What they were paid
ONTO INNOVATION Director Compensation Table · all 4 fiscal years held| Fiscal year | Cash fees | Stock awards | Option awards | Other | Total |
|---|---|---|---|---|---|
| FY2025 | $21,875 | — | $0 | $0 | $21,875 |
| FY2024 | $73,125 | $185,156 | $0 | $0 | $258,281 |
| FY2023 | $102,500 | $187,902 | $0 | $0 | $290,402 |
| FY2021 | $97,500 | $153,625 | $0 | $0 | $251,125 |
Each year as stated in that year's proxy. A dash means the company reported no figure in that column. Source: ONTO INNOVATION INC. DEF 14A filed April 6, 2026, accession 0001193125-26-143699, and prior-year filings. Open the filing on EDGAR.
How this page was built: the ONTO INNOVATION INC. filed document, accession 0001193125-26-143699. Every figure is read from that document and cited to the page and table it appears in. Filed April 6, 2026.
Get the ONTO INNOVATION Board Governance Report
$21,875 Christine A. Tsingos, FY2025 total director compensation
$500
The free page is the headline figures. The board report is director pay, board composition and committee fees combined into the same kind of document.
Data as of April 6, 2026 · Source: Velarion Executive Compensation Database, deposited on Zenodo (doi:10.5281/zenodo.22283855).
How this board is paid
company policy · FY2025ONTO INNOVATION pays directors a $70,000 cash retainer and $200,000 in equity.
Committees
FY2025 · as the proxy prints themAudit · Compensation
The rest of the ONTO INNOVATION board
FY2025 · as the company reported each| Director | Role | FY2025 total |
|---|---|---|
| Christopher A. Seams | Chair of the Board | $351,902 |
| David B. Miller | Independent Director | $295,652 |
| May Su | Independent Director | $296,902 |
| Michael P. Plisinski | Director | — |
| Stephen D. Kelley | Independent Director | $287,527 |
| Stephen S. Schwartz | Independent Director | $285,652 |
| Susan D. Lynch | Independent Director | $301,277 |
The full ONTO INNOVATION compensation record
free company briefThis page is one director within ONTO INNOVATION's record. The company brief lists every named executive and director, each linking to their own page.
Peer companies
named in the ONTO INNOVATION proxy · each links to its own free briefOrder ONTO
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