Velarion · Company Intelligence
Compensation Brief
Fiscal year 2025 · Filings through 2026-06-26

Entegris (ENTG)

Fiscal year 2025 executive and director compensation, incentive-plan design, equity activity, and governance — every figure in this brief is traceable to its exact location in the company’s SEC filing — the document, the section, the page, and the table, linked directly.

$14,324,681
Bertrand Loy total, FY2025
Executive Chair and Former President and Chief Executive Officerhighest-paid officer; CEO David Reeder: $11,507,888
CEO (David Reeder) pay percentile vs peers
162:1
CEO-to-median pay ratio
95.59%
Say-on-pay support, latest vote
Companies that benchmark against ENTG
18 companies name ENTG as a compensation peer

Each company listed discloses ENTG in its own benchmarking peer group, as disclosed in each company's most recent proxy statement within the last two proxy seasons. Two companies are therefore absent by design: one that named ENTG in an earlier year and no longer does, and one whose own most recent disclosure is older than the last two seasons.

01

Summary Compensation Table — fiscal year 2025

Named executive officerSalaryBonusStock awardsOption awardsNon-equity incentivePension / NQDCAll otherTotal
Bertrand Loy$950,349$0$8,901,384$3,494,913$840,208$0$137,827$14,324,681
Executive Chair and Former President and Chief Executive Officer
David Reeder432,404205,0007,232,0073,329,868308,51509411,507,888
President and Chief Executive Officer
Linda LaGorga584,61501,757,224689,943284,970057,2403,373,992
Former Senior Vice President, Chief Financial Officer
Susan Rice510,96201,260,618494,859248,745051,6482,566,832
Senior Vice President, Global Human Resources and Corporate Communications
Joseph Colella520,96201,222,417479,986253,575051,1182,528,058
Senior Vice President, General Counsel, Chief Compliance Officer and Secretary
Daniel Woodland560,96201,107,816434,933272,895059,5812,436,187
Senior Vice President and President, Materials Solutions

A dash means the company reported no figure in that column; 0 means it reported zero. Figures are as printed in the filing, without adjustment.

Three-year trend — total compensation per named executive

Named executive officerFY2025 totalFY2024 totalFY2023 totalΔ FY20242025
Bertrand Loy$14,324,681$17,368,723−3,044,042
David Reeder11,507,888
Linda LaGorga3,373,9923,540,042−166,050
Susan Rice2,566,8322,904,826−337,994
Joseph Colella2,528,0582,794,277−266,219
Daniel Woodland2,436,1872,815,815−379,628

Prior-year totals as disclosed in the corresponding proxy; deltas are computed values with the derivation shown in the register.

02

Equity transactions since the proxy statement was filed

Every insider equity transaction reported on Form 4 after the 2025 proxy statement — acquisitions, dispositions, exercises, and withholdings — and therefore not reflected in any table in that document.

InsiderRoleTransaction dateCodeSharesPriceValueSecuritySource
Susan RiceSVP, Global Human Resources2026-04-01A7,371$0$0CommonForm 4 ↗
Bertrand LoyDirector2026-04-01A19,62800CommonForm 4 ↗
Olivier BlachierSVP, Chief Strategy Officer2026-04-01A6,31800CommonForm 4 ↗
Michael SauerVP, Controller & CAO2026-04-01A2,52700CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-04-01A7,37100CommonForm 4 ↗
David ReederDirector2026-04-01A38,75000CommonForm 4 ↗
Clinton M. HarisSVP & President, APS Division2026-04-01A6,31800CommonForm 4 ↗
Daniel WoodlandSVP & President, MS Division2026-04-01A6,31800CommonForm 4 ↗
Michael SauerVP, Controller & CAO2026-04-05D31611636,782CommonForm 4 ↗
Bertrand LoyDirector2026-04-05D9,8681161,148,635CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-04-05D1,493116173,785CommonForm 4 ↗
Susan RiceSVP, Global Human Resources2026-04-05D1,422116165,521CommonForm 4 ↗
Daniel WoodlandSVP & President, MS Division2026-04-05D1,228116142,939CommonForm 4 ↗
Clinton M. HarisSVP & President, APS Division2026-04-05D1,290116150,156CommonForm 4 ↗
Olivier BlachierSVP, Chief Strategy Officer2026-04-05D64311674,845CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-04-07D1,592116183,987CommonForm 4 ↗
Olivier BlachierSVP, Chief Strategy Officer2026-04-07D27511631,782CommonForm 4 ↗
Bertrand LoyDirector2026-04-14D17,39600Derivative, Class A CommonForm 4 ↗
Bertrand LoyDirector2026-04-14A17,396981,706,722CommonForm 4 ↗
Bertrand LoyDirector2026-04-14D17,3961402,439,267CommonForm 4 ↗
Bertrand LoyDirector2026-04-17D44,1381446,373,969CommonForm 4 ↗
Bertrand LoyDirector2026-04-17D44,13800Derivative, Class A CommonForm 4 ↗
Bertrand LoyDirector2026-04-17A44,138984,330,379CommonForm 4 ↗
James P. LedererDirector2026-05-06A1,41200CommonForm 4 ↗
Dr. Azita Saleki-GerhardtDirector2026-05-06A1,41200CommonForm 4 ↗
Mary PumaDirector2026-05-06A1,41200CommonForm 4 ↗
Rodney ClarkDirector2026-05-06A1,41200CommonForm 4 ↗
Yvette KanouffDirector2026-05-06A1,41200CommonForm 4 ↗
James F. GentilcoreDirector2026-05-06A1,41200CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-05-14A3,91698384,199CommonForm 4 ↗
Olivier BlachierSVP, Chief Strategy Officer2026-05-14A2,00081161,420CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-05-14D3,916140549,219CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-05-14D2,410140337,496CommonForm 4 ↗
Olivier BlachierSVP, Chief Strategy Officer2026-05-14D2,00000Derivative, Class A CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-05-14D3,91600Derivative, Class A CommonForm 4 ↗
Clinton M. HarisSVP & President, APS Division2026-05-14A5,83056324,848CommonForm 4 ↗
Clinton M. HarisSVP & President, APS Division2026-05-14D5,830145842,843CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-05-14A2,41081194,511CommonForm 4 ↗
Olivier BlachierSVP, Chief Strategy Officer2026-05-14D2,000140280,080CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-05-14D2,41000Derivative, Class A CommonForm 4 ↗
Clinton M. HarisSVP & President, APS Division2026-05-14D5,83000Derivative, Class A CommonForm 4 ↗
Susan RiceSVP, Global Human Resources2026-05-15D6,933133922,158CommonForm 4 ↗
Susan RiceSVP, Global Human Resources2026-05-15A12,96056722,131CommonForm 4 ↗
Susan RiceSVP, Global Human Resources2026-05-15D12,96000Derivative, Class A CommonForm 4 ↗
Susan RiceSVP, Global Human Resources2026-05-15D12,9601331,720,440CommonForm 4 ↗
Sukhi NageshSVP & Chief Financial Officer2026-05-18A8,25400CommonForm 4 ↗
Clinton M. HarisSVP & President, APS Division2026-05-27D6,84800Derivative, Class A CommonForm 4 ↗
Clinton M. HarisSVP & President, APS Division2026-05-27A6,84898671,857CommonForm 4 ↗
Clinton M. HarisSVP & President, APS Division2026-05-27D6,8481491,021,927CommonForm 4 ↗
James P. LedererDirector2026-06-03D3,569144512,473CommonForm 4 ↗

Transaction codes per Form 4: A acquisition · S open-market sale · F tax withholding · M option exercise · G gift. Value = shares × price as reported. Dividend-equivalent and fractional-share accrual rows (derivative Class A, under $10,000 and under 2,000 shares) are aggregated per date; every row appears in full below.

03

Grants of plan-based awards — fiscal year 2025

ExecutiveAwardGrant dateThresholdTargetGrantedMaximumGrant-date fair value
Bertrand LoyRSU2025-04-0154,060$4,659,972
David ReederRSU2025-04-232,897210,004
Bertrand LoyPSU2025-04-0120,27340,54581,0904,241,412
David ReederPSU2025-08-1821,23542,46984,9382,582,115
David ReederRSU2025-08-1856,6244,439,888
Susan RiceRSU2025-04-017,656659,947
Linda LaGorgaRSU2025-04-0110,672919,926
Susan RicePSU2025-04-012,8715,74211,484600,671
Linda LaGorgaPSU2025-04-014,0028,00416,008837,298
03b

Vehicle mix — grant-date fair value by award type

Named executive officerTime-vested (RSU)Performance-vested (PSU)Options / SARs% performance-vested
Bertrand Loy$4,659,972$4,241,412$047.6%
David Reeder4,649,8922,582,115035.7%
Susan Rice659,947600,671047.6%
Linda LaGorga919,926837,298047.6%

% performance-vested = PSU grant-date fair value ÷ (RSU + PSU + Options), a computed value with the derivation shown in the register.

04

Outstanding equity awards at fiscal year-end 2025

ExecutiveAwardShares unvestedExercise priceMarket value unvested
Daniel WoodlandRSU3,443$292,483
David ReederRSU56,6244,439,888
Susan RiceOption1,899128.44
Bertrand LoyRSU81,0904,241,412
David ReederRSU84,9382,582,115
Joseph ColellaRSU11,136582,468
Daniel WoodlandRSU10,092527,862
Linda LaGorgaRSU16,008837,298
Daniel WoodlandOption5,32080.71
Daniel WoodlandRSU6,728579,954
David ReederRSU42,4693,582,260
Bertrand LoyRSU25,6462,191,451
Bertrand LoyRSU6,812584,810
Daniel WoodlandRSU6,506557,239
Susan RiceRSU3,716317,532
Joseph ColellaOption6,42680.71
Daniel WoodlandOption12,04886.2
Susan RiceOption6,64880.71
Linda LaGorgaRSU9,822837,326
Linda LaGorgaOption19,11286.2
Susan RiceRSU5,742485,486
Joseph ColellaRSU5,389460,490
Bertrand LoyOption49,410140.62
Daniel WoodlandOption5,937140.62
David ReederOption95,57678.41
Joseph ColellaRSU3,689313,381
Linda LaGorgaRSU4,919417,869
Joseph ColellaRSU3,687313,211
Susan RiceRSU11,484600,671
Linda LaGorgaRSU6,548558,217
Bertrand LoyRSU38,4713,287,347
Joseph ColellaRSU7,424639,949
Daniel WoodlandRSU4,460381,107
Susan RiceOption13,70886.2
Bertrand LoyRSU40,5453,428,080
Daniel WoodlandRSU5,046426,639
Bertrand LoyRSU28,6562,434,327
Bertrand LoyOption96,81286.2
Joseph ColellaRSU93480,184
Joseph ColellaOption2,071128.44
Joseph ColellaRSU3,592306,936
Susan RiceRSU3,935334,278
David ReederRSU2,897210,004
Bertrand LoyOption15,098128.44
Bertrand LoyRSU54,0604,659,972
Bertrand LoyOption45,85280.71
Linda LaGorgaRSU10,672919,926
Linda LaGorgaRSU8,004676,738
Susan RiceRSU7,656659,947
Susan RiceRSU5,575476,384
Joseph ColellaOption13,29686.2
Joseph ColellaRSU5,568470,774
Linda LaGorgaRSU4,917417,699
Linda LaGorgaOption11,43891.63
Susan RiceRSU3,933334,108
Daniel WoodlandRSU3,441292,313
Daniel WoodlandRSU2,972253,957
Susan RiceRSU85673,488
Linda LaGorgaOption8,481140.62
Susan RiceOption6,786140.62
Joseph ColellaOption6,360140.62
05

Incentive-plan design — the Compensation Discussion & Analysis

total compensation is tied to individual performance, total compensation will vary with the Company's performance in achieving financial and other strategic objectives, and long-term incentive compensation is closely aligned with stockholders interests

CEO STI target (% of salary)120%
CEO LTI target (% of salary)
Independent consultantFW Cook
Clawback policytrue
Anti-hedgingtrue
Anti-pledgingTrue
06

Say-on-pay — recent advisory votes

Meeting yearMeeting dateForAgainstAbstainSupportOutcome
20262026-05-06134,253,9106,187,37471,11395.59%Passed
20252025-04-23104,514,01430,881,02678,41677.19%Passed
20242024-04-24124,462,85711,955,69945,86091.24%Passed
20232023-04-26121,999,22310,431,4262,099,28092.12%Passed
20222022-04-27115,801,5525,157,59158,86395.74%Passed
20212021-04-29117,758,9503,692,93167,28496.96%Passed

Rows are labeled by annual-meeting year, with the meeting date beside each; the vote held in a given year acts on the prior fiscal year's compensation.

Say-on-pay — history, company's computation

Meeting yearMeeting dateApproval — company's computation
20262026-05-0695.59%a
20252025-04-2377.19%b
20242024-04-2491.24%c

a. Approved under the standard stated in the filing — “FOR, AGAINST, or ABSTAIN Abstentions and Broker non-votes have no effect A majority of all votes cast must be "for" this Proposal.”.

b. Approved under the standard stated in the filing — “Abstentions and Broker non-votes have no effect”.

c. Approved under the standard stated in the filing — “Under the Company's by-laws, shares whose ballot is marked as withheld, shares otherwise present at the meeting but for which there is an abstention, and shares otherwise present at the meeting as to which the stockholder gives no authority or direction are not counted as votes cast.”.

Approval percentages are the company's own reported computations under its own stated standard, not recomputed by Velarion. Where a company does not state a standard, none is assumed.

07

CEO pay ratio

Ratio (CEO : median employee)162 : 1
CEO total compensation$12,595,156
Median employee compensation$77,862
08

Director compensation — fiscal year 2025

DirectorCash feesStock awardsOption awardsNon-equity incentiveAll otherTotal
James F. GentilcoreIndependent · Lead Independent Director · Audit & Finance (Chair) · Management Development & Compensation · Environmental, Health, Safety & Sustainability$112,201$210,004$0$0$0$322,205
Mary PumaIndependent · Audit & Finance (Chair) · Management Development & Compensation89,891210,004000299,895
Yvette KanouffIndependent · Audit & Finance · Management Development & Compensation (Chair)87,799210,004000297,803
Dr. Azita Saleki-GerhardtIndependent · Governance & Nominating (Chair) · Environmental, Health, Safety & Sustainability86,250210,004000296,254
Rodney ClarkIndependent · Management Development & Compensation · Governance & Nominating · Environmental, Health, Safety & Sustainability (Chair)86,250210,004000296,254
James P. LedererIndependent · Audit & Finance · Management Development & Compensation · Governance & Nominating78,750210,004000288,754
Bertrand LoyEmployee director · Board Chair00000
David ReederEmployee director00000
09

Board fee structure and ownership guideline

Annual cash retainer$105,000
Annual equity retainer$210,000
Per board meeting fee
Committee chair fees (audit / comp / nom-gov)20,000 / 15,000
Stock ownership guideline5x annual cash retainer ($525,000)
09b

Total cost of the board

ComponentFY2025
Cash retainers and fees$541,141
Equity awards (grant-date value)$1,260,024
All other compensation$0
Total cost of the board$1,801,165

Computed as the sum of the director compensation table rows above; inputs and formula shown in the register.

10

Disclosed peer group — fiscal year 2025

The compensation peer group as the company disclosed it in its own proxy — the reference set behind the percentile above.

10a

Peer reciprocity

Of the companies Entegris names as compensation peers, which name it back in their own disclosed peer groups. A peer set the market reciprocates reads differently from one selected in a single direction.

Reciprocity shown where the peer's own current proxy has been read — each mark is cited in the register to that peer's filing. A dash means the peer's current proxy was read and names no reciprocal group including Entegris.

10b

Chief executive pay against the peer group

Most recent fiscal-year chief executive compensation at each disclosed peer, taken from that company's own proxy statement.

RankCompanyFYChief executiveSalaryStock awardsOption awardsNon-equity incentiveTotal
1Element Solutions Inc.2025Benjamin H. Gliklich$1,087,500$23,688,894$0$1,520,947$26,480,462
2Marvell Technology, Inc.2026Matthew Murphy1,237,50020,200,06803,621,00025,064,348
3Skyworks Solutions, Inc.2025Liam Griffin745,67510,416,7300024,717,041
4Monolithic Power Systems, Inc.2025Michael Hsing1,030,96212,686,33206,210,00019,930,736
5Trimble Inc.2025Robert Painter950,00013,311,8642,230,6372,633,44319,129,944
6Keysight Technologies, Inc.2025Satish Dhanasekaran933,00015,345,17601,575,47318,020,109
7AMETEK, Inc.2025David Zapico1,400,0008,781,3062,165,6342,437,15516,462,630
8Albemarle Corporation2025J. Kent Masters Jr.1,400,0007,949,6402,500,0173,247,61815,513,654
9Teradyne, Inc.2025Gregory Smith959,45710,186,5131,033,3351,914,28314,107,588
10Zebra Technologies Corporation2025William Burns1,025,00111,000,21401,763,51413,890,300
11Qorvo, Inc.2026Robert Bruggeworth1,065,65210,799,96101,671,68013,551,627
12MKS Instruments, Inc.2025John Lee1,037,94510,133,32701,751,53312,961,940
13Sensata Technologies Holding plc2025Stephan von Schuckmann1,167,9747,367,55501,507,95012,587,665
14Entegris2025David Reeder432,4047,232,0073,329,868308,51511,507,888
15Celanese Corporation2025Scott Richardson5,249,9582,249,9901,342,62510,137,072
16Graco Inc.2025Mark Sheahan1,065,00005,749,7751,259,9079,491,330
17Donaldson Company, Inc.2025Tod Carpenter1,095,3852,853,6302,849,9451,325,5448,297,471
18Nordson Corporation2025Sundaram Nagarajan1,049,3853,514,4131,519,5471,327,4728,153,900
19Avantor, Inc.2025Emmanuel Ligner379,2972,499,9902,499,998330,0385,895,624
20Teledyne Technologies Incorporated2025George C. Bobb III816,827601,5461,730,5221,080,9084,255,049
21Coherent Corp.2025James R. Anderson1,060,000002,654,5583,722,935

Each peer's compensation is from its most recently filed proxy; fiscal years differ by company. Each peer's figures come from its own filings; the subject company is highlighted. Peers whose chief executive compensation is outside our coverage universe are stated as such, never left blank.

10c

Incentive design against the same peers

CompanyAnnual incentive payoutLong-term vehicle mixPSU measures include TSRCompensation consultant
Entegris69.0%RSU 40 · Options 30 · PSU 30Yes — Relative TSRFW Cook
Albemarle Corporationnot disclosednot disclosednot disclosedFarient Advisors LLC
AMETEK, Inc.147.5%PSU 55 · Options 25 · RSU 20Yes — Relative Total Shareholder Return (TSR)Pay Governance LLC
Avantor, Inc.56.9%PSU 50 · Options 25 · RSU 25Yes — TSR Relative to Comparator GroupFW Cook
Celanese Corporation93.4%PSU 70 · Options 30NoWillis Towers Watson PLC
Coherent Corp.170%PSU 60 · RSU 40Yes — Relative Total Shareholder Return (TSR)Compensia
Donaldson Company, Inc.100.42%PSU 50 · Options 50NoWTW
Element Solutions Inc.126%PSU 67 · RSU 33NoFW Cook
Graco Inc.118%Options 100not disclosedWillis Towers Watson
Keysight Technologies, Inc.114.09%PSU 60 · RSU 40Yes — 3-Year Relative TSRMeridian Compensation Partners LLC
Marvell Technology, Inc.144.84%MSU 70 · RSU 30Yes — Relative TSR vs. S&P 500 IndexCompensia
MKS Instruments, Inc.135%PSU 60 · RSU 40Yes — Relative Total Shareholder Return (rTSR)Pearl Meyer
Monolithic Power Systems, Inc.400%PSU 100Yes — Relative TSR vs. PHLX IndexRadford
Nordson Corporationnot disclosednot disclosednot disclosedFW Cook
Qorvo, Inc.98.05%PSU 60 · RSU 40NoCompensia
Sensata Technologies Holding plcnot disclosedPSU 55 · RSU 45Yes — rTSRFW Cook
Skyworks Solutions, Inc.206%PSU 60 · RSU 40Yes — TSR Percentile RankingAon
Teledyne Technologies Incorporated97.6%Options 33 · Cash LTI 33 · PSU 33NoExequity LLP
Teradyne, Inc.136.0%not disclosedYes — TSR vs NYSE Composite IndexCompensia
Trimble Inc.138.6%PSU 60 · RSU 25 · Options 15Yes — Total Shareholder Return (TSR) relative to S&P 500Mercer (US) LLC
Zebra Technologies Corporation114.7%PSU 60 · RSU 40NoFW Cook

Read from each company's Compensation Discussion and Analysis: annual incentive payout as a percentage of target, the disclosed long-term vehicle mix, whether performance-share measures include a total shareholder return component, and the retained compensation consultant. “Not disclosed” appears only where the company's filing does not state the item.

11

Source register

Each figure's location is given both for the eye (section · page · table · row · column) and for a script (table/row/column index and exact character span in the filed document). Any figure can be independently confirmed against the source.

#SupportsDocumentFiledAccessionLocation in document
1Section 01, Bertrand LoyDEF 14A2026-03-230001101302-26-000054Section “2025 Summary Compensation Table”. As printed: 14,324,681. Filing ↗machine: t162 · r3 · c15 · span 1089418–1089428
2Section 01, David ReederDEF 14A2026-03-230001101302-26-000054Section “2025 Summary Compensation Table”. As printed: 11,507,888. Filing ↗machine: t162 · r2 · c15 · span 1085053–1085063
3Section 01, Linda LaGorgaDEF 14A2026-03-230001101302-26-000054Section “2025 Summary Compensation Table”. As printed: 3,373,992. Filing ↗machine: r6 · c27 · span 1101138–1101147
4Section 01, Susan RiceDEF 14A2026-03-230001101302-26-000054Section “2025 Summary Compensation Table”. As printed: 2,566,832. Filing ↗machine: r9 · c27 · span 1113118–1113127
5Section 01, Joseph ColellaDEF 14A2026-03-230001101302-26-000054Section “2025 Summary Compensation Table”. As printed: 2,528,058. Filing ↗machine: r12 · c27 · span 1124548–1124557
6Section 01, Daniel WoodlandDEF 14A2026-03-230001101302-26-000054Section “2025 Summary Compensation Table”. As printed: 2,436,187. Filing ↗machine: r15 · c27 · span 1136541–1136550
7Section 03, Bertrand Loy RSUDEF 14A2026-03-230001101302-26-000054Section “Grants of Plan-Based Awards” · grants of plan-based awards table. Filing ↗machine: t169 · r18 · c11 · span 1443696–1443702
8Section 03, David Reeder RSUDEF 14A2026-03-230001101302-26-000054Section “Grants of Plan-Based Awards” · grants of plan-based awards table. Filing ↗machine: t165 · r5 · c22 · span 1200299–1200306
9Section 03, Bertrand Loy PSUDEF 14A2026-03-230001101302-26-000054Section “Grants of Plan-Based Awards” · grants of plan-based awards table. Filing ↗machine: t169 · r14 · c16 · span 1429127–1429133
10Section 03, David Reeder PSUDEF 14A2026-03-230001101302-26-000054Section “Grants of Plan-Based Awards” · grants of plan-based awards table. Filing ↗machine: t169 · r4 · c16 · span 1388964–1388970
11Section 03, David Reeder RSUDEF 14A2026-03-230001101302-26-000054Section “Grants of Plan-Based Awards” · grants of plan-based awards table. Filing ↗machine: t169 · r5 · c12 · span 1392504–1392510
12Section 03, Susan Rice RSUDEF 14A2026-03-230001101302-26-000054Section “Grants of Plan-Based Awards” · grants of plan-based awards table. Filing ↗machine: t171 · r15 · c10 · span 1553679–1553684
13Section 03, Linda LaGorga RSUDEF 14A2026-03-230001101302-26-000054Section “Grants of Plan-Based Awards” · grants of plan-based awards table. Filing ↗machine: t169 · r27 · c11 · span 1484354–1484360
14Section 03, Susan Rice PSUDEF 14A2026-03-230001101302-26-000054Section “Grants of Plan-Based Awards” · grants of plan-based awards table. Filing ↗machine: t171 · r11 · c14 · span 1537530–1537535
15Section 03, Linda LaGorga PSUDEF 14A2026-03-230001101302-26-000054Section “Grants of Plan-Based Awards” · grants of plan-based awards table. Filing ↗machine: t169 · r24 · c15 · span 1471547–1471552
16Section 07, pay ratioDEF 14A2026-03-230001101302-26-000054Section “CEO Pay Ratio”. As printed: 162 : 1. Filing ↗machine: span 1798945–1798948
17Section 08, James F. GentilcoreDEF 14A2026-03-230001101302-26-000054Section “Director Compensation”. As printed: 322,205. Filing ↗machine: span 669775–669782
18Section 08, Mary PumaDEF 14A2026-03-230001101302-26-000054Section “Director Compensation”. As printed: 299,895. Filing ↗machine: span 675452–675459
19Section 08, Yvette KanouffDEF 14A2026-03-230001101302-26-000054Section “Director Compensation”. As printed: 297,803. Filing ↗machine: span 671710–671717
20Section 08, Dr. Azita Saleki-GerhardtDEF 14A2026-03-230001101302-26-000054Section “Director Compensation”. As printed: 296,254. Filing ↗machine: span 677273–677280
21Section 08, Rodney ClarkDEF 14A2026-03-230001101302-26-000054Section “Director Compensation”. As printed: 296,254. Filing ↗machine: span 667959–667966
22Section 08, James P. LedererDEF 14A2026-03-230001101302-26-000054Section “Director Compensation”. As printed: 288,754. Filing ↗machine: span 673522–673529
23Section 08, Bertrand LoyDEF 14A2026-03-230001101302-26-000054Section “Director Compensation”. As printed: 0. Filing ↗
24Section 08, David ReederDEF 14A2026-03-230001101302-26-000054Section “Director Compensation”. As printed: 0. Filing ↗
25Section 02, Susan Rice 2026-04-01Form 42026-04-020001101302-26-000073Insider equity transaction reported since the proxy statement. Filing ↗
26Section 02, Bertrand Loy 2026-04-01Form 42026-04-020001101302-26-000075Insider equity transaction reported since the proxy statement. Filing ↗
27Section 02, Olivier Blachier 2026-04-01Form 42026-04-020001101302-26-000071Insider equity transaction reported since the proxy statement. Filing ↗
28Section 02, Michael Sauer 2026-04-01Form 42026-04-020001101302-26-000072Insider equity transaction reported since the proxy statement. Filing ↗
29Section 02, Joseph Colella 2026-04-01Form 42026-04-020001101302-26-000074Insider equity transaction reported since the proxy statement. Filing ↗
30Section 02, David Reeder 2026-04-01Form 42026-04-020001101302-26-000070Insider equity transaction reported since the proxy statement. Filing ↗
31Section 02, Clinton M. Haris 2026-04-01Form 42026-04-020001101302-26-000068Insider equity transaction reported since the proxy statement. Filing ↗
32Section 02, Daniel Woodland 2026-04-01Form 42026-04-020001101302-26-000069Insider equity transaction reported since the proxy statement. Filing ↗
33Section 02, Michael Sauer 2026-04-05Form 42026-04-060001101302-26-000085Insider equity transaction reported since the proxy statement. Filing ↗
34Section 02, Bertrand Loy 2026-04-05Form 42026-04-060001101302-26-000089Insider equity transaction reported since the proxy statement. Filing ↗
35Section 02, Joseph Colella 2026-04-05Form 42026-04-060001101302-26-000088Insider equity transaction reported since the proxy statement. Filing ↗
36Section 02, Susan Rice 2026-04-05Form 42026-04-060001101302-26-000084Insider equity transaction reported since the proxy statement. Filing ↗
37Section 02, Daniel Woodland 2026-04-05Form 42026-04-060001101302-26-000083Insider equity transaction reported since the proxy statement. Filing ↗
38Section 02, Clinton M. Haris 2026-04-05Form 42026-04-060001101302-26-000086Insider equity transaction reported since the proxy statement. Filing ↗
39Section 02, Olivier Blachier 2026-04-05Form 42026-04-060001101302-26-000087Insider equity transaction reported since the proxy statement. Filing ↗
40Section 02, Joseph Colella 2026-04-07Form 42026-04-080001101302-26-000092Insider equity transaction reported since the proxy statement. Filing ↗
41Section 02, Olivier Blachier 2026-04-07Form 42026-04-080001101302-26-000093Insider equity transaction reported since the proxy statement. Filing ↗
42Section 02, Bertrand Loy 2026-04-14Form 42026-04-160001101302-26-000097Insider equity transaction reported since the proxy statement. Filing ↗
43Section 02, Bertrand Loy 2026-04-14Form 42026-04-160001101302-26-000097Insider equity transaction reported since the proxy statement. Filing ↗
44Section 02, Bertrand Loy 2026-04-14Form 42026-04-160001101302-26-000097Insider equity transaction reported since the proxy statement. Filing ↗
45Section 02, Bertrand Loy 2026-04-17Form 42026-04-200001197452-26-000002Insider equity transaction reported since the proxy statement. Filing ↗
46Section 02, Bertrand Loy 2026-04-17Form 42026-04-200001197452-26-000002Insider equity transaction reported since the proxy statement. Filing ↗
47Section 02, Bertrand Loy 2026-04-17Form 42026-04-200001197452-26-000002Insider equity transaction reported since the proxy statement. Filing ↗
48Section 02, James P. Lederer 2026-05-06Form 42026-05-080001101302-26-000113Insider equity transaction reported since the proxy statement. Filing ↗
49Section 02, Dr. Azita Saleki-Gerhardt 2026-05-06Form 42026-05-080001101302-26-000114Insider equity transaction reported since the proxy statement. Filing ↗
50Section 02, Mary Puma 2026-05-06Form 42026-05-080001101302-26-000111Insider equity transaction reported since the proxy statement. Filing ↗
51Section 02, Rodney Clark 2026-05-06Form 42026-05-080001101302-26-000110Insider equity transaction reported since the proxy statement. Filing ↗
52Section 02, Yvette Kanouff 2026-05-06Form 42026-05-080001101302-26-000109Insider equity transaction reported since the proxy statement. Filing ↗
53Section 02, James F. Gentilcore 2026-05-06Form 42026-05-080001101302-26-000112Insider equity transaction reported since the proxy statement. Filing ↗
54Section 02, Joseph Colella 2026-05-14Form 42026-05-180001101302-26-000121Insider equity transaction reported since the proxy statement. Filing ↗
55Section 02, Olivier Blachier 2026-05-14Form 42026-05-180001101302-26-000122Insider equity transaction reported since the proxy statement. Filing ↗
56Section 02, Joseph Colella 2026-05-14Form 42026-05-180001101302-26-000121Insider equity transaction reported since the proxy statement. Filing ↗
57Section 02, Joseph Colella 2026-05-14Form 42026-05-180001101302-26-000121Insider equity transaction reported since the proxy statement. Filing ↗
58Section 02, Olivier Blachier 2026-05-14Form 42026-05-180001101302-26-000122Insider equity transaction reported since the proxy statement. Filing ↗
59Section 02, Joseph Colella 2026-05-14Form 42026-05-180001101302-26-000121Insider equity transaction reported since the proxy statement. Filing ↗
60Section 02, Clinton M. Haris 2026-05-14Form 42026-05-180001101302-26-000120Insider equity transaction reported since the proxy statement. Filing ↗
61Section 02, Clinton M. Haris 2026-05-14Form 42026-05-180001101302-26-000120Insider equity transaction reported since the proxy statement. Filing ↗
62Section 02, Joseph Colella 2026-05-14Form 42026-05-180001101302-26-000121Insider equity transaction reported since the proxy statement. Filing ↗
63Section 02, Olivier Blachier 2026-05-14Form 42026-05-180001101302-26-000122Insider equity transaction reported since the proxy statement. Filing ↗
64Section 02, Joseph Colella 2026-05-14Form 42026-05-180001101302-26-000121Insider equity transaction reported since the proxy statement. Filing ↗
65Section 02, Clinton M. Haris 2026-05-14Form 42026-05-180001101302-26-000120Insider equity transaction reported since the proxy statement. Filing ↗
66Section 02, Susan Rice 2026-05-15Form 42026-05-180001101302-26-000124Insider equity transaction reported since the proxy statement. Filing ↗
67Section 02, Susan Rice 2026-05-15Form 42026-05-180001101302-26-000124Insider equity transaction reported since the proxy statement. Filing ↗
68Section 02, Susan Rice 2026-05-15Form 42026-05-180001101302-26-000124Insider equity transaction reported since the proxy statement. Filing ↗
69Section 02, Susan Rice 2026-05-15Form 42026-05-180001101302-26-000124Insider equity transaction reported since the proxy statement. Filing ↗
70Section 02, Sukhi Nagesh 2026-05-18Form 42026-05-190001101302-26-000129Insider equity transaction reported since the proxy statement. Filing ↗
71Section 02, Clinton M. Haris 2026-05-27Form 42026-05-280001101302-26-000131Insider equity transaction reported since the proxy statement. Filing ↗
72Section 02, Clinton M. Haris 2026-05-27Form 42026-05-280001101302-26-000131Insider equity transaction reported since the proxy statement. Filing ↗
73Section 02, Clinton M. Haris 2026-05-27Form 42026-05-280001101302-26-000131Insider equity transaction reported since the proxy statement. Filing ↗
74Section 02, James P. Lederer 2026-06-03Form 42026-06-040001101302-26-000136Insider equity transaction reported since the proxy statement. Filing ↗
75Section 06, 2026 voteForm 8-K2026-05-080001140361-26-020041Item 5.07 · say-on-pay result. As reported: 95.59% (votes for as printed: 134,253,910). Filing ↗
76Section 06, 2025 voteForm 8-K2025-04-230001101302-25-000044Item 5.07 · say-on-pay result. As reported: 77.19% (votes for as printed: 104,514,014). Filing ↗
77Section 06, 2024 voteForm 8-K2024-04-240001101302-24-000029Item 5.07 · say-on-pay result. As reported: 91.24% (votes for as printed: 124,462,857). Filing ↗
78Section 01 trend, Δ column (computed)ComputedcomputedΔ = current-FY total − prior-FY total per named officer.machine: formula: Δ = FY(n) − FY(n−1)
79Section 03b vehicle mix (computed)ComputedcomputedRSU / PSU / Options grant-date fair values summed per officer from the grants table; % performance-vested = PSU ÷ (RSU+PSU+Options).machine: formula: sums + PSU ratio
80Section 09b board cost (computed)ComputedcomputedCash 541,141 + equity 1,260,024 + all other 0 = 1,801,165, summed across the director compensation table rows.machine: formula: Σ = 1,801,165
81Element Solutions Inc., Section 10b CEO totalDEF 14A2026-03-230001590714-26-000034CEO total compensation as printed in Element Solutions Inc.'s own proxy. As printed: 26,480,462. Filing ↗machine: r3 · c27 · span 596335–596345
82Marvell Technology, Inc., Section 10b CEO totalDEF 14A2026-05-130001104659-26-060253CEO total compensation as printed in Marvell Technology, Inc.'s own proxy. As printed: 25,064,348. Filing ↗machine: t97 · r3 · c39 · span 1119290–1119300
83Skyworks Solutions, Inc., Section 10b CEO totalDEF 14A2026-04-030001104659-26-039476CEO total compensation as printed in Skyworks Solutions, Inc.'s own proxy. As printed: 24,717,041. Filing ↗machine: r16 · c19 · span 958870–958880
84Monolithic Power Systems, Inc., Section 10b CEO totalDEF 14A2026-04-300001437749-26-014084CEO total compensation as printed in Monolithic Power Systems, Inc.'s own proxy. As printed: 19,930,736. Filing ↗machine: r1 · c25 · span 663335–663345
85Trimble Inc., Section 10b CEO totalDEF 14A2026-04-090000864749-26-000042CEO total compensation as printed in Trimble Inc.'s own proxy. As printed: 19,129,944. Filing ↗machine: r3 · c30 · span 695230–695240
86Keysight Technologies, Inc., Section 10b CEO totalDEF 14A2026-01-260001140361-26-002381CEO total compensation as printed in Keysight Technologies, Inc.'s own proxy. As printed: 18,020,109. Filing ↗machine: r2 · c28 · span 1994587–1994597
87AMETEK, Inc., Section 10b CEO totalDEF 14A2026-03-110001037868-26-000062CEO total compensation as printed in AMETEK, Inc.'s own proxy. As printed: 16,462,630. Filing ↗machine: span 495973–495983
88Albemarle Corporation, Section 10b CEO totalDEF 14A2026-03-240000915913-26-000050CEO total compensation as printed in Albemarle Corporation's own proxy. As printed: 15,513,654. Filing ↗machine: span 959225–959235
89Teradyne, Inc., Section 10b CEO totalDEF 14A2026-03-270001193125-26-127504CEO total compensation as printed in Teradyne, Inc.'s own proxy. As printed: 14,107,588. Filing ↗machine: t91 · r2 · c32 · span 2057888–2057898
90Zebra Technologies Corporation, Section 10b CEO totalDEF 14A2026-04-030001104659-26-039488CEO total compensation as printed in Zebra Technologies Corporation's own proxy. As printed: 13,890,300. Filing ↗machine: t171 · r5 · c14 · span 2062887–2062897
91Qorvo, Inc., Section 10b CEO totalDEF 14A2026-06-260001193125-26-285512CEO total compensation as printed in Qorvo, Inc.'s own proxy. As printed: 13,551,627. Filing ↗machine: r2 · c14 · span 631120–631130
92MKS Instruments, Inc., Section 10b CEO totalDEF 14A2026-03-310001193125-26-133378CEO total compensation as printed in MKS Instruments, Inc.'s own proxy. As printed: 12,961,940. Filing ↗machine: t120 · r3 · c26 · span 1981823–1981833
93Sensata Technologies Holding plc, Section 10b CEO totalDEF 14A2026-04-290001477294-26-000022CEO total compensation as printed in Sensata Technologies Holding plc's own proxy. As printed: 12,587,665. Filing ↗machine: t114 · r2 · c14 · span 827825–827835
94Entegris (subject), Section 10b CEO totalDEF 14A2026-03-230001101302-26-000054CEO total compensation as printed in Entegris's own proxy. As printed: 11,507,888. Filing ↗machine: t162 · r2 · c15 · span 1085053–1085063
95Celanese Corporation, Section 10b CEO totalDEF 14A2026-03-040001306830-26-000052CEO total compensation as printed in Celanese Corporation's own proxy. As printed: 10,137,072. Filing ↗
96Graco Inc., Section 10b CEO totalDEF 14A2026-03-110001193125-26-101267CEO total compensation as printed in Graco Inc.'s own proxy. As printed: 9,491,330. Filing ↗machine: r2 · c35 · span 436111–436120
97Donaldson Company, Inc., Section 10b CEO totalDEF 14A2025-10-060000029644-25-000120CEO total compensation as printed in Donaldson Company, Inc.'s own proxy. As printed: 8,297,471. Filing ↗machine: r2 · c24 · span 602669–602678
98Nordson Corporation, Section 10b CEO totalDEF 14A2026-01-160001193125-26-014662CEO total compensation as printed in Nordson Corporation's own proxy. As printed: 8,153,900. Filing ↗machine: r4 · c29 · span 1301788–1301797
99Avantor, Inc., Section 10b CEO totalDEF 14A2026-03-270001628280-26-021572CEO total compensation as printed in Avantor, Inc.'s own proxy. As printed: 5,895,624. Filing ↗machine: r3 · c9 · span 2130032–2130041
100Teledyne Technologies Incorporated, Section 10b CEO totalDEF 14A2026-03-120001193125-26-104187CEO total compensation as printed in Teledyne Technologies Incorporated's own proxy. As printed: 4,255,049. Filing ↗machine: t364 · r3 · c31 · span 1147322–1147331
101Coherent Corp., Section 10b CEO totalDEF 14A2025-10-020001104659-25-096170CEO total compensation as printed in Coherent Corp.'s own proxy. As printed: 3,722,935. Filing ↗machine: r1 · c22 · span 1172135–1172144
102Section 10a, Sensata Technologies Holding plc reciprocityDEF 14A0001477294-26-000022Sensata Technologies Holding plc's most recent proxy was read; its disclosed peer group does not include Entegris. Filing ↗
103Section 10a, Nordson Corporation reciprocityDEF 14A0001193125-26-014662Nordson Corporation names Entegris in its own disclosed peer group (read from its most recent proxy). Filing ↗
104Section 10a, Avantor, Inc. reciprocityDEF 14A0001628280-26-021572Avantor, Inc.'s most recent proxy was read; its disclosed peer group does not include Entegris. Filing ↗
105Section 10a, Teledyne Technologies Incorporated reciprocityDEF 14A0001193125-26-104187Teledyne Technologies Incorporated's most recent proxy was read; its disclosed peer group does not include Entegris. Filing ↗
106Section 10a, Donaldson Company, Inc. reciprocityDEF 14A0000029644-25-000120Donaldson Company, Inc.'s most recent proxy was read; its disclosed peer group does not include Entegris. Filing ↗
107Section 10a, Zebra Technologies Corporation reciprocityDEF 14A0001104659-26-039488Zebra Technologies Corporation's most recent proxy was read; its disclosed peer group does not include Entegris. Filing ↗
108Section 10a, Teradyne, Inc. reciprocityDEF 14A0001193125-26-127504Teradyne, Inc.'s most recent proxy was read; its disclosed peer group does not include Entegris. Filing ↗
109Section 10a, AMETEK, Inc. reciprocityDEF 14A0001037868-26-000062AMETEK, Inc.'s most recent proxy was read; its disclosed peer group does not include Entegris. Filing ↗
110Section 10a, Celanese Corporation reciprocityDEF 14A0001306830-26-000052Celanese Corporation's most recent proxy was read; its disclosed peer group does not include Entegris. Filing ↗
111Section 10a, Element Solutions Inc. reciprocityDEF 14A0001590714-26-000034Element Solutions Inc. names Entegris in its own disclosed peer group (read from its most recent proxy). Filing ↗
112Section 10a, Graco Inc. reciprocityDEF 14A0001193125-26-101267Graco Inc.'s most recent proxy was read; its disclosed peer group does not include Entegris. Filing ↗
113Section 10a, Trimble Inc. reciprocityDEF 14A0000864749-26-000042Trimble Inc.'s most recent proxy was read; its disclosed peer group does not include Entegris. Filing ↗
114Section 10a, Coherent Corp. reciprocityDEF 14A0001104659-25-096170Coherent Corp. names Entegris in its own disclosed peer group (read from its most recent proxy). Filing ↗
115Section 10a, Qorvo, Inc. reciprocityDEF 14A0001193125-26-285512Qorvo, Inc. names Entegris in its own disclosed peer group (read from its most recent proxy). Filing ↗
116Section 10a, Marvell Technology, Inc. reciprocityDEF 14A0001104659-26-060253Marvell Technology, Inc.'s most recent proxy was read; its disclosed peer group does not include Entegris. Filing ↗
117Section 10a, MKS Instruments, Inc. reciprocityDEF 14A0001193125-26-133378MKS Instruments, Inc. names Entegris in its own disclosed peer group (read from its most recent proxy). Filing ↗
118Section 10a, Albemarle Corporation reciprocityDEF 14A0000915913-26-000050Albemarle Corporation's most recent proxy was read; its disclosed peer group does not include Entegris. Filing ↗
119Section 10a, Skyworks Solutions, Inc. reciprocityDEF 14A0001104659-26-039476Skyworks Solutions, Inc. names Entegris in its own disclosed peer group (read from its most recent proxy). Filing ↗