James Coogan compensation by year
AXCELIS TECHNOLOGIES Summary Compensation Table · all 3 fiscal years held| Component | FY2023 | FY2024 | FY2025 |
|---|---|---|---|
| Salary | $123,115 | $485,000 | $466,346 |
| Bonus | $0 | $0 | $0 |
| Stock awards | $960,528 | $1,072,478 | $1,541,055 |
| Option awards | $0 | $0 | $0 |
| Non-equity incentive | $382,107 | $231,539 | $336,562 |
| Pension and deferred compensation | $0 | $0 | $0 |
| All other | $2,238 | $11,367 | $11,517 |
| Total | $1,467,989 | $1,800,384 | $2,355,480 |
Each year as stated in that year's proxy. A dash means the company reported no figure in that column. Source: AXCELIS TECHNOLOGIES INC DEF 14A filed March 31, 2026, accession 0001104659-26-037356, and prior-year filings. Open the filing on EDGAR.
How this page was built: the AXCELIS TECHNOLOGIES INC filed document, accession 0001104659-26-037356. Every figure is read from that document and cited to the page and table it appears in. Filed March 31, 2026.
Equity holdings
unvested awards at FY2025 year-end| Type | Unvested units | Value at year-end | Exercise price |
|---|---|---|---|
| RSU | 22,362 | $1,796,583 | — |
| PSU | 12,295 | $987,780 | — |
Per the Outstanding Equity Awards at Fiscal Year-End table in AXCELIS TECHNOLOGIES INC's FY2025 proxy; value at the fiscal year-end close, as the company printed it.
AXCELIS TECHNOLOGIES’s named executive officers, FY2025
as the company reported each| Named executive officer | Role | FY2025 total |
|---|---|---|
| Russell Low | President and Chief Executive Officer | $5,100,394 |
| James Coogan · this page | Executive Vice President and Chief Financial Officer | $2,355,480 |
| Eileen Evans | Executive Vice President, HR and Legal, and General Counsel | $1,612,994 |
| Gerald Blumenstock | Executive Vice President, Research, Development, and Engineering | $1,287,852 |
| Gregory Redinbo | Executive Vice President, Marketing and Applications | $1,287,852 |
| Christopher Tatnall | Executive Vice President, Global Customer Operations | $1,287,852 |
The full AXCELIS TECHNOLOGIES compensation record
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How this record is built
Every figure on this page is one figure from a public SEC filing, printed as the filing states it and cited to the document. Compensation totals are AXCELIS TECHNOLOGIES's own disclosed totals, not summed by Velarion. Insider transactions are read from Form 4 filings and cover every line filed since the most recent proxy. Nothing is estimated by Velarion; where the company does not disclose a value the cell reads "—", and a section appears only where the company discloses the data. Corrections: records@velarion.ai.
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