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Independent Director · ONTO INNOVATION INC. (ONTO)

Stephen S. Schwartz director compensation at Onto Innovation: $286K

Fiscal year 2025 director compensation for Stephen S. Schwartz at ONTO INNOVATION INC.. Every figure below is printed as the company filed it and cited to the filing it came from.

Director compensation as of the proxy filed April 6, 2026 (DEF 14A). Open the filing on EDGAR.

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What they were paid

ONTO INNOVATION Director Compensation Table · all 2 fiscal years held
In US dollars, as ONTO INNOVATION reports it. Most recent year first. Totals are the company’s disclosed totals.
Fiscal yearCash feesStock awardsOption awardsOtherTotal
FY2025$85,625$200,027$0$0$285,652
FY2024$40,000$138,843$0$0$178,843

Each year as stated in that year's proxy. A dash means the company reported no figure in that column. Source: ONTO INNOVATION INC. DEF 14A filed April 6, 2026, accession 0001193125-26-143699, and prior-year filings. Open the filing on EDGAR.

How this page was built: the ONTO INNOVATION INC. filed document, accession 0001193125-26-143699. Every figure is read from that document and cited to the page and table it appears in. Filed April 6, 2026.

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$285,652 Stephen S. Schwartz, FY2025 total director compensation

$500

The free page is the headline figures. The board report is director pay, board composition and committee fees combined into the same kind of document.

Data as of April 6, 2026 · Source: Velarion Executive Compensation Database, deposited on Zenodo (doi:10.5281/zenodo.22283855).

How this board is paid

company policy · FY2025

ONTO INNOVATION pays directors a $70,000 cash retainer and $200,000 in equity.

The rest of the ONTO INNOVATION board

FY2025 · as the company reported each
DirectorRoleFY2025 total
Christopher A. SeamsChair of the Board$351,902
David B. MillerIndependent Director$295,652
May SuIndependent Director$296,902
Michael P. PlisinskiDirector—
Stephen D. KelleyIndependent Director$287,527
Susan D. LynchIndependent Director$301,277

The full ONTO INNOVATION compensation record

free company brief
ONTO INNOVATION INC. (ONTO) — free Compensation Briefevery named executive and director, board pay, say-on-pay, the peer group

This page is one director within ONTO INNOVATION's record. The company brief lists every named executive and director, each linking to their own page.

Peer companies

named in the ONTO INNOVATION proxy · each links to its own free brief

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Board Governance Report