, FY2025 total director compensation
$500
The free page is the headline figures. The board report is director pay, board composition and committee fees combined into the same kind of document.
Data as of March 23, 2026 · Source: Velarion Executive Compensation Database, deposited on Zenodo (doi:10.5281/zenodo.22283855).
How this board is paid
company policy · FY2025ENTEGRIS pays directors a $105,000 cash retainer and $210,000 in RSUs.
Committees
FY2025 · as the proxy prints themNominating/Governance · Environmental, Health, Safety & Sustainability
The rest of the ENTEGRIS board
FY2025 · as the company reported each| Director | Role | FY2025 total |
|---|---|---|
| David Reeder | Director | $262,653 |
| James F. Gentilcore | Lead Independent Director | $322,205 |
| James P. Lederer | Independent Director | $288,754 |
| Mary Puma | Independent Director | $299,895 |
| Rodney Clark | Independent Director | $296,254 |
| Yvette Kanouff | Independent Director | $297,803 |
The full ENTEGRIS compensation record
free company briefThis page is one director within ENTEGRIS's record. The company brief lists every named executive and director, each linking to their own page.
Peer companies
named in the ENTEGRIS proxy · each links to its own free briefOrder ENTG
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