What they were paid
AXCELIS TECHNOLOGIES Director Compensation Table · all 3 fiscal years held| Fiscal year | Cash fees | Stock awards | Option awards | Other | Total |
|---|---|---|---|---|---|
| FY2025 | $137,500 | $224,735 | $0 | $0 | $362,235 |
| FY2024 | $140,000 | $187,706 | $0 | $0 | $327,706 |
| FY2023 | $104,231 | $164,083 | $0 | $0 | $268,314 |
Each year as stated in that year's proxy. A dash means the company reported no figure in that column. Source: AXCELIS TECHNOLOGIES INC DEF 14A filed March 31, 2026, accession 0001104659-26-037356, and prior-year filings. Open the filing on EDGAR.
How this board is paid
company policy · FY2025AXCELIS TECHNOLOGIES pays directors a $65,000 cash retainer and $175,000 in RSUs.
Committees
FY2025 · as the proxy prints themCompensation
The rest of the AXCELIS TECHNOLOGIES board
FY2025 · as the company reported each| Director | Role | FY2025 total |
|---|---|---|
| Gregory B. Graves | Independent Director | — |
| Jeanne Quirk | Independent Director | $312,235 |
| John T. Kurtzweil | Independent Director | $319,735 |
| Necip Sayiner | Independent Director | $304,735 |
| Russell J. Low | Director | $0 |
| Thomas St. Dennis | Independent Director | $304,735 |
| Tzu-Yin Chiu | Independent Director | $294,735 |
The full AXCELIS TECHNOLOGIES compensation record
free company briefThis page is one director within AXCELIS TECHNOLOGIES's record. The company brief lists every named executive and director, each linking to their own page.
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