Mark Slicer compensation by year
ONTO INNOVATION Summary Compensation Table · all 4 fiscal years held| Component | FY2022 | FY2023 | FY2024 | FY2025 |
|---|---|---|---|---|
| Salary | $275,192 | $275,192 | $463,500 | $225,813 |
| Bonus | $150,000 | $150,000 | $0 | $0 |
| Stock awards | $1,000,038 | $1,000,038 | $922,402 | $814,519 |
| Option awards | — | $0 | $0 | $0 |
| Non-equity incentive | $240,334 | $240,334 | $336,779 | $0 |
| Pension and deferred compensation | — | $0 | $0 | $0 |
| All other | $5,652 | $5,652 | $7,530 | $1,889,270 |
| Total | $1,671,216 | $1,671,216 | $1,730,211 | $2,929,602 |
Each year as stated in that year's proxy. A dash means the company reported no figure in that column. Source: ONTO INNOVATION INC. DEF 14A filed April 6, 2026, accession 0001193125-26-143699, and prior-year filings. Open the filing on EDGAR.
Equity holdings
unvested awards at FY2025 year-end| Type | Unvested units | Value at year-end | Exercise price |
|---|---|---|---|
| PSU | 2,281 | $378,349 | — |
| PSU | 1,039 | $172,339 | — |
Per the Outstanding Equity Awards at Fiscal Year-End table in ONTO INNOVATION INC.'s FY2025 proxy; value at the fiscal year-end close, as the company printed it.
ONTO INNOVATION’s named executive officers, FY2025
as the company reported each| Named executive officer | Role | FY2025 total |
|---|---|---|
| Michael Plisinski | Chief Executive Officer | $7,813,551 |
| Ido Dolev | Executive Vice President, Product Solutions Group | $4,330,671 |
| Brian Roberts | Chief Financial Officer | $3,054,878 |
| Mark Slicer · this page | Former Senior Vice President, Chief Financial Officer | $2,929,602 |
| Shirley Chen | Senior Vice President, Customer Success | $1,816,401 |
| Ramil Yaldaei | Chief Operating Officer | $1,669,244 |
The full ONTO INNOVATION compensation record
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Compensation, the day it’s disclosed
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How this record is built
Every figure on this page is one figure from a public SEC filing, printed as the filing states it and cited to the document. Compensation totals are ONTO INNOVATION's own disclosed totals, not summed by Velarion. Insider transactions are read from Form 4 filings and cover every line filed since the most recent proxy. Nothing is estimated by Velarion; where the company does not disclose a value the cell reads "—", and a section appears only where the company discloses the data. Corrections: records@velarion.ai.
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