Independent Director · ENTEGRIS INC (ENTG)

Chair, Audit Committee

Mary Puma — ENTEGRIS Director Compensation (2025)

Fiscal year 2025 director compensation for Mary Puma at ENTEGRIS INC. Every figure below is printed as the company filed it and cited to the filing it came from.

Director compensation as of the proxy filed March 23, 2026 (DEF 14A). Open the filing on EDGAR.

What they were paid

ENTEGRIS Director Compensation Table · all 2 fiscal years held
In US dollars, as ENTEGRIS reports it. Most recent year first. Totals are the company’s disclosed totals.
Fiscal yearCash feesStock awardsOption awardsOtherTotal
FY2025$89,891$210,004——$299,895
FY2024$51,346$132,975$0$0$184,321

Each year as stated in that year's proxy. A dash means the company reported no figure in that column. Source: ENTEGRIS INC DEF 14A filed March 23, 2026, accession 0001101302-26-000054, and prior-year filings. Open the filing on EDGAR.

How this board is paid

company policy · FY2025

ENTEGRIS pays directors a $105,000 cash retainer and $210,000 in RSUs.

Committees

FY2025 · as the proxy prints them

Audit (Chair) · Compensation

The rest of the ENTEGRIS board

FY2025 · as the company reported each
DirectorRoleFY2025 total
Bertrand LoyChair of the Board$0
David ReederDirector$262,653
Dr. Azita Saleki-GerhardtIndependent Director$296,254
James F. GentilcoreLead Independent Director$322,205
James P. LedererIndependent Director$288,754
Rodney ClarkIndependent Director$296,254
Yvette KanouffIndependent Director$297,803

The full ENTEGRIS compensation record

free company brief

This page is one director within ENTEGRIS's record. The company brief lists every named executive and director, each linking to their own page.

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