Michael Plisinski is Chief Executive Officer of Onto Innovation Inc. (ONTO). The company reported total compensation of $7,813,551 for fiscal year 2025.
| Salary | $762,461 |
|---|---|
| Bonus | $1,000 |
| Stock awards | $6,428,679 |
| Option awards | $0 |
| Non-equity incentive plan | $611,002 |
| Pension and non-qualified deferred compensation | $0 |
| All other compensation | $10,409 |
| Total | $7,813,551 |
A dash means the company reported no figure in that column; 0 means it reported zero. Figures are as printed, without adjustment.
Cited to the compensation disclosure Onto Innovation Inc. filed April 6, 2026, accession 0001193125-26-143699.
| Fiscal year | Role | Salary | Bonus | Stock awards | Option awards | Non-equity incentive | Pension / NQDC | All other | Total |
|---|---|---|---|---|---|---|---|---|---|
| FY2025 | Chief Executive Officer | $762,461 | $1,000 | $6,428,679 | $0 | $611,002 | $0 | $10,409 | $7,813,551 |
| FY2024 | Chief Executive Officer | $729,615 | $0 | $5,303,695 | $0 | $920,073 | $0 | $8,383 | $6,961,766 |
| FY2023 | Chief Executive Officer | $634,751 | $0 | $3,977,905 | $0 | $697,044 | $0 | $3,601 | $5,313,301 |
| FY2022 | Chief Executive Officer | $634,751 | — | $3,977,905 | — | $697,044 | — | $3,601 | $5,313,301 |
| FY2021 | Chief Executive Officer | $639,353 | $0 | $3,487,747 | $0 | $995,529 | $0 | $11,681 | $5,134,310 |
| FY2020 | Chief Executive Officer | $592,089 | — | $2,672,777 | — | $489,408 | — | $9,414 | $3,763,688 |
Totals as disclosed in each year's own compensation disclosure for Onto Innovation Inc..
| Named executive officer | Role | FY2025 total |
|---|---|---|
| Michael Plisinski this page | Chief Executive Officer | $7,813,551 |
| Ido Dolev | Executive Vice President, Product Solutions Group | $4,330,671 |
| Brian Roberts | Chief Financial Officer | $3,054,878 |
| Mark Slicer | Former Senior Vice President, Chief Financial Officer | $2,929,602 |
| Shirley Chen | Senior Vice President, Customer Success | $1,816,401 |
| Ramil Yaldaei | Chief Operating Officer | $1,669,244 |
The company's named executive officers for fiscal year 2025, and what it reported for each. See the full Onto Innovation Inc. compensation brief.
Michael Plisinski's compensation sits inside Onto Innovation Inc.'s full executive and board picture — the peer group, pay against peers, incentive design and the board itself.