What they were paid
AXCELIS TECHNOLOGIES Director Compensation Table · all 4 fiscal years held| Fiscal year | Cash fees | Stock awards | Option awards | Other | Total |
|---|---|---|---|---|---|
| FY2025 | $70,000 | $224,735 | — | — | $294,735 |
| FY2024 | $70,000 | $187,706 | $0 | $0 | $257,706 |
| FY2023 | $70,000 | $164,083 | $0 | $0 | $234,083 |
| FY2021 | $70,000 | $133,446 | — | — | $203,446 |
Each year as stated in that year's proxy. A dash means the company reported no figure in that column. Source: AXCELIS TECHNOLOGIES INC DEF 14A filed March 31, 2026, accession 0001104659-26-037356, and prior-year filings. Open the filing on EDGAR.
How this page was built: the AXCELIS TECHNOLOGIES INC filed document, accession 0001104659-26-037356. Every figure is read from that document and cited to the page and table it appears in. Filed March 31, 2026.
Get the AXCELIS TECHNOLOGIES Board Governance Report
$294,735 Tzu-Yin Chiu, FY2025 total director compensation
$500
The free page is the headline figures. The board report is director pay, board composition and committee fees combined into the same kind of document.
Data as of March 31, 2026 · Source: Velarion Executive Compensation Database, deposited on Zenodo (doi:10.5281/zenodo.22283855).
How this board is paid
company policy · FY2025AXCELIS TECHNOLOGIES pays directors a $65,000 cash retainer and $175,000 in RSUs.
Committees
FY2025 · as the proxy prints themTechnology and New Product Development
The rest of the AXCELIS TECHNOLOGIES board
FY2025 · as the company reported each| Director | Role | FY2025 total |
|---|---|---|
| Gregory B. Graves | Independent Director | $319,735 |
| Jeanne Quirk | Independent Director | $312,235 |
| John T. Kurtzweil | Independent Director | $319,735 |
| Jorge Titinger | Independent Director | $362,235 |
| Necip Sayiner | Independent Director | $304,735 |
| Russell J. Low | Director | — |
| Thomas St. Dennis | Independent Director | $304,735 |
The full AXCELIS TECHNOLOGIES compensation record
free company briefThis page is one director within AXCELIS TECHNOLOGIES's record. The company brief lists every named executive and director, each linking to their own page.
Peer companies
named in the AXCELIS TECHNOLOGIES proxy · each links to its own free briefOrder ACLS
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