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Senior Vice President, Customer Success · ONTO INNOVATION INC. (ONTO)

Shirley Chen

FY2025 is the first fiscal year CompBrief holds for Shirley Chen as a named executive officer of ONTO INNOVATION; the record below is that year, complete. Every figure below is printed as the company filed it and cited to the filing it came from.

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Total disclosed compensation, FY2025

$1,816,401

5th of 6 named executive officers at Onto Innovation by FY2025 total.

6 named officers on file for ONTO INNOVATION, FY2025

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What this number hides

The filing gives the total. ONTO INNOVATION’s full Executive Compensation Report gives every award, the disclosed peer set and what the total leaves out — the pair adds the board’s.

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Compensation figures as of the proxy filed April 6, 2026 (DEF 14A). Insider transactions since that proxy, current to 2026-11-10.

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Shirley Chen compensation by year

ONTO INNOVATION Summary Compensation Table · the one fiscal year held
In US dollars, as ONTO INNOVATION reports it. Most recent year shaded. Totals are the company’s disclosed totals.
ComponentFY2025
Salary$224,192
Bonus$0
Stock awards$1,350,077
Option awards$0
Non-equity incentive$236,738
Pension and deferred compensation$0
All other$5,394
Total$1,816,401

Each year as stated in that year's proxy. A dash means the company reported no figure in that column. Source: ONTO INNOVATION INC. DEF 14A filed April 6, 2026, accession 0001193125-26-143699, and prior-year filings. Open the filing on EDGAR.

How this page was built: the ONTO INNOVATION INC. filed document, accession 0001193125-26-143699. Every figure is read from that document and cited to the page and table it appears in. Filed April 6, 2026.

Equity holdings

unvested awards at FY2025 year-end
TypeUnvested unitsValue at year-endExercise price
RSU12,994$2,155,315—

Per the Outstanding Equity Awards at Fiscal Year-End table in ONTO INNOVATION INC.'s FY2025 proxy; value at the fiscal year-end close, as the company printed it.

Insider transactions since the last proxy

1 Form 4 line since the FY2025 proxy (filed April 6, 2026)
current to 2026-11-10 · updated nightly
DateTransactionPlanSharesPriceHeld after
2026-09-02Tax withholding—1,516$254.5514,001

The 1 most recent of 1 lines, each as reported on the Form 4. "10b5-1" marks a trade the filing reports under a pre-arranged trading plan. View every Form 4 filing on EDGAR →

Change-in-control & termination

estimated payments ONTO INNOVATION discloses, by trigger · FY2025
TriggerCash severanceAccelerated equityBenefits continuationTotal as disclosed
Change in control and involuntary termination$435,000$2,155,315$13,277$2,929,842

Per the Potential Payments Upon Termination or Change in Control table in ONTO INNOVATION INC.'s FY2025 proxy. Estimates as the company printed them; a dash means it printed no figure.

ONTO INNOVATION’s named executive officers, FY2025

as the company reported each
Named executive officerRoleFY2025 total
Michael PlisinskiChief Executive Officer$7,813,551
Ido DolevExecutive Vice President, Product Solutions Group$4,330,671
Brian RobertsChief Financial Officer$3,054,878
Mark SlicerFormer Senior Vice President, Chief Financial Officer$2,929,602
Shirley Chen · this pageSenior Vice President, Customer Success$1,816,401
Ramil YaldaeiChief Operating Officer$1,669,244

Shirley Chen's compensation dossier, ONTO INNOVATION

You have read Shirley Chen's totals and holdings. The dossier adds each equity grant ONTO INNOVATION disclosed for Shirley Chen and ONTO INNOVATION's own disclosed peer group, where the company discloses them, with every row in a PDF and a CSV cited to its filing.

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The full ONTO INNOVATION compensation record

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ONTO INNOVATION INC. (ONTO) — free Compensation Briefevery named executive and director, board pay, say-on-pay, the peer group

This page is one person within ONTO INNOVATION's record. The company brief lists every named executive, each linking to their own page.

Peer companies

named in the ONTO INNOVATION proxy · each links to its own free brief

Compensation, the day it’s disclosed

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How this record is built

Every figure on this page is one figure from a public SEC filing, printed as the filing states it and cited to the document. Compensation totals are ONTO INNOVATION's own disclosed totals, not summed by Velarion. Insider transactions are read from Form 4 filings and cover every line filed since the most recent proxy. Nothing is estimated by Velarion; where the company does not disclose a value the cell reads "—", and a section appears only where the company discloses the data. Corrections: records@velarion.ai.

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Shirley Chen's compensation dossier