Mark Slicer compensation by year
ONTO INNOVATION Summary Compensation Table · all 4 fiscal years held| Component | FY2022 | FY2023 | FY2024 | FY2025 |
|---|---|---|---|---|
| Salary | $275,192 | $461,942 | $463,500 | $225,813 |
| Bonus | $150,000 | $0 | $0 | $0 |
| Stock awards | $1,000,038 | $834,971 | $922,402 | $814,519 |
| Option awards | $0 | $0 | $0 | $0 |
| Non-equity incentive | $240,334 | $237,287 | $336,779 | $0 |
| Pension and deferred compensation | $0 | $0 | $0 | $0 |
| All other | $5,652 | $10,590 | $7,530 | $1,889,270 |
| Total | $1,671,216 | $1,544,790 | $1,730,211 | $2,929,602 |
Each year as stated in that year's proxy. A dash means the company reported no figure in that column. Source: ONTO INNOVATION INC. DEF 14A filed April 6, 2026, accession 0001193125-26-143699, and prior-year filings. Open the filing on EDGAR.
How this page was built: the ONTO INNOVATION INC. filed document, accession 0001193125-26-143699. Every figure is read from that document and cited to the page and table it appears in. Filed April 6, 2026.
Equity holdings
unvested awards at FY2025 year-end| Type | Unvested units | Value at year-end | Exercise price |
|---|---|---|---|
| PSU | 2,281 | $378,349 | — |
| RSU | 2,024 | $335,720 | — |
| PSU | 2,022 | $335,389 | — |
| PSU | 1,039 | $172,339 | — |
Per the Outstanding Equity Awards at Fiscal Year-End table in ONTO INNOVATION INC.'s FY2025 proxy; value at the fiscal year-end close, as the company printed it.
ONTO INNOVATION’s named executive officers, FY2025
as the company reported each| Named executive officer | Role | FY2025 total |
|---|---|---|
| Michael Plisinski | Chief Executive Officer | $7,813,551 |
| Ido Dolev | Executive Vice President, Product Solutions Group | $4,330,671 |
| Brian Roberts | Chief Financial Officer | $3,054,878 |
| Mark Slicer · this page | Former Senior Vice President, Chief Financial Officer | $2,929,602 |
| Shirley Chen | Senior Vice President, Customer Success | $1,816,401 |
| Ramil Yaldaei | Chief Operating Officer | $1,669,244 |
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How this record is built
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