What they were paid
ONTO INNOVATION Director Compensation Table · all 2 fiscal years held| Fiscal year | Cash fees | Stock awards | Option awards | Other | Total |
|---|---|---|---|---|---|
| FY2025 | $85,625 | $200,027 | $0 | $0 | $285,652 |
| FY2024 | $40,000 | $138,843 | $0 | $0 | $178,843 |
Each year as stated in that year's proxy. A dash means the company reported no figure in that column. Source: ONTO INNOVATION INC. DEF 14A filed April 6, 2026, accession 0001193125-26-143699, and prior-year filings. Open the filing on EDGAR.
How this board is paid
company policy · FY2025ONTO INNOVATION pays directors a $70,000 cash retainer and $185,000 in equity.
The rest of the ONTO INNOVATION board
FY2025 · as the company reported each| Director | Role | FY2025 total |
|---|---|---|
| Christopher A. Seams | Chair of the Board | $351,902 |
| David B. Miller | Independent Director | $295,652 |
| May Su | Independent Director | $296,902 |
| Michael P. Plisinski | Director | $0 |
| Stephen D. Kelley | Independent Director | $287,527 |
| Susan D. Lynch | Independent Director | $301,277 |
The full ONTO INNOVATION compensation record
free company briefThis page is one director within ONTO INNOVATION's record. The company brief lists every named executive and director, each linking to their own page.
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