Michael Plisinski compensation by year
ONTO INNOVATION Summary Compensation Table · all 7 fiscal years held| Component | FY2019 | FY2020 | FY2021 | FY2022 | FY2023 | FY2024 | FY2025 |
|---|---|---|---|---|---|---|---|
| Salary | $83,192 | $592,089 | $639,353 | $634,751 | $692,718 | $729,615 | $762,461 |
| Bonus | $0 | $0 | $0 | $0 | $0 | $0 | $1,000 |
| Stock awards | $0 | $2,672,777 | $3,487,747 | $3,977,905 | $4,327,136 | $5,303,695 | $6,428,679 |
| Option awards | $0 | $0 | $0 | $0 | $0 | $0 | $0 |
| Non-equity incentive | $540,750 | $489,408 | $995,529 | $697,044 | $624,741 | $920,073 | $611,002 |
| Pension and deferred compensation | $0 | $0 | $0 | $0 | $0 | $0 | $0 |
| All other | $1,752,211 | $9,414 | $11,681 | $3,601 | $1,433 | $8,383 | $10,409 |
| Total | $2,376,153 | $3,763,688 | $5,134,310 | $5,313,301 | $5,646,028 | $6,961,766 | $7,813,551 |
Each year as stated in that year's proxy. A dash means the company reported no figure in that column. Source: ONTO INNOVATION INC. DEF 14A filed April 6, 2026, accession 0001193125-26-143699, and prior-year filings. Open the filing on EDGAR.
How this page was built: the ONTO INNOVATION INC. filed document, accession 0001193125-26-143699. Every figure is read from that document and cited to the page and table it appears in. Filed April 6, 2026.
Equity holdings
unvested awards at FY2025 year-end| Type | Unvested units | Value at year-end | Exercise price |
|---|---|---|---|
| RSU | 23,212 | $3,850,174 | — |
| PSU | 23,212 | $3,850,174 | — |
| PSU | 11,942 | $1,980,820 | — |
| PSU | 11,824 | $1,961,247 | — |
| RSU | 7,962 | $1,320,657 | — |
| RSU | 7,883 | $1,307,553 | — |
Per the Outstanding Equity Awards at Fiscal Year-End table in ONTO INNOVATION INC.'s FY2025 proxy; value at the fiscal year-end close, as the company printed it.
ONTO INNOVATION’s named executive officers, FY2025
as the company reported each| Named executive officer | Role | FY2025 total |
|---|---|---|
| Michael Plisinski · this page | Chief Executive Officer | $7,813,551 |
| Ido Dolev | Executive Vice President, Product Solutions Group | $4,330,671 |
| Brian Roberts | Chief Financial Officer | $3,054,878 |
| Mark Slicer | Former Senior Vice President, Chief Financial Officer | $2,929,602 |
| Shirley Chen | Senior Vice President, Customer Success | $1,816,401 |
| Ramil Yaldaei | Chief Operating Officer | $1,669,244 |
Board service
ONTO INNOVATION board · FY2021–FY2025How this board is paid
Company policy: ONTO INNOVATION pays directors a $70,000 cash retainer and $200,000 in equity. As stated in ONTO INNOVATION's FY2025 proxy.
The full ONTO INNOVATION compensation record
free company briefThis page is one person within ONTO INNOVATION's record. The company brief lists every named executive, each linking to their own page.
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How this record is built
Every figure on this page is one figure from a public SEC filing, printed as the filing states it and cited to the document. Compensation totals are ONTO INNOVATION's own disclosed totals, not summed by Velarion. Insider transactions are read from Form 4 filings and cover every line filed since the most recent proxy. Nothing is estimated by Velarion; where the company does not disclose a value the cell reads "—", and a section appears only where the company discloses the data. Corrections: records@velarion.ai.
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