Russell Low is President and Chief Executive Officer of Axcelis Technologies Inc (ACLS). The company reported total compensation of $5,100,394 for fiscal year 2025.
| Salary | $608,654 |
|---|---|
| Bonus | $0 |
| Stock awards | $3,852,701 |
| Option awards | $0 |
| Non-equity incentive plan | $627,522 |
| Pension and non-qualified deferred compensation | $0 |
| All other compensation | $11,517 |
| Total | $5,100,394 |
A dash means the company reported no figure in that column; 0 means it reported zero. Figures are as printed, without adjustment.
Cited to the compensation disclosure Axcelis Technologies Inc filed March 31, 2026, accession 0001104659-26-037356.
| Fiscal year | Role | Salary | Bonus | Stock awards | Option awards | Non-equity incentive | Pension / NQDC | All other | Total |
|---|---|---|---|---|---|---|---|---|---|
| FY2025 | President and Chief Executive Officer | $608,654 | $0 | $3,852,701 | $0 | $627,522 | $0 | $11,517 | $5,100,394 |
| FY2024 | President and Chief Executive Officer | $633,000 | $0 | $3,217,435 | $0 | $431,706 | $0 | $11,367 | $4,293,508 |
| FY2023 | President and Chief Executive Officer | $530,102 | $0 | $3,076,368 | $0 | $519,068 | $0 | $9,900 | $4,135,438 |
Totals as disclosed in each year's own compensation disclosure for Axcelis Technologies Inc.
| Peer-group chief executive median | $7,512,141 |
|---|---|
| Difference from that median | $-2,411,747 |
| Percentile within the disclosed peer group | 27th |
| Peers with a disclosed figure | 15 |
Medians and percentiles are computed across the peer group Axcelis Technologies Inc discloses in its own compensation disclosure.
| Named executive officer | Role | FY2025 total |
|---|---|---|
| Russell Low this page | President and Chief Executive Officer | $5,100,394 |
| James Coogan | Executive Vice President and Chief Financial Officer | $2,355,480 |
| Eileen Evans | Executive Vice President, HR and Legal, and General Counsel | $1,612,994 |
| Gregory Redinbo | Executive Vice President, Marketing and Applications | $1,287,852 |
| Gerald Blumenstock | Executive Vice President, Research, Development, and Engineering | $1,287,852 |
| Christopher Tatnall | Executive Vice President, Global Customer Operations | $1,287,852 |
The company's named executive officers for fiscal year 2025, and what it reported for each. See the full Axcelis Technologies Inc compensation brief.
Russell Low's compensation sits inside Axcelis Technologies Inc's full executive and board picture — the peer group, pay against peers, incentive design and the board itself.