MKS (MKSI): executive pay, fiscal 2025

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CEO total pay$12,961,940CEO John Lee · source

Say-on-pay support96.83%Latest vote · source

CEO vs. named peers38th pct.Of 16 peer CEOs

CEO pay ratio175:1To the median employee · source

CEO pay, last three years

$8,006,538FY2023
$8,760,125FY2024
$12,961,940FY2025

CEO total pay was $12,961,940 in fiscal 2025, up from $8,760,125 in fiscal 2024.

FY2025: salary $1,037,945 · bonus $0 · stock awards $10,133,327 · option awards $0

Executives and directors

David Henry · EVP Ramakumar Mayampurath · CFO John Lee · CEO Kathleen Burke · General Counsel James Schreiner · COO Elizabeth A. Mora · Independent Director Gerald G. Colella · Chair of the Board Jacqueline F. Moloney · Lead Independent Director Joseph B. Donahue · Independent Director Michelle M. Warner · Former director (through FY2025)Peter J. Cannone III · Independent Director Rajeev Batra · Independent Director Wissam G. Jabre · Independent Director

Frequently asked questions

Who was the highest-paid executive at MKS Inc in fiscal 2025?

As disclosed, John Lee (President and Chief Executive Officer) was the highest-paid executive at MKS Inc in fiscal 2025, with total compensation of $12,961,940.

How does MKS Inc's chief executive pay compare to its disclosed peer group?

As disclosed, John Lee's total compensation ranked at the 38th percentile of MKS Inc's disclosed peer group.

What is MKS Inc's CEO-to-median employee pay ratio?

As disclosed, MKS Inc's CEO-to-median employee pay ratio was 175:1.

How did shareholders vote on MKS Inc's executive compensation?

As disclosed, 96.83% of shareholders supported MKS Inc's executive compensation in the latest say-on-pay vote.

How much does MKS Inc spend in total on board compensation for fiscal 2025?

As disclosed, MKS Inc reported total board compensation of $2,502,157 for fiscal 2025.

Answers are drawn only from the figures disclosed in this brief and cited to their location in the source filing. Where a figure required for an answer is not disclosed, that is stated rather than estimated.

Full detail

Every table from the filing. Open any section.

Summary compensation table

Named executive officer	Salary	Bonus	Stock awards	Option awards	Non-equity incentive	Pension / NQDC	All other	Total
John Lee	$1,037,945	$0	$10,133,327	$0	$1,751,533	$0	$39,135	$12,961,940
President and Chief Executive Officer
Ramakumar Mayampurath	625,000	0	1,920,714	0	717,188	0	30,416	3,293,318
Executive Vice President and Chief Financial Officer
James Schreiner	541,447	0	1,201,681	0	503,758	0	623,949	2,870,835
Executive Vice President and Chief Operating Officer
Kathleen Burke	542,526	0	1,663,978	0	540,862	0	38,255	2,785,621
Executive Vice President, General Counsel, and Secretary
David Henry	525,800	0	1,311,013	0	489,330	0	42,710	2,368,853
Executive Vice President, Global Strategic Marketing, and General Manager, Materials Solutions Division

A dash means the company reported no figure in that column; 0 means it reported zero. Figures are as printed in the filing, without adjustment.

Three-year trend — total compensation per named executive

Named executive officer	FY2025 total	FY2024 total	FY2023 total	Δ FY2024→2025
John Lee	$12,961,940	$8,760,125	$8,006,538	↑ +4,201,815
Ramakumar Mayampurath	3,293,318	2,917,469	—	↑ +375,849
James Schreiner	2,870,835	2,672,625	2,020,882	↑ +198,210
Kathleen Burke	2,785,621	1,932,454	1,967,696	↑ +853,167
David Henry	2,368,853	1,572,913	1,486,953	↑ +795,940

Prior-year totals as disclosed in the corresponding proxy; deltas are computed values with the derivation shown in the register.

Incentive-plan design — the Compensation Discussion & Analysis

We target each of our Named Executed Officers various compensation elements, including base salary, annual cash incentive compensation, and long-term equity incentive compensation, to be within a competitive range around median levels (plus or minus 15% of median) for each such respective position in the market.

CEO STI target (% of salary)	125%
CEO LTI target (% of salary)	—
Independent consultant	Pearl Meyer & Partners, LLC
Clawback policy	true
Anti-hedging	—
Anti-pledging	True

Equity grants and outstanding awards

Grants of plan-based awards — fiscal year 2025

Executive	Award	Grant date	Threshold	Target	Granted	Maximum	Grant-date fair value
Kathleen Burke	RSU	2025-02-18	—	—	7,822	—	$811,937
David Henry	PSU	2025-02-18	2,157	4,314	—	8,628	447,796
Ramakumar Mayampurath	PSU	2025-02-18	743	2,972	—	5,945	359,335
David Henry	RSU	2025-02-18	—	—	6,163	—	639,708
Ramakumar Mayampurath	RSU	2025-02-18	—	—	8,107	—	841,462
David Henry	PSU	2025-02-18	462	1,849	—	3,698	223,510
James Schreiner	RSU	2025-02-18	—	—	4,504	—	467,479
Kathleen Burke	PSU	2025-02-18	2,738	5,475	—	10,951	568,356
Ramakumar Mayampurath	PSU	2025-02-18	3,468	6,936	—	13,871	719,918
Kathleen Burke	PSU	2025-02-18	587	2,347	—	4,693	283,685

Vehicle mix — grant-date fair value by award type

Named executive officer	Time-vested (RSU)	Performance-vested (PSU)	Options / SARs	% performance-vested
Kathleen Burke	$811,937	$852,041	$0	51.2%
David Henry	639,708	671,306	0	51.2%
Ramakumar Mayampurath	841,462	1,079,253	0	56.2%
James Schreiner	467,479	0	0	0.0%

% performance-vested = PSU grant-date fair value ÷ (RSU + PSU + Options), a computed value with the derivation shown in the register.

Outstanding equity awards at fiscal year-end 2025

Executive	Award	Shares unvested	Exercise price	Market value unvested
James Schreiner	PSU	798	—	$127,500
James Schreiner	RSU	1,330	—	212,500
James Schreiner	PSU	1,862	—	297,500
James Schreiner	PSU	2,180	—	348,373
David Henry	PSU	2,301	—	367,727
James Schreiner	PSU	2,702	—	431,810
Kathleen Burke	PSU	2,967	—	474,175
James Schreiner	RSU	3,288	—	525,357
David Henry	RSU	3,471	—	554,592
David Henry	RSU	3,653	—	583,706
David Henry	PSU	3,698	—	590,898
James Schreiner	RSU	3,897	—	622,758
Kathleen Burke	RSU	4,279	—	683,786
James Schreiner	RSU	4,504	—	719,683
Kathleen Burke	PSU	4,693	—	749,986
Kathleen Burke	RSU	5,239	—	837,127
Ramakumar Mayampurath	PSU	5,945	—	949,982
David Henry	RSU	6,163	—	984,830
James Schreiner	PSU	6,305	—	1,007,557
Kathleen Burke	RSU	7,481	—	1,195,485
Ramakumar Mayampurath	RSU	8,107	—	1,295,430
Ramakumar Mayampurath	RSU	8,296	—	1,325,673
David Henry	PSU	8,628	—	1,378,762
Kathleen Burke	PSU	10,951	—	1,749,967
Ramakumar Mayampurath	PSU	13,871	—	2,216,625
John Lee	PSU	20,347	—	3,251,482
John Lee	RSU	22,136	—	3,537,405
John Lee	RSU	29,742	—	4,752,722
John Lee	PSU	34,133	—	5,454,442
John Lee	RSU	36,274	—	5,796,661
John Lee	PSU	79,644	—	12,727,031

Director compensation

Director	Cash fees	Stock awards	Option awards	Non-equity incentive	All other	Total
Gerald G. ColellaIndependent · Board Chair	$193,000	$223,959	$0	$0	$26,120	$443,079
Jacqueline F. MoloneyIndependent · Lead Independent Director · Compensation · Nominating and Corporate Governance (Chair)	140,000	223,959	0	0	0	363,959
Elizabeth A. MoraIndependent · Compensation · Audit (Chair)	120,000	223,959	0	0	0	343,959
Rajeev BatraIndependent · Compensation (Chair) · Nominating and Corporate Governance	112,500	223,959	0	0	0	336,459
Joseph B. DonahueIndependent · Nominating and Corporate Governance · Audit	105,280	223,959	0	0	0	329,239
Peter J. Cannone IIIIndependent · Audit	100,500	223,959	0	0	0	324,459
Wissam G. JabreIndependent · Audit	100,500	223,959	0	0	0	324,459
Michelle M. WarnerIndependent · Not standing for re-election · Departed during FY	36,544	0	0	0	0	36,544
John T.C. LeeEmployee director	0	0	0	—	0	0

Board fee structure and ownership guideline

Annual cash retainer	$85,000
Annual equity retainer	$225,000
Per board meeting fee	—
Committee chair fees (audit / comp / nom-gov)	25,000 / 20,000 / 15,000
Stock ownership guideline	The Stock Ownership Guidelines provide for a phase-in period over five years to achieve compliance. If an individual has not attained his or her ownership goal, the individual may not sell any shares...

Total cost of the board

Component	FY2025
Cash retainers and fees	$908,324
Equity awards (grant-date value)	$1,567,713
All other compensation	$26,120
Total cost of the board	$2,502,157

Computed as the sum of the director compensation table rows above; inputs and formula shown in the register.

Peer group, and who names MKS as a peer

Companies that benchmark against MKSI

29 companies name MKSI as a compensation peer

The list of companies that name MKSI as a peer is temporarily unavailable — recheck shortly.

Disclosed peer group — fiscal year 2025

The compensation peer group as the company disclosed it in its own proxy — the reference set behind the percentile above.

A Agilent Technologies, Inc.AME AMETEK, Inc.CIEN Ciena CorporationIEX IDEX CorporationIPGP IPG Photonics CorporationKEYS Keysight Technologies, Inc.LITE Lumentum Holdings Inc.SWKS Skyworks Solutions, Inc.TDY Teledyne Technologies IncorporatedTER Teradyne, Inc.TRMB Trimble Inc.WAT Waters CorporationZBRA Zebra Technologies CorporationCOHR Coherent Corp.ST Sensata Technologies Holding plcENTG Entegris, Inc.

Peer reciprocity

The companies MKS Inc names as compensation peers that name it back in their own disclosed peer groups.

IPG Photonics Corporation (IPGP)⁹⁹Lumentum Holdings Inc. (LITE)¹⁰⁰Coherent Corp. (COHR)¹⁰¹Entegris, Inc. (ENTG)¹⁰²

Chief executive pay against the peer group

Most recent fiscal-year chief executive compensation at each disclosed peer, taken from that company’s own proxy statement.

Rank	Company	FY	Chief executive	Salary	Stock awards	Option awards	Non-equity incentive	Total
1	Coherent Corp.	2026	James Anderson	$1,094,246	$23,779,354	$0	$3,456,024	$28,349,672
2	Skyworks Solutions, Inc.	2025	Liam Griffin	745,675	10,416,730	0	0	24,717,041
3	Trimble Inc.	2025	Robert Painter	950,000	13,311,864	2,230,637	2,633,443	19,129,944
4	Ciena Corporation	2025	Gary Smith	1,075,000	14,637,538	0	2,805,000	18,530,396
5	Keysight Technologies, Inc.	2025	Satish Dhanasekaran	933,000	15,345,176	0	1,575,473	18,020,109
6	Ametek, Inc.	2025	David Zapico	1,400,000	8,781,306	2,165,634	2,437,155	16,462,630
7	Lumentum Holdings Inc.	2026	Michael Hurlston	900,000	12,291,577	0	2,179,710	15,392,731
8	Teradyne, Inc.	2025	Gregory Smith	959,457	10,186,513	1,033,335	1,914,283	14,107,588
9	Waters Corporation	2025	Udit Batra	1,150,000	7,430,247	2,999,922	2,371,875	13,973,044
10	Zebra Technologies Corporation	2025	William Burns	1,025,001	11,000,214	0	1,763,514	13,890,300
11	MKS Inc	2025	John Lee	1,037,945	10,133,327	0	1,751,533	12,961,940
12	Agilent Technologies, Inc.	2025	Padraig McDonnell	1,141,345	8,169,850	2,017,759	1,436,809	12,827,236
13	Sensata Technologies Holding plc	2025	Stephan von Schuckmann	1,167,974	7,367,555	0	1,507,950	12,587,665
14	Entegris, Inc.	2025	David Reeder	432,404	7,232,007	3,329,868	308,515	11,507,888
15	Idex Corporation	2025	Eric Ashleman	1,079,885	4,933,497	1,521,621	1,345,163	9,112,893
16	IPG Photonics Corporation	2025	Mark Gitin	879,423	6,999,990	0	1,159,600	9,071,490
17	Teledyne Technologies Incorporated	2025	George C. Bobb III	816,827	601,546	1,730,522	1,080,908	4,255,049

Each peer’s compensation is from its most recently filed proxy; fiscal years differ by company. Each peer’s figures come from its own filings; the subject company is highlighted. Peers whose chief executive compensation is outside our coverage universe are stated as such, never left blank.

Incentive design against the same peers

Company	Annual incentive payout	Long-term vehicle mix	PSU measures include TSR	Compensation consultant
MKS Inc	135%	PSU 60 · RSU 40	Yes — Relative Total Shareholder Return (rTSR)	Pearl Meyer & Partners, LLC
Agilent Technologies, Inc.	not disclosed	PSU 60 · Option 20 · RSU 20	No	Semler Brossy
Ametek, Inc.	147.5%	not disclosed	Yes — Relative Total Shareholder Return (TSR)	Pay Governance LLC
Ciena Corporation	170%	RSU 40 · PSU 36 · MSU 24	No	Compensia
Coherent Corp.	190%	PSU 60 · RSU 40	Yes — Relative TSR	Compensia, Inc.
Entegris, Inc.	69.0%	RSU 40 · Option 30 · PSU 30	Yes — Relative TSR	FW Cook
Idex Corporation	99%	PSU 50 · Options 25 · RSU 25	Yes — relative TSR measured against the TSR of companies in the S&P 500 Index	F.W. Cook
IPG Photonics Corporation	113.9%	PSU 50 · RSU 50	No	FW Cook
Keysight Technologies, Inc.	114.09%	PSU 60 · RSU 40	Yes — 3-Year Relative TSR	Meridian Compensation Partners LLC
Lumentum Holdings Inc.	186.3%	RSU 50	Yes	Semler Brossy
Sensata Technologies Holding plc	not disclosed	PSU 55 · RSU 45	Yes — rTSR	FW Cook
Skyworks Solutions, Inc.	not disclosed	PSU 60 · RSU 40	Yes — TSR Percentile Ranking	Aon
Teledyne Technologies Incorporated	not disclosed	Options 33 · Cash LTI 33 · PSU 33	No	Exequity
Teradyne, Inc.	not disclosed	not disclosed	Yes — TSR vs NYSE Composite Index	Compensia, Inc.
Trimble Inc.	138.6%	PSU 60 · RSU 25 · Options 15	Yes — Total Shareholder Return (TSR) relative to S&P 500	Mercer (US) LLC
Waters Corporation	110%	PSU 50 · Options 35 · RSU 15	Yes — Relative Total Shareholder Return (rTSR)	Pearl Meyer
Zebra Technologies Corporation	114.7%	not disclosed	No	FW Cook

Read from each company’s Compensation Discussion and Analysis: annual incentive payout as a percentage of target, the disclosed long-term vehicle mix, whether performance-share measures include a total shareholder return component, and the retained compensation consultant. “Not disclosed” appears only where the company’s filing does not state the item.

Say-on-pay history and pay ratio

Meeting year	Meeting date	For	Against	Abstain	Support	Outcome
2026	2026-05-11	55,786,344	1,829,291	34,680	96.83%	Passed
2025	2025-05-12	56,421,149	3,869,214	39,352	93.58%	Passed
2024	2024-05-07	57,810,465	4,262,593	40,870	93.13%	Passed
2023	2023-05-16	58,447,222	1,979,837	155,194	96.72%	Passed
2022	2022-05-10	48,956,919	1,411,743	63,744	97.2%	Passed
2021	2021-05-11	49,386,752	976,817	205,444	98.06%	Passed

Rows are labeled by annual-meeting year, with the meeting date beside each; the vote held in a given year acts on the prior fiscal year’s compensation.

Say-on-pay — history, company’s computation

Meeting year	Meeting date	Approval — company’s computation
2026	2026-05-11	96.83%^a
2025	2025-05-12	93.58%^b
2024	2024-05-07	93.13%^c

a. Approved under the standard stated in the filing — “Accordingly, we expect abstentions and broker non-votes will have no effect on the voting on the proposals.”.

b. Approved under the standard stated in the filing — “Accordingly, we expect abstentions and broker non-votes will have no effect on the voting on the proposals.”.

c. Approved under the standard stated in the filing — “Accordingly, we expect abstentions and broker non-votes will have no effect on the voting on the proposals.”.

Approval percentages are the company’s own reported computations under its own stated standard, not recomputed by Velarion. Where a company does not state a standard, none is assumed.

CEO pay ratio

Ratio (CEO : median employee)	175 : 1
CEO total compensation	$12,961,940
Median employee compensation	$74,240

Insider trades since the proxy

Every insider equity transaction reported on Form 4 after the 2025 proxy statement — acquisitions, dispositions, exercises, and withholdings — and therefore not reflected in any table in that document.

Insider	Role	Transaction date	Code	Shares	Price	Value	Security	Source
Michelle M. McCarthy	SVP & Chief Accounting Officer	2026-04-15	A	1,736	—	—	Common	Form 4 ↗
Michelle M. McCarthy	SVP & Chief Accounting Officer	2026-04-15	A	1,107	—	—	Common	Form 4 ↗
Michelle M. McCarthy	SVP & Chief Accounting Officer	2026-04-15	D	1,107	—	—	Derivative, Class A Common	Form 4 ↗
Michelle M. McCarthy	SVP & Chief Accounting Officer	2026-04-15	A	1,672.86	—	—	Derivative, Class A Common	Form 4 ↗
Michelle M. McCarthy	SVP & Chief Accounting Officer	2026-04-15	D	1,375.45	274	377,080	Common	Form 4 ↗
Michelle M. McCarthy	SVP & Chief Accounting Officer	2026-04-15	D	1,736	—	—	Derivative, Class A Common	Form 4 ↗
Michelle M. McCarthy	SVP & Chief Accounting Officer	2026-04-15	D	968	—	—	Derivative, Class A Common	Form 4 ↗
Michelle M. McCarthy	SVP & Chief Accounting Officer	2026-04-15	A	968	—	—	Common	Form 4 ↗
John Edward Williams	EVP & GM, PSD	2026-04-17	A	1,740.71	—	—	Common	Form 4 ↗
John Edward Williams	EVP & GM, PSD	2026-04-17	D	1,740.71	—	—	Derivative, Class A Common	Form 4 ↗
John Edward Williams	EVP & GM, PSD	2026-04-17	D	825.97	270	222,921	Common	Form 4 ↗
Jacqueline F. Moloney	Director	2026-05-11	A	781.96	—	—	Common	Form 4 ↗
Joseph B. Donahue	Director	2026-05-11	A	781.96	—	—	Common	Form 4 ↗
Gerald G. Colella	Director	2026-05-11	A	781.96	—	—	Common	Form 4 ↗
Rajeev Batra	Director	2026-05-11	A	781.96	—	—	Common	Form 4 ↗
Wissam G. Jabre	Director	2026-05-11	A	781.96	—	—	Common	Form 4 ↗
Kathleen Burke	EVP, GC & Secretary	2026-05-11	D	4,355	320	1,393,317	Common, open-market sale	Form 4 ↗
Eric Robert Taranto	EVP & GM, VSD	2026-05-11	D	2,848.52	320	911,328	Common, open-market sale	Form 4 ↗
Peter J. Cannone III	Director	2026-05-11	A	781.96	—	—	Common	Form 4 ↗
Elizabeth A. Mora	Director	2026-05-11	A	781.96	—	—	Common	Form 4 ↗
Jacqueline F. Moloney	Director	2026-05-13	D	1,400	319	446,586	Common	Form 4 ↗
Jacqueline F. Moloney	Director	2026-05-14	D	1,000	312	312,197	Common	Form 4 ↗
Peter J. Cannone III	Director	2026-05-18	D	1,350	303	409,590	Common	Form 4 ↗
Ramakumar Mayampurath	EVP & CFO	2026-05-22	D	8,810	315	2,779,379	Common	Form 4 ↗
John Tseng-Chung Lee	Director	2026-05-22	D	10,000	315	3,154,800	Common	Form 4 ↗
David Henry	EVP, Global Str Mktg & GM, MSD	2026-05-26	D	2,500	331	826,250	Common	Form 4 ↗
Gerald G. Colella	Director	2026-05-27	D	213	337	71,792	Common, open-market sale	Form 4 ↗
Gerald G. Colella	Director	2026-05-27	D	464	330	153,298	Common, open-market sale	Form 4 ↗
Joseph B. Donahue	Director	2026-05-27	D	2,100	328	688,703	Common, open-market sale	Form 4 ↗
Gerald G. Colella	Director	2026-05-27	D	1,626	337	547,219	Common, open-market sale	Form 4 ↗
Gerald G. Colella	Director	2026-05-27	D	2,800	339	948,024	Common	Form 4 ↗
Gerald G. Colella	Director	2026-05-27	D	1,811	335	607,514	Common, open-market sale	Form 4 ↗
Gerald G. Colella	Director	2026-05-27	D	4,876	332	1,619,034	Common, open-market sale	Form 4 ↗
Gerald G. Colella	Director	2026-05-27	D	8,210	331	2,721,195	Common, open-market sale	Form 4 ↗
Elizabeth A. Mora	Director	2026-06-01	D	300	318	95,406	Common	Form 4 ↗
David Henry	EVP, Global Str Mktg & GM, MSD	2026-06-01	D	6,000	314	1,886,583	Common, open-market sale	Form 4 ↗
Michelle M. McCarthy	SVP & Chief Accounting Officer	2026-06-05	D	2,434	315	767,270	Common	Form 4 ↗
James Schreiner	EVP & COO	2026-06-10	D	781	317	247,905	Common	Form 4 ↗
James Schreiner	EVP & COO	2026-06-12	D	217	347	75,299	Common	Form 4 ↗
James Schreiner	EVP & COO	2026-06-12	D	812	346	281,282	Common, open-market sale	Form 4 ↗
James Schreiner	EVP & COO	2026-06-12	D	2,471	346	853,790	Common, open-market sale	Form 4 ↗
John Edward Williams	EVP & GM, PSD	2026-08-03	D	457	288	131,758	Common	Form 4 ↗
John Tseng-Chung Lee	Director	2026-08-14	D	10,000	302	3,020,100	Common	Form 4 ↗
Renee Martel Donlan	EVP, GC & CCO	2026-08-17	A	954.04	—	—	Derivative, Class A Common	Form 4 ↗
Elizabeth A. Mora	Director	2026-09-01	D	300	251	75,288	Common	Form 4 ↗
John Tseng-Chung Lee	Director	2026-10-30	D	678.58	—	—	Derivative, Class A Common	Form 4 ↗
John Tseng-Chung Lee	Director	2026-10-30	D	1,478.86	—	—	Derivative, Class A Common	Form 4 ↗
John Tseng-Chung Lee	Director	2026-10-30	D	2,157.45	202	435,890	Common	Form 4 ↗
John Tseng-Chung Lee	Director	2026-10-30	A	678.58	—	—	Common	Form 4 ↗
John Tseng-Chung Lee	Director	2026-10-30	A	1,478.86	—	—	Common	Form 4 ↗

Transaction codes per Form 4: A acquisition · S open-market sale · F tax withholding · M option exercise · G gift. Value = shares × price as reported. Dividend-equivalent and fractional-share accrual rows (derivative Class A, under $10,000 and under 2,000 shares) are aggregated per date; every row appears in full below.

Sources (102 citations)

Each figure is listed with the filing it comes from, where it appears in that filing, and the value as printed. Any figure can be independently confirmed against the source.

Section 01, John Lee. DEF 14A, filed 2026-03-31. Section “Summary Compensation Table for 2025” · page 68. As printed: 12,961,940. View filing ↗
Section 01, Ramakumar Mayampurath. DEF 14A, filed 2026-03-31. Section “Summary Compensation Table for 2025” · page 68. As printed: 3,293,318. View filing ↗
Section 01, James Schreiner. DEF 14A, filed 2026-03-31. Section “Summary Compensation Table for 2025” · page 68. As printed: 2,870,835. View filing ↗
Section 01, Kathleen Burke. DEF 14A, filed 2026-03-31. Section “Summary Compensation Table for 2025” · page 68. As printed: 2,785,621. View filing ↗
Section 01, David Henry. DEF 14A, filed 2026-03-31. Section “Summary Compensation Table for 2025” · page 68. As printed: 2,368,853. View filing ↗
Section 03, Kathleen Burke RSU. DEF 14A, filed 2026-03-31. Section “Grants of Plan-Based Awards in Fiscal Year 2025 Table” · grants of plan-based awards table. View filing ↗
Section 03, David Henry PSU. DEF 14A, filed 2026-03-31. Section “Grants of Plan-Based Awards in Fiscal Year 2025 Table” · grants of plan-based awards table. View filing ↗
Section 03, Ramakumar Mayampurath PSU. DEF 14A, filed 2026-03-31. Section “Grants of Plan-Based Awards in Fiscal Year 2025 Table” · grants of plan-based awards table. View filing ↗
Section 03, David Henry RSU. DEF 14A, filed 2026-03-31. Section “Grants of Plan-Based Awards in Fiscal Year 2025 Table” · grants of plan-based awards table. View filing ↗
Section 03, Ramakumar Mayampurath RSU. DEF 14A, filed 2026-03-31. Section “Grants of Plan-Based Awards in Fiscal Year 2025 Table” · grants of plan-based awards table. View filing ↗
Section 03, David Henry PSU. DEF 14A, filed 2026-03-31. Section “Grants of Plan-Based Awards in Fiscal Year 2025 Table” · grants of plan-based awards table. View filing ↗
Section 03, James Schreiner RSU. DEF 14A, filed 2026-03-31. Section “Grants of Plan-Based Awards in Fiscal Year 2025 Table” · grants of plan-based awards table. View filing ↗
Section 03, Kathleen Burke PSU. DEF 14A, filed 2026-03-31. Section “Grants of Plan-Based Awards in Fiscal Year 2025 Table” · grants of plan-based awards table. View filing ↗
Section 03, Ramakumar Mayampurath PSU. DEF 14A, filed 2026-03-31. Section “Grants of Plan-Based Awards in Fiscal Year 2025 Table” · grants of plan-based awards table. View filing ↗
Section 03, Kathleen Burke PSU. DEF 14A, filed 2026-03-31. Section “Grants of Plan-Based Awards in Fiscal Year 2025 Table” · grants of plan-based awards table. View filing ↗
Section 07, pay ratio. DEF 14A, filed 2026-03-31. Section “CEO Pay Ratio”. As printed: 175 : 1. View filing ↗
Section 08, Gerald G. Colella. DEF 14A, filed 2026-03-31. Section “Director Compensation”. As printed: 443,079. View filing ↗
Section 08, Jacqueline F. Moloney. DEF 14A, filed 2026-03-31. Section “Director Compensation”. As printed: 363,959. View filing ↗
Section 08, Elizabeth A. Mora. DEF 14A, filed 2026-03-31. Section “Director Compensation”. As printed: 343,959. View filing ↗
Section 08, Rajeev Batra. DEF 14A, filed 2026-03-31. Section “Director Compensation”. As printed: 336,459. View filing ↗
Section 08, Joseph B. Donahue. DEF 14A, filed 2026-03-31. Section “Director Compensation”. As printed: 329,239. View filing ↗
Section 08, Peter J. Cannone III. DEF 14A, filed 2026-03-31. Section “Director Compensation”. As printed: 324,459. View filing ↗
Section 08, Wissam G. Jabre. DEF 14A, filed 2026-03-31. Section “Director Compensation”. As printed: 324,459. View filing ↗
Section 08, Michelle M. Warner. DEF 14A, filed 2026-03-31. Section “Director Compensation”. As printed: 36,544. View filing ↗
Section 08, John T.C. Lee. DEF 14A, filed 2026-03-31. Section “Director Compensation”. As printed: 0. View filing ↗
Section 02, Michelle M. McCarthy 2026-04-15. Form 4, filed 2026-04-16. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Michelle M. McCarthy 2026-04-15. Form 4, filed 2026-04-16. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Michelle M. McCarthy 2026-04-15. Form 4, filed 2026-04-16. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Michelle M. McCarthy 2026-04-15. Form 4, filed 2026-04-16. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Michelle M. McCarthy 2026-04-15. Form 4, filed 2026-04-16. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Michelle M. McCarthy 2026-04-15. Form 4, filed 2026-04-16. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Michelle M. McCarthy 2026-04-15. Form 4, filed 2026-04-16. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Michelle M. McCarthy 2026-04-15. Form 4, filed 2026-04-16. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, John Edward Williams 2026-04-17. Form 4, filed 2026-04-20. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, John Edward Williams 2026-04-17. Form 4, filed 2026-04-20. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, John Edward Williams 2026-04-17. Form 4, filed 2026-04-20. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Jacqueline F. Moloney 2026-05-11. Form 4, filed 2026-05-12. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Joseph B. Donahue 2026-05-11. Form 4, filed 2026-05-12. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Gerald G. Colella 2026-05-11. Form 4, filed 2026-05-12. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Rajeev Batra 2026-05-11. Form 4, filed 2026-05-12. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Wissam G. Jabre 2026-05-11. Form 4, filed 2026-05-12. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Kathleen Burke 2026-05-11. Form 4, filed 2026-05-12. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Eric Robert Taranto 2026-05-11. Form 4, filed 2026-05-12. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Peter J. Cannone III 2026-05-11. Form 4, filed 2026-05-12. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Elizabeth A. Mora 2026-05-11. Form 4, filed 2026-05-12. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Jacqueline F. Moloney 2026-05-13. Form 4, filed 2026-05-14. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Jacqueline F. Moloney 2026-05-14. Form 4, filed 2026-05-15. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Peter J. Cannone III 2026-05-18. Form 4, filed 2026-05-19. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Ramakumar Mayampurath 2026-05-22. Form 4, filed 2026-05-26. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, John Tseng-Chung Lee 2026-05-22. Form 4, filed 2026-05-26. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, David Henry 2026-05-26. Form 4, filed 2026-05-27. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Gerald G. Colella 2026-05-27. Form 4, filed 2026-05-28. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Gerald G. Colella 2026-05-27. Form 4, filed 2026-05-28. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Joseph B. Donahue 2026-05-27. Form 4, filed 2026-05-28. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Gerald G. Colella 2026-05-27. Form 4, filed 2026-05-28. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Gerald G. Colella 2026-05-27. Form 4, filed 2026-05-28. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Gerald G. Colella 2026-05-27. Form 4, filed 2026-05-28. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Gerald G. Colella 2026-05-27. Form 4, filed 2026-05-28. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Gerald G. Colella 2026-05-27. Form 4, filed 2026-05-28. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Elizabeth A. Mora 2026-06-01. Form 4, filed 2026-06-02. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, David Henry 2026-06-01. Form 4, filed 2026-06-02. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Michelle M. McCarthy 2026-06-05. Form 4, filed 2026-06-08. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, James Schreiner 2026-06-10. Form 4, filed 2026-06-11. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, James Schreiner 2026-06-12. Form 4, filed 2026-06-16. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, James Schreiner 2026-06-12. Form 4, filed 2026-06-16. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, James Schreiner 2026-06-12. Form 4, filed 2026-06-16. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, John Edward Williams 2026-08-03. Form 4, filed 2026-08-04. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, John Tseng-Chung Lee 2026-08-14. Form 4, filed 2026-08-17. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Renee Martel Donlan 2026-08-17. Form 4, filed 2026-08-18. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, Elizabeth A. Mora 2026-09-01. Form 4, filed 2026-09-02. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, John Tseng-Chung Lee 2026-10-30. Form 4, filed 2026-11-03. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, John Tseng-Chung Lee 2026-10-30. Form 4, filed 2026-11-03. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, John Tseng-Chung Lee 2026-10-30. Form 4, filed 2026-11-03. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, John Tseng-Chung Lee 2026-10-30. Form 4, filed 2026-11-03. Insider equity transaction reported since the proxy statement. View filing ↗
Section 02, John Tseng-Chung Lee 2026-10-30. Form 4, filed 2026-11-03. Insider equity transaction reported since the proxy statement. View filing ↗
Section 06, 2026 vote. Form 8-K, filed 2026-05-12. Item 5.07 · say-on-pay result. As reported: 96.83% (votes for as printed: 55,786,344). View filing ↗
Section 06, 2025 vote. Form 8-K, filed 2025-05-15. Item 5.07 · say-on-pay result. As reported: 93.58% (votes for as printed: 56,421,149). View filing ↗
Section 06, 2024 vote. Form 8-K, filed 2024-05-08. Item 5.07 · say-on-pay result. As reported: 93.13% (votes for as printed: 57,810,465). View filing ↗
Section 01 trend, Δ column (computed). Computed. Δ = current-FY total − prior-FY total per named officer.
Section 03b vehicle mix (computed). Computed. RSU / PSU / Options grant-date fair values summed per officer from the grants table; % performance-vested = PSU ÷ (RSU+PSU+Options).
Section 09b board cost (computed). Computed. Cash 908,324 + equity 1,567,713 + all other 26,120 = 2,502,157, summed across the director compensation table rows.
Coherent Corp., Section 10b CEO total. DEF 14A, filed 2026-10-09. CEO total compensation as printed in Coherent Corp.'s own proxy. As printed: 28,349,672. View filing ↗
Skyworks Solutions, Inc., Section 10b CEO total. DEF 14A, filed 2026-04-03. CEO total compensation as printed in Skyworks Solutions, Inc.'s own proxy. As printed: 24,717,041. View filing ↗
Trimble Inc., Section 10b CEO total. DEF 14A, filed 2026-04-09. CEO total compensation as printed in Trimble Inc.'s own proxy. As printed: 19,129,944. View filing ↗
Ciena Corporation, Section 10b CEO total. DEF 14A, filed 2026-02-12. CEO total compensation as printed in Ciena Corporation's own proxy. As printed: 18,530,396. View filing ↗
Keysight Technologies, Inc., Section 10b CEO total. DEF 14A, filed 2026-01-26. CEO total compensation as printed in Keysight Technologies, Inc.'s own proxy. As printed: 18,020,109. View filing ↗
Ametek, Inc., Section 10b CEO total. DEF 14A, filed 2026-03-11. CEO total compensation as printed in Ametek, Inc.'s own proxy. As printed: 16,462,630. View filing ↗
Lumentum Holdings Inc., Section 10b CEO total. DEF 14A, filed 2026-10-06. CEO total compensation as printed in Lumentum Holdings Inc.'s own proxy. As printed: 15,392,731. View filing ↗
Teradyne, Inc., Section 10b CEO total. DEF 14A, filed 2026-03-27. CEO total compensation as printed in Teradyne, Inc.'s own proxy. As printed: 14,107,588. View filing ↗
Waters Corporation, Section 10b CEO total. DEF 14A, filed 2026-04-09. CEO total compensation as printed in Waters Corporation's own proxy. As printed: 13,973,044. View filing ↗
Zebra Technologies Corporation, Section 10b CEO total. DEF 14A, filed 2026-04-03. CEO total compensation as printed in Zebra Technologies Corporation's own proxy. As printed: 13,890,300. View filing ↗
MKS Inc (subject), Section 10b CEO total. DEF 14A, filed 2026-03-31. CEO total compensation as printed in MKS Inc's own proxy. As printed: 12,961,940. View filing ↗
Agilent Technologies, Inc., Section 10b CEO total. DEF 14A, filed 2026-02-06. CEO total compensation as printed in Agilent Technologies, Inc.'s own proxy. As printed: 12,827,236. View filing ↗
Sensata Technologies Holding plc, Section 10b CEO total. DEF 14A, filed 2026-04-29. CEO total compensation as printed in Sensata Technologies Holding plc's own proxy. As printed: 12,587,665. View filing ↗
Entegris, Inc., Section 10b CEO total. DEF 14A, filed 2026-03-23. CEO total compensation as printed in Entegris, Inc.'s own proxy. As printed: 11,507,888. View filing ↗
Idex Corporation, Section 10b CEO total. DEF 14A, filed 2026-03-26. CEO total compensation as printed in Idex Corporation's own proxy. As printed: 9,112,893. View filing ↗
IPG Photonics Corporation, Section 10b CEO total. DEF 14A, filed 2026-04-01. CEO total compensation as printed in IPG Photonics Corporation's own proxy. As printed: 9,071,490. View filing ↗
Teledyne Technologies Incorporated, Section 10b CEO total. DEF 14A, filed 2026-03-12. CEO total compensation as printed in Teledyne Technologies Incorporated's own proxy. As printed: 4,255,049. View filing ↗
Section 10a, IPG Photonics Corporation reciprocity. DEF 14A. IPG Photonics Corporation names MKS Inc in its own disclosed peer group (read from its most recent proxy). View filing ↗
Section 10a, Lumentum Holdings Inc. reciprocity. DEF 14A. Lumentum Holdings Inc. names MKS Inc in its own disclosed peer group (read from its most recent proxy). View filing ↗
Section 10a, Coherent Corp. reciprocity. DEF 14A. Coherent Corp. names MKS Inc in its own disclosed peer group (read from its most recent proxy). View filing ↗
Section 10a, Entegris, Inc. reciprocity. DEF 14A. Entegris, Inc. names MKS Inc in its own disclosed peer group (read from its most recent proxy). View filing ↗