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Companies Entegris Inc

Entegris (ENTG): executive pay, fiscal 2025

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CEO total pay$11,507,888CEO David Reeder · source
Say-on-pay support95.59%Latest vote · source
CEO vs. named peers32nd pct.Of 22 peer CEOs
CEO pay ratio162:1To the median employee · source

CEO pay, last three years

  • $11,507,888FY2025

CEO total pay was $11,507,888 in fiscal 2025; the brief holds no earlier figure for this CEO.

FY2025: salary $432,404 · bonus $205,000 · stock awards $7,232,007 · option awards $3,329,868

Executives and directors

Frequently asked questions

Who was the highest-paid executive at Entegris Inc in fiscal 2025?
As disclosed, Bertrand Loy (Executive Chair and Former President and Chief Executive Officer) was the highest-paid executive at Entegris Inc in fiscal 2025, with total compensation of $14,324,681.
How does Entegris Inc's chief executive pay compare to its disclosed peer group?
As disclosed, David Reeder's total compensation ranked at the 32nd percentile of Entegris Inc's disclosed peer group.
What is Entegris Inc's CEO-to-median employee pay ratio?
As disclosed, Entegris Inc's CEO-to-median employee pay ratio was 162:1.
How did shareholders vote on Entegris Inc's executive compensation?
As disclosed, 95.59% of shareholders supported Entegris Inc's executive compensation in the latest say-on-pay vote.
How much does Entegris Inc spend in total on board compensation for fiscal 2025?
As disclosed, Entegris Inc reported total board compensation of $2,063,818 for fiscal 2025.

Answers are drawn only from the figures disclosed in this brief and cited to their location in the source filing. Where a figure required for an answer is not disclosed, that is stated rather than estimated.

Full detail

Every table from the filing. Open any section.

Summary compensation table
Named executive officerSalaryBonusStock awardsOption awardsNon-equity incentivePension / NQDCAll otherTotal
Bertrand Loy$950,349$0$8,901,384$3,494,913$840,208$0$137,827$14,324,681
Executive Chair and Former President and Chief Executive Officer
David Reeder432,404205,0007,232,0073,329,868308,51509411,507,888
President and Chief Executive Officer
Linda LaGorga584,61501,757,224689,943284,970057,2403,373,992
Senior Vice President and Chief Financial Officer
Susan Rice510,96201,260,618494,859248,745051,6482,566,832
Senior Vice President, Global Human Resources and Corporate Communications
Joseph Colella520,96201,222,417479,986253,575051,1182,528,058
Senior Vice President, General Counsel, Chief Compliance Officer and Secretary
Daniel Woodland560,96201,107,816434,933272,895059,5812,436,187
Senior Vice President and President, Materials Solutions

A dash means the company reported no figure in that column; 0 means it reported zero. Figures are as printed in the filing, without adjustment.

Three-year trend — total compensation per named executive

Named executive officerFY2025 totalFY2024 totalFY2023 totalΔ FY2024→2025
Bertrand Loy$14,324,681$17,368,723$13,405,690↓ −3,044,042
David Reeder11,507,888———
Linda LaGorga3,373,9923,540,0424,147,446↓ −166,050
Susan Rice2,566,8322,904,8262,424,690↓ −337,994
Joseph Colella2,528,0582,794,2772,328,926↓ −266,219
Daniel Woodland2,436,1872,815,8152,704,650↓ −379,628

Prior-year totals as disclosed in the corresponding proxy; deltas are computed values with the derivation shown in the register.

Incentive-plan design — the Compensation Discussion & Analysis

The Company's executive compensation policies prioritize pay-for-performance, competitive compensation, employee retention, and alignment with stockholders' interests. Total compensation is tied to individual and Company performance, with the proportion of variable compensation increasing as an employee's level of responsibility increases.

CEO STI target (% of salary)120%
CEO LTI target (% of salary)—
Independent consultantFW Cook
Clawback policytrue
Anti-hedgingtrue
Anti-pledgingtrue
Equity grants and outstanding awards

Grants of plan-based awards — fiscal year 2025

ExecutiveAwardGrant dateThresholdTargetGrantedMaximumGrant-date fair value
Bertrand LoyRSU2025-04-01——54,060—$4,659,972
Bertrand LoyPSU2025-04-0120,27340,545—81,0904,241,412
David ReederPSU2025-08-1821,23542,469—84,9382,582,115
David ReederRSU2025-04-23——2,897—210,004
David ReederRSU2025-08-18——56,624—4,439,888
Linda LaGorgaPSU2025-04-014,0028,004—16,008837,298
Susan RiceRSU2025-04-01——7,656—659,947
Joseph ColellaRSU2025-04-01——7,424—639,949
Joseph ColellaPSU2025-04-012,7845,568—11,136582,468
Joseph ColellaOPTION2025-04-01——13,296—479,986
Daniel WoodlandRSU2025-04-01——6,728—579,954
Daniel WoodlandPSU2025-04-012,5235,046—10,092527,862
Linda LaGorgaRSU2025-04-01——10,672—919,926
Susan RicePSU2025-04-012,8715,742—11,484600,671
Daniel WoodlandOPTION2025-04-01——12,048—434,933

Vehicle mix — grant-date fair value by award type

Named executive officerTime-vested (RSU)Performance-vested (PSU)Options / SARs% performance-vested
Bertrand Loy$4,659,972$4,241,412$047.6%
David Reeder4,649,8922,582,115035.7%
Linda LaGorga919,926837,298047.6%
Susan Rice659,947600,671047.6%
Joseph Colella639,949582,468479,98634.2%
Daniel Woodland579,954527,862434,93334.2%

% performance-vested = PSU grant-date fair value ÷ (RSU + PSU + Options), a computed value with the derivation shown in the register.

Outstanding equity awards at fiscal year-end 2025

ExecutiveAwardShares unvestedExercise priceMarket value unvested
Susan RiceRSU856—$73,488
Joseph ColellaRSU934—80,184
Susan RiceOption1,899128.44—
Joseph ColellaOption2,071128.44—
Daniel WoodlandRSU2,972—253,957
Daniel WoodlandRSU3,441—292,313
Daniel WoodlandRSU3,443—292,483
Joseph ColellaRSU3,592—306,936
Joseph ColellaRSU3,687—313,211
Joseph ColellaPSU3,689—313,381
Susan RiceRSU3,716—317,532
Susan RiceRSU3,933—334,108
Susan RiceRSU3,935—334,278
Daniel WoodlandRSU4,460—381,107
Linda LaGorgaRSU4,917—417,699
Linda LaGorgaRSU4,919—417,869
Daniel WoodlandRSU5,046—426,639
Daniel WoodlandOption5,32080.71—
Joseph ColellaPSU5,389—460,490
Joseph ColellaPSU5,568—470,774
Susan RiceRSU5,575—476,384
Susan RiceRSU5,742—485,486
Daniel WoodlandOption5,937140.62—
Joseph ColellaOption6,360140.62—
Joseph ColellaOption6,42680.71—
Daniel WoodlandRSU6,506—557,239
Linda LaGorgaRSU6,548—558,217
Susan RiceOption6,64880.71—
Daniel WoodlandRSU6,728—568,852
Susan RiceOption6,786140.62—
Bertrand LoyRSU6,812—584,810
Joseph ColellaRSU7,424—627,699
Susan RiceRSU7,656—647,315
Linda LaGorgaRSU8,004—676,738
Linda LaGorgaOption8,481140.62—
Linda LaGorgaRSU9,822—837,326
Linda LaGorgaRSU10,672—902,318
Linda LaGorgaOption11,43891.63—
Daniel WoodlandOption12,04886.2—
Joseph ColellaOption13,29686.2—
Susan RiceOption13,70886.2—
Bertrand LoyOption15,098128.44—
Linda LaGorgaOption19,11286.2—
Bertrand LoyRSU25,646—2,191,451
Bertrand LoyPSU28,656—2,434,327
Bertrand LoyRSU28,656—2,434,327
Bertrand LoyPSU38,471—3,287,347
Bertrand LoyPSU40,545—3,428,080
David ReederPSU42,469—3,582,260
Bertrand LoyOption45,85280.71—
Bertrand LoyOption49,410140.62—
Bertrand LoyRSU54,060—4,570,773
David ReederRSU56,624—4,776,234
David ReederOption95,57678.41—
Bertrand LoyOption96,81286.2—
Director compensation
DirectorCash feesStock awardsOption awardsNon-equity incentiveAll otherTotal
Bertrand LoyEmployee director · Board Chair—————$25,916,731
James F. GentilcoreIndependent · Lead Independent Director · Audit & Finance · Management Development & Compensation · Environmental, Health, Safety & Sustainability112,201210,004———322,205
Mary PumaIndependent · Audit & Finance · Management Development & Compensation89,891210,004———299,895
Yvette KanouffIndependent · Audit & Finance · Management Development & Compensation87,799210,004———297,803
Rodney ClarkIndependent · Environmental, Health, Safety & Sustainability (Chair) · Governance & Nominating86,250210,004———296,254
Dr. Azita Saleki-GerhardtIndependent · Governance & Nominating · Environmental, Health, Safety & Sustainability86,250210,004———296,254
James P. LedererIndependent · Management Development & Compensation · Governance & Nominating78,750210,004———288,754
David ReederEmployee director52,649210,004———262,653

Board fee structure and ownership guideline

Annual cash retainer$105,000
Annual equity retainer$210,000
Per board meeting fee—
Committee chair fees (audit / comp / nom-gov)20,000 / 15,000 / 10,000
Stock ownership guideline$5

Total cost of the board

ComponentFY2025
Cash retainers and fees$593,790
Equity awards (grant-date value)$1,470,028
All other compensation$0
Total cost of the board$2,063,818

Computed as the sum of the director compensation table rows above; inputs and formula shown in the register.

Peer group, and who names Entegris as a peer

Companies that benchmark against ENTG

21 companies name ENTG as a compensation peer

The list of companies that name ENTG as a peer is temporarily unavailable — recheck shortly.

Disclosed peer group — fiscal year 2025

The compensation peer group as the company disclosed it in its own proxy — the reference set behind the percentile above.

Peer reciprocity

The companies Entegris Inc names as compensation peers that name it back in their own disclosed peer groups.

Chief executive pay against the peer group

Most recent fiscal-year chief executive compensation at each disclosed peer, taken from that company’s own proxy statement.

RankCompanyFYChief executiveSalaryStock awardsOption awardsNon-equity incentiveTotal
1KLA Corporation2026Richard Wallace$1,285,385$23,473,887$0$5,132,789$29,954,476
2Coherent Corp.2026James Anderson1,094,24623,779,35403,456,02428,349,672
3Element Solutions Inc.2025Benjamin H. Gliklich1,087,50023,688,89401,520,94726,480,462
4Marvell Technology, Inc.2026Matthew Murphy1,237,50020,200,06803,621,00025,064,348
5Skyworks Solutions, Inc.2025Liam Griffin745,67510,416,7300024,717,041
6Monolithic Power Systems, Inc.2025Michael Hsing1,030,96212,686,33206,210,00019,930,736
7Trimble Inc.2025Robert Painter950,00013,311,8642,230,6372,633,44319,129,944
8Keysight Technologies, Inc.2025Satish Dhanasekaran933,00015,345,17601,575,47318,020,109
9Ametek, Inc.2025David Zapico1,400,0008,781,3062,165,6342,437,15516,462,630
10Albemarle Corporation2025J. Kent Masters Jr.1,400,0007,949,6402,500,0173,247,61815,513,654
11Teradyne, Inc.2025Gregory Smith959,45710,186,5131,033,3351,914,28314,107,588
12Zebra Technologies Corporation2025William Burns1,025,00111,000,21401,763,51413,890,300
13Qorvo, Inc.2026Robert Bruggeworth1,065,65210,799,96101,671,68013,551,627
14MKS Instruments, Inc.2025John Lee1,037,94510,133,32701,751,53312,961,940
15Sensata Technologies Holding plc2025Stephan von Schuckmann1,167,9747,367,55501,507,95012,587,665
16Entegris Inc2025David Reeder432,4047,232,0073,329,868308,51511,507,888
17Celanese Corporation2025Scott Richardson—5,249,9582,249,9901,342,62510,137,072
18Graco Inc.2025Mark Sheahan1,065,00005,749,7751,259,9079,491,330
19Nordson Corporation2025Sundaram Nagarajan1,049,3853,514,4131,519,5471,327,4728,153,900
20Avantor, Inc.2025Emmanuel Ligner379,2972,499,9902,499,998330,0385,895,624
21Donaldson Company, Inc.2026Richard Lewis883,4231,568,9001,570,0131,114,9645,195,987
22SolarEdge Technologies, Inc.2025Yehoshua Shuki Nir725,6673,460,8350746,9685,061,438
23Teledyne Technologies Incorporated2025George C. Bobb III816,827601,5461,730,5221,080,9084,255,049

Each peer’s compensation is from its most recently filed proxy; fiscal years differ by company. Each peer’s figures come from its own filings; the subject company is highlighted. Peers whose chief executive compensation is outside our coverage universe are stated as such, never left blank.

Incentive design against the same peers

CompanyAnnual incentive payoutLong-term vehicle mixPSU measures include TSRCompensation consultant
Entegris Inc69.0%RSU 40 · Option 30 · PSU 30Yes — Relative TSRFW Cook
Albemarle Corporationnot disclosedPSU 50 · RSU 25 · Options 25Yes — Relative Total Shareholder Return (rTSR)Farient Advisors LLC
Ametek, Inc.147.5%not disclosedYes — Relative Total Shareholder Return (TSR)Pay Governance LLC
Avantor, Inc.not disclosedPSU 50 · Options 25 · RSU 25Yes — TSR Relative to Comparator GroupFW Cook
Celanese Corporation93.4%PSU 70 · Options 30NoWillis Towers Watson PLC
Coherent Corp.190%PSU 60 · RSU 40Yes — Relative TSRCompensia, Inc.
Donaldson Company, Inc.not disclosedPSU 50 · Option 50not disclosedWTW
Element Solutions Inc.126%PRSU 67 · RSU 33NoFW Cook
Graco Inc.not disclosedOption 100not disclosedWillis Towers Watson
Keysight Technologies, Inc.114.09%PSU 60 · RSU 40Yes — 3-Year Relative TSRMeridian Compensation Partners LLC
KLA Corporationnot disclosedPSU 50 · RSU 50NoSemler Brossy Consulting Group, LLC
Marvell Technology, Inc.144.84%MSU 70 · RSU 30Yes — Relative TSR vs. S&P 500 IndexCompensia
MKS Instruments, Inc.135%PSU 60 · RSU 40Yes — Relative Total Shareholder Return (rTSR)Pearl Meyer & Partners, LLC
Monolithic Power Systems, Inc.400%PSU 100Yes — Relative TSR vs. PHLX IndexRadford
Nordson Corporationnot disclosedPSU 50 · Options 30 · RSU 20NoFW Cook
Qorvo, Inc.not disclosedPSU 60 · RSU 40NoCompensia
Sensata Technologies Holding plcnot disclosedPSU 55 · RSU 45Yes — rTSRFW Cook
Skyworks Solutions, Inc.not disclosedPSU 60 · RSU 40Yes — TSR Percentile RankingAon
SolarEdge Technologies, Inc.86.2%PSU 50 · RSU 50NoFrederic W. Cook & Co., Inc.
Teledyne Technologies Incorporatednot disclosedOptions 33 · Cash LTI 33 · PSU 33NoExequity
Teradyne, Inc.not disclosednot disclosedYes — TSR vs NYSE Composite IndexCompensia, Inc.
Trimble Inc.138.6%PSU 60 · RSU 25 · Options 15Yes — Total Shareholder Return (TSR) relative to S&P 500Mercer (US) LLC
Zebra Technologies Corporation114.7%not disclosedNoFW Cook

Read from each company’s Compensation Discussion and Analysis: annual incentive payout as a percentage of target, the disclosed long-term vehicle mix, whether performance-share measures include a total shareholder return component, and the retained compensation consultant. “Not disclosed” appears only where the company’s filing does not state the item.

Say-on-pay history and pay ratio
Meeting yearMeeting dateForAgainstAbstainSupportOutcome
20262026-05-06134,253,9106,187,37471,11395.59%Passed
20252025-04-23104,514,01430,881,02678,41677.19%Passed
20242024-04-24124,462,85711,955,69945,86091.24%Passed
20232023-04-26121,999,22310,431,4262,099,28092.12%Passed
20222022-04-27115,801,5525,157,59158,86395.74%Passed
20212021-04-29117,758,9503,692,93167,28496.96%Passed

Rows are labeled by annual-meeting year, with the meeting date beside each; the vote held in a given year acts on the prior fiscal year’s compensation.

Say-on-pay — history, company’s computation

Meeting yearMeeting dateApproval — company’s computation
20262026-05-0695.59%a
20252025-04-2377.19%b
20242024-04-2491.24%c

a. Approved under the standard stated in the filing — “FOR, AGAINST, or ABSTAIN Abstentions and Broker non-votes have no effect A majority of all votes cast must be "for" this Proposal.”.

b. Approved under the standard stated in the filing — “Abstentions and Broker non-votes have no effect”.

c. Approved under the standard stated in the filing — “Under the Company's by-laws, shares whose ballot is marked as withheld, shares otherwise present at the meeting but for which there is an abstention, and shares otherwise present at the meeting as to which the stockholder gives no authority or direction are not counted as votes cast.”.

Approval percentages are the company’s own reported computations under its own stated standard, not recomputed by Velarion. Where a company does not state a standard, none is assumed.

CEO pay ratio

Ratio (CEO : median employee)162 : 1
CEO total compensation$12,595,156
Median employee compensation$77,862
Insider trades since the proxy

Every insider equity transaction reported on Form 4 after the 2025 proxy statement — acquisitions, dispositions, exercises, and withholdings — and therefore not reflected in any table in that document.

InsiderRoleTransaction dateCodeSharesPriceValueSecuritySource
Daniel WoodlandSVP & President, MS Division2026-04-01A6,318$0$0CommonForm 4 ↗
David ReederDirector2026-04-01A38,75000CommonForm 4 ↗
Olivier BlachierSVP, Chief Strategy Officer2026-04-01A6,31800CommonForm 4 ↗
Susan RiceSVP, Global Human Resources2026-04-01A7,37100CommonForm 4 ↗
Bertrand LoyDirector2026-04-01A19,62800CommonForm 4 ↗
Clinton M. HarisSVP & President, APS Division2026-04-01A6,31800CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-04-01A7,37100CommonForm 4 ↗
Michael SauerVP, Controller & CAO2026-04-01A2,52700CommonForm 4 ↗
Daniel WoodlandSVP & President, MS Division2026-04-05D1,228116142,939CommonForm 4 ↗
Susan RiceSVP, Global Human Resources2026-04-05D1,422116165,521CommonForm 4 ↗
Michael SauerVP, Controller & CAO2026-04-05D31611636,782CommonForm 4 ↗
Clinton M. HarisSVP & President, APS Division2026-04-05D1,290116150,156CommonForm 4 ↗
Olivier BlachierSVP, Chief Strategy Officer2026-04-05D64311674,845CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-04-05D1,493116173,785CommonForm 4 ↗
Bertrand LoyDirector2026-04-05D9,8681161,148,635CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-04-07D1,592116183,987CommonForm 4 ↗
Olivier BlachierSVP, Chief Strategy Officer2026-04-07D27511631,782CommonForm 4 ↗
Bertrand LoyDirector2026-04-14D17,39600Derivative, Class A CommonForm 4 ↗
Bertrand LoyDirector2026-04-14A17,396981,706,722CommonForm 4 ↗
Bertrand LoyDirector2026-04-14D17,3961402,439,267CommonForm 4 ↗
Bertrand LoyDirector2026-04-17D44,13800Derivative, Class A CommonForm 4 ↗
Bertrand LoyDirector2026-04-17D44,1381446,373,969CommonForm 4 ↗
Bertrand LoyDirector2026-04-17A44,138984,330,379CommonForm 4 ↗
Yvette KanouffDirector2026-05-06A1,41200CommonForm 4 ↗
Rodney ClarkDirector2026-05-06A1,41200CommonForm 4 ↗
Mary PumaDirector2026-05-06A1,41200CommonForm 4 ↗
James F. GentilcoreDirector2026-05-06A1,41200CommonForm 4 ↗
Dr. Azita Saleki-GerhardtDirector2026-05-06A1,41200CommonForm 4 ↗
James P. LedererDirector2026-05-06A1,41200CommonForm 4 ↗
Clinton M. HarisSVP & President, APS Division2026-05-14D5,83000Derivative, Class A CommonForm 4 ↗
Clinton M. HarisSVP & President, APS Division2026-05-14D5,830145842,843CommonForm 4 ↗
Clinton M. HarisSVP & President, APS Division2026-05-14A5,83056324,848CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-05-14D2,41000Derivative, Class A CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-05-14D3,91600Derivative, Class A CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-05-14D2,410140337,496CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-05-14A2,41081194,511CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-05-14D3,916140549,219CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-05-14A3,91698384,199CommonForm 4 ↗
Olivier BlachierSVP, Chief Strategy Officer2026-05-14D2,000140280,080CommonForm 4 ↗
Olivier BlachierSVP, Chief Strategy Officer2026-05-14A2,00081161,420CommonForm 4 ↗
Olivier BlachierSVP, Chief Strategy Officer2026-05-14D2,00000Derivative, Class A CommonForm 4 ↗
Susan RiceSVP, Global Human Resources2026-05-15D12,96000Derivative, Class A CommonForm 4 ↗
Susan RiceSVP, Global Human Resources2026-05-15D12,9601331,720,440CommonForm 4 ↗
Susan RiceSVP, Global Human Resources2026-05-15A12,96056722,131CommonForm 4 ↗
Susan RiceSVP, Global Human Resources2026-05-15D6,933133922,158CommonForm 4 ↗
Sukhi NageshSVP & Chief Financial Officer2026-05-18A8,25400CommonForm 4 ↗
Clinton M. HarisSVP & President, APS Division2026-05-27D6,84800Derivative, Class A CommonForm 4 ↗
Clinton M. HarisSVP & President, APS Division2026-05-27D6,8481491,021,927CommonForm 4 ↗
Clinton M. HarisSVP & President, APS Division2026-05-27A6,84898671,857CommonForm 4 ↗
James P. LedererDirector2026-06-03D3,569144512,473CommonForm 4 ↗
Robert A. BruggeworthDirector2026-08-03A1,32900CommonForm 4 ↗
Susan RiceSVP, Global Human Resources2026-08-11D2,062150308,310CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-08-13D3,91600Derivative, Class A CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-08-13D3,916164644,104CommonForm 4 ↗
Joseph ColellaSVP and General Counsel2026-08-13A3,91698384,199CommonForm 4 ↗
Olivier BlachierPresident, Materials Solutions2026-08-14D2,000161321,320CommonForm 4 ↗
Olivier BlachierPresident, Materials Solutions2026-08-14A2,00081161,420CommonForm 4 ↗
Olivier BlachierPresident, Materials Solutions2026-08-14D2,00000Derivative, Class A CommonForm 4 ↗
David ReederDirector2026-08-18D5,386150809,354CommonForm 4 ↗

Transaction codes per Form 4: A acquisition · S open-market sale · F tax withholding · M option exercise · G gift. Value = shares × price as reported. Dividend-equivalent and fractional-share accrual rows (derivative Class A, under $10,000 and under 2,000 shares) are aggregated per date; every row appears in full below.

Sources (124 citations)

Each figure is listed with the filing it comes from, where it appears in that filing, and the value as printed. Any figure can be independently confirmed against the source.

  • Section 01, Bertrand Loy. DEF 14A, filed 2026-03-23. Section “Executive Compensation Tables” · page 66. As printed: 14,324,681. View filing ↗
  • Section 01, David Reeder. DEF 14A, filed 2026-03-23. Section “Executive Compensation Tables” · page 66. As printed: 11,507,888. View filing ↗
  • Section 01, Linda LaGorga. DEF 14A, filed 2026-03-23. Section “Executive Compensation Tables” · page 66. As printed: 3,373,992. View filing ↗
  • Section 01, Susan Rice. DEF 14A, filed 2026-03-23. Section “Executive Compensation Tables” · page 66. As printed: 2,566,832. View filing ↗
  • Section 01, Joseph Colella. DEF 14A, filed 2026-03-23. Section “Executive Compensation Tables” · page 66. As printed: 2,528,058. View filing ↗
  • Section 01, Daniel Woodland. DEF 14A, filed 2026-03-23. Section “Executive Compensation Tables” · page 66. As printed: 2,436,187. View filing ↗
  • Section 03, Bertrand Loy RSU. DEF 14A, filed 2026-03-23. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
  • Section 03, Bertrand Loy PSU. DEF 14A, filed 2026-03-23. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
  • Section 03, David Reeder PSU. DEF 14A, filed 2026-03-23. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
  • Section 03, David Reeder RSU. DEF 14A, filed 2026-03-23. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
  • Section 03, David Reeder RSU. DEF 14A, filed 2026-03-23. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
  • Section 03, Linda LaGorga PSU. DEF 14A, filed 2026-03-23. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
  • Section 03, Susan Rice RSU. DEF 14A, filed 2026-03-23. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
  • Section 03, Joseph Colella RSU. DEF 14A, filed 2026-03-23. Section “Executive Compensation” · grants of plan-based awards table. View filing ↗
  • Section 03, Joseph Colella PSU. DEF 14A, filed 2026-03-23. Section “Executive Compensation” · grants of plan-based awards table. View filing ↗
  • Section 03, Joseph Colella OPTION. DEF 14A, filed 2026-03-23. Section “Executive Compensation” · grants of plan-based awards table. View filing ↗
  • Section 03, Daniel Woodland RSU. DEF 14A, filed 2026-03-23. Section “Executive Compensation” · grants of plan-based awards table. View filing ↗
  • Section 03, Daniel Woodland PSU. DEF 14A, filed 2026-03-23. Section “Executive Compensation” · grants of plan-based awards table. View filing ↗
  • Section 03, Linda LaGorga RSU. DEF 14A, filed 2026-03-23. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
  • Section 03, Susan Rice PSU. DEF 14A, filed 2026-03-23. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
  • Section 03, Daniel Woodland OPTION. DEF 14A, filed 2026-03-23. Section “Executive Compensation” · grants of plan-based awards table. View filing ↗
  • Section 07, pay ratio. DEF 14A, filed 2026-03-23. Section “CEO Pay Ratio”. As printed: 162 : 1. View filing ↗
  • Section 08, Bertrand Loy. DEF 14A, filed 2026-03-23. Section “Director Compensation”. As printed: 25,916,731. View filing ↗
  • Section 08, James F. Gentilcore. DEF 14A, filed 2026-03-23. Section “Director Compensation”. As printed: 322,205. View filing ↗
  • Section 08, Mary Puma. DEF 14A, filed 2026-03-23. Section “Director Compensation”. As printed: 299,895. View filing ↗
  • Section 08, Yvette Kanouff. DEF 14A, filed 2026-03-23. Section “Director Compensation”. As printed: 297,803. View filing ↗
  • Section 08, Rodney Clark. DEF 14A, filed 2026-03-23. Section “Director Compensation”. As printed: 296,254. View filing ↗
  • Section 08, Dr. Azita Saleki-Gerhardt. DEF 14A, filed 2026-03-23. Section “Director Compensation”. As printed: 296,254. View filing ↗
  • Section 08, James P. Lederer. DEF 14A, filed 2026-03-23. Section “Director Compensation”. As printed: 288,754. View filing ↗
  • Section 08, David Reeder. DEF 14A, filed 2026-03-23. Section “Director Compensation”. As printed: 262,653. View filing ↗
  • Section 02, Daniel Woodland 2026-04-01. Form 4, filed 2026-04-02. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, David Reeder 2026-04-01. Form 4, filed 2026-04-02. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Olivier Blachier 2026-04-01. Form 4, filed 2026-04-02. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Susan Rice 2026-04-01. Form 4, filed 2026-04-02. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Bertrand Loy 2026-04-01. Form 4, filed 2026-04-02. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Clinton M. Haris 2026-04-01. Form 4, filed 2026-04-02. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Joseph Colella 2026-04-01. Form 4, filed 2026-04-02. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Michael Sauer 2026-04-01. Form 4, filed 2026-04-02. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Daniel Woodland 2026-04-05. Form 4, filed 2026-04-06. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Susan Rice 2026-04-05. Form 4, filed 2026-04-06. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Michael Sauer 2026-04-05. Form 4, filed 2026-04-06. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Clinton M. Haris 2026-04-05. Form 4, filed 2026-04-06. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Olivier Blachier 2026-04-05. Form 4, filed 2026-04-06. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Joseph Colella 2026-04-05. Form 4, filed 2026-04-06. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Bertrand Loy 2026-04-05. Form 4, filed 2026-04-06. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Joseph Colella 2026-04-07. Form 4, filed 2026-04-08. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Olivier Blachier 2026-04-07. Form 4, filed 2026-04-08. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Bertrand Loy 2026-04-14. Form 4, filed 2026-04-16. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Bertrand Loy 2026-04-14. Form 4, filed 2026-04-16. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Bertrand Loy 2026-04-14. Form 4, filed 2026-04-16. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Bertrand Loy 2026-04-17. Form 4, filed 2026-04-20. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Bertrand Loy 2026-04-17. Form 4, filed 2026-04-20. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Bertrand Loy 2026-04-17. Form 4, filed 2026-04-20. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Yvette Kanouff 2026-05-06. Form 4, filed 2026-05-08. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Rodney Clark 2026-05-06. Form 4, filed 2026-05-08. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Mary Puma 2026-05-06. Form 4, filed 2026-05-08. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, James F. Gentilcore 2026-05-06. Form 4, filed 2026-05-08. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Dr. Azita Saleki-Gerhardt 2026-05-06. Form 4, filed 2026-05-08. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, James P. Lederer 2026-05-06. Form 4, filed 2026-05-08. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Clinton M. Haris 2026-05-14. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Clinton M. Haris 2026-05-14. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Clinton M. Haris 2026-05-14. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Joseph Colella 2026-05-14. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Joseph Colella 2026-05-14. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Joseph Colella 2026-05-14. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Joseph Colella 2026-05-14. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Joseph Colella 2026-05-14. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Joseph Colella 2026-05-14. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Olivier Blachier 2026-05-14. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Olivier Blachier 2026-05-14. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Olivier Blachier 2026-05-14. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Susan Rice 2026-05-15. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Susan Rice 2026-05-15. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Susan Rice 2026-05-15. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Susan Rice 2026-05-15. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Sukhi Nagesh 2026-05-18. Form 4, filed 2026-05-19. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Clinton M. Haris 2026-05-27. Form 4, filed 2026-05-28. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Clinton M. Haris 2026-05-27. Form 4, filed 2026-05-28. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Clinton M. Haris 2026-05-27. Form 4, filed 2026-05-28. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, James P. Lederer 2026-06-03. Form 4, filed 2026-06-04. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Robert A. Bruggeworth 2026-08-03. Form 4, filed 2026-08-04. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Susan Rice 2026-08-11. Form 4, filed 2026-08-12. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Joseph Colella 2026-08-13. Form 4, filed 2026-08-14. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Joseph Colella 2026-08-13. Form 4, filed 2026-08-14. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Joseph Colella 2026-08-13. Form 4, filed 2026-08-14. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Olivier Blachier 2026-08-14. Form 4, filed 2026-08-17. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Olivier Blachier 2026-08-14. Form 4, filed 2026-08-17. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, Olivier Blachier 2026-08-14. Form 4, filed 2026-08-17. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 02, David Reeder 2026-08-18. Form 4, filed 2026-08-19. Insider equity transaction reported since the proxy statement. View filing ↗
  • Section 06, 2026 vote. Form 8-K, filed 2026-05-08. Item 5.07 · say-on-pay result. As reported: 95.59% (votes for as printed: 134,253,910). View filing ↗
  • Section 06, 2025 vote. Form 8-K, filed 2025-04-23. Item 5.07 · say-on-pay result. As reported: 77.19% (votes for as printed: 104,514,014). View filing ↗
  • Section 06, 2024 vote. Form 8-K, filed 2024-04-24. Item 5.07 · say-on-pay result. As reported: 91.24% (votes for as printed: 124,462,857). View filing ↗
  • Section 01 trend, Δ column (computed). Computed. Δ = current-FY total − prior-FY total per named officer.
  • Section 03b vehicle mix (computed). Computed. RSU / PSU / Options grant-date fair values summed per officer from the grants table; % performance-vested = PSU ÷ (RSU+PSU+Options).
  • Section 09b board cost (computed). Computed. Cash 593,790 + equity 1,470,028 + all other 0 = 2,063,818, summed across the director compensation table rows.
  • KLA Corporation, Section 10b CEO total. DEF 14A, filed 2026-09-22. CEO total compensation as printed in KLA Corporation's own proxy. As printed: 29,954,476. View filing ↗
  • Coherent Corp., Section 10b CEO total. DEF 14A, filed 2026-10-09. CEO total compensation as printed in Coherent Corp.'s own proxy. As printed: 28,349,672. View filing ↗
  • Element Solutions Inc., Section 10b CEO total. DEF 14A, filed 2026-03-23. CEO total compensation as printed in Element Solutions Inc.'s own proxy. As printed: 26,480,462. View filing ↗
  • Marvell Technology, Inc., Section 10b CEO total. DEF 14A, filed 2026-05-13. CEO total compensation as printed in Marvell Technology, Inc.'s own proxy. As printed: 25,064,348. View filing ↗
  • Skyworks Solutions, Inc., Section 10b CEO total. DEF 14A, filed 2026-04-03. CEO total compensation as printed in Skyworks Solutions, Inc.'s own proxy. As printed: 24,717,041. View filing ↗
  • Monolithic Power Systems, Inc., Section 10b CEO total. DEF 14A, filed 2026-04-30. CEO total compensation as printed in Monolithic Power Systems, Inc.'s own proxy. As printed: 19,930,736. View filing ↗
  • Trimble Inc., Section 10b CEO total. DEF 14A, filed 2026-04-09. CEO total compensation as printed in Trimble Inc.'s own proxy. As printed: 19,129,944. View filing ↗
  • Keysight Technologies, Inc., Section 10b CEO total. DEF 14A, filed 2026-01-26. CEO total compensation as printed in Keysight Technologies, Inc.'s own proxy. As printed: 18,020,109. View filing ↗
  • Ametek, Inc., Section 10b CEO total. DEF 14A, filed 2026-03-11. CEO total compensation as printed in Ametek, Inc.'s own proxy. As printed: 16,462,630. View filing ↗
  • Albemarle Corporation, Section 10b CEO total. DEF 14A, filed 2026-03-24. CEO total compensation as printed in Albemarle Corporation's own proxy. As printed: 15,513,654. View filing ↗
  • Teradyne, Inc., Section 10b CEO total. DEF 14A, filed 2026-03-27. CEO total compensation as printed in Teradyne, Inc.'s own proxy. As printed: 14,107,588. View filing ↗
  • Zebra Technologies Corporation, Section 10b CEO total. DEF 14A, filed 2026-04-03. CEO total compensation as printed in Zebra Technologies Corporation's own proxy. As printed: 13,890,300. View filing ↗
  • Qorvo, Inc., Section 10b CEO total. DEF 14A, filed 2026-06-26. CEO total compensation as printed in Qorvo, Inc.'s own proxy. As printed: 13,551,627. View filing ↗
  • MKS Instruments, Inc., Section 10b CEO total. DEF 14A, filed 2026-03-31. CEO total compensation as printed in MKS Instruments, Inc.'s own proxy. As printed: 12,961,940. View filing ↗
  • Sensata Technologies Holding plc, Section 10b CEO total. DEF 14A, filed 2026-04-29. CEO total compensation as printed in Sensata Technologies Holding plc's own proxy. As printed: 12,587,665. View filing ↗
  • Entegris Inc (subject), Section 10b CEO total. DEF 14A, filed 2026-03-23. CEO total compensation as printed in Entegris Inc's own proxy. As printed: 11,507,888. View filing ↗
  • Celanese Corporation, Section 10b CEO total. DEF 14A, filed 2026-03-04. CEO total compensation as printed in Celanese Corporation's own proxy. As printed: 10,137,072. View filing ↗
  • Graco Inc., Section 10b CEO total. DEF 14A, filed 2026-03-11. CEO total compensation as printed in Graco Inc.'s own proxy. As printed: 9,491,330. View filing ↗
  • Nordson Corporation, Section 10b CEO total. DEF 14A, filed 2026-01-16. CEO total compensation as printed in Nordson Corporation's own proxy. As printed: 8,153,900. View filing ↗
  • Avantor, Inc., Section 10b CEO total. DEF 14A, filed 2026-03-27. CEO total compensation as printed in Avantor, Inc.'s own proxy. As printed: 5,895,624. View filing ↗
  • Donaldson Company, Inc., Section 10b CEO total. DEF 14A, filed 2026-10-06. CEO total compensation as printed in Donaldson Company, Inc.'s own proxy. As printed: 5,195,987. View filing ↗
  • SolarEdge Technologies, Inc., Section 10b CEO total. DEF 14A, filed 2026-04-23. CEO total compensation as printed in SolarEdge Technologies, Inc.'s own proxy. As printed: 5,061,438. View filing ↗
  • Teledyne Technologies Incorporated, Section 10b CEO total. DEF 14A, filed 2026-03-12. CEO total compensation as printed in Teledyne Technologies Incorporated's own proxy. As printed: 4,255,049. View filing ↗
  • Section 10a, MKS Instruments, Inc. reciprocity. DEF 14A. MKS Instruments, Inc. names Entegris Inc in its own disclosed peer group (read from its most recent proxy). View filing ↗
  • Section 10a, Coherent Corp. reciprocity. DEF 14A. Coherent Corp. names Entegris Inc in its own disclosed peer group (read from its most recent proxy). View filing ↗
  • Section 10a, Element Solutions Inc. reciprocity. DEF 14A. Element Solutions Inc. names Entegris Inc in its own disclosed peer group (read from its most recent proxy). View filing ↗
  • Section 10a, Nordson Corporation reciprocity. DEF 14A. Nordson Corporation names Entegris Inc in its own disclosed peer group (read from its most recent proxy). View filing ↗
  • Section 10a, Qorvo, Inc. reciprocity. DEF 14A. Qorvo, Inc. names Entegris Inc in its own disclosed peer group (read from its most recent proxy). View filing ↗
  • Section 10a, Skyworks Solutions, Inc. reciprocity. DEF 14A. Skyworks Solutions, Inc. names Entegris Inc in its own disclosed peer group (read from its most recent proxy). View filing ↗
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