Companies Onto Innovation Inc
Onto Innovation (ONTO): executive pay, fiscal 2025
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CEO vs. named peers35th pct.Of 17 peer CEOs
CEO pay, last three years
- $5,646,028FY2023
- $6,961,766FY2024
- $7,813,551FY2025
CEO total pay was $7,813,551 in fiscal 2025, up from $6,961,766 in fiscal 2024.
FY2025: salary $762,461 · bonus $1,000 · stock awards $6,428,679 · option awards $0
Executives and directors
Brian Roberts · CFOIdo Dolev · EVPRamil Yaldaei · COOMark Slicer · CFOMichael Plisinski · CEOShirley Chen · SVPChristine A. Tsingos · Former director (through FY2025)Christopher A. Seams · Chair of the BoardDavid B. Miller · Independent DirectorLeo Berlinghieri · Former director (through FY2025)May Su · Independent DirectorStephen D. Kelley · Independent DirectorStephen S. Schwartz · Independent DirectorSusan D. Lynch · Independent Director
Frequently asked questions
Who was the highest-paid executive at Onto Innovation Inc in fiscal 2025?
As disclosed, Michael Plisinski (Chief Executive Officer) was the highest-paid executive at Onto Innovation Inc in fiscal 2025, with total compensation of $7,813,551.
How does Onto Innovation Inc's chief executive pay compare to its disclosed peer group?
As disclosed, Michael Plisinski's total compensation ranked at the 35th percentile of Onto Innovation Inc's disclosed peer group.
What is Onto Innovation Inc's CEO-to-median employee pay ratio?
As disclosed, Onto Innovation Inc's CEO-to-median employee pay ratio was 63:1.
How did shareholders vote on Onto Innovation Inc's executive compensation?
As disclosed, 97.14% of shareholders supported Onto Innovation Inc's executive compensation in the latest say-on-pay vote.
How much does Onto Innovation Inc spend in total on board compensation for fiscal 2025?
As disclosed, Onto Innovation Inc reported total board compensation of $1,862,037 for fiscal 2025.
Answers are drawn only from the figures disclosed in this brief and cited to their location in the source filing. Where a figure required for an answer is not disclosed, that is stated rather than estimated.
Full detail
Every table from the filing. Open any section.
Summary compensation table
| Named executive officer | Salary | Bonus | Stock awards | Option awards | Non-equity incentive | Pension / NQDC | All other | Total |
|---|---|---|---|---|---|---|---|---|
| Michael Plisinski | $762,461 | $1,000 | $6,428,679 | $0 | $611,002 | $0 | $10,409 | $7,813,551 |
| Chief Executive Officer | ||||||||
| Ido Dolev | 457,296 | 243,852 | 3,259,854 | 0 | 208,523 | 0 | 161,146 | 4,330,671 |
| Executive Vice President, Product Solutions Group | ||||||||
| Brian Roberts | 272,596 | 250,000 | 2,200,083 | 0 | 325,766 | 0 | 6,433 | 3,054,878 |
| Chief Financial Officer | ||||||||
| Mark Slicer | 225,813 | 0 | 814,519 | 0 | 0 | 0 | 1,889,270 | 2,929,602 |
| Former Senior Vice President, Chief Financial Officer | ||||||||
| Shirley Chen | 224,192 | 0 | 1,350,077 | 0 | 236,738 | 0 | 5,394 | 1,816,401 |
| Senior Vice President, Customer Success | ||||||||
| Ramil Yaldaei | 387,783 | 0 | 1,043,702 | 0 | 226,281 | 0 | 11,478 | 1,669,244 |
| Chief Operating Officer | ||||||||
A dash means the company reported no figure in that column; 0 means it reported zero. Figures are as printed in the filing, without adjustment.
Three-year trend — total compensation per named executive
| Named executive officer | FY2025 total | FY2024 total | FY2023 total | Δ FY2024→2025 |
|---|---|---|---|---|
| Michael Plisinski | $7,813,551 | $6,961,766 | $5,646,028 | ↑ +851,785 |
| Ido Dolev | 4,330,671 | — | — | — |
| Brian Roberts | 3,054,878 | — | — | — |
| Mark Slicer | 2,929,602 | 1,730,211 | 1,544,790 | ↑ +1,199,391 |
| Shirley Chen | 1,816,401 | — | — | — |
| Ramil Yaldaei | 1,669,244 | 1,412,884 | 956,011 | ↑ +256,360 |
Prior-year totals as disclosed in the corresponding proxy; deltas are computed values with the derivation shown in the register.
Incentive-plan design — the Compensation Discussion & Analysis
provide competitive compensation packages that enable the Company to attract and retain talented executive officers, motivate executive officers to achieve the Company's short- and long-term business strategies and objectives, align the interests of executive officers with those of stockholders, and be consistent with current market practices and good corporate governance principles
| CEO STI target (% of salary) | — |
|---|---|
| CEO LTI target (% of salary) | — |
| Independent consultant | Compensia, Inc. |
| Clawback policy | true |
| Anti-hedging | true |
| Anti-pledging | true |
Equity grants and outstanding awards
Grants of plan-based awards — fiscal year 2025
| Executive | Award | Grant date | Threshold | Target | Granted | Maximum | Grant-date fair value |
|---|---|---|---|---|---|---|---|
| Ramil Yaldaei | RSU | 2025-03-03 | — | — | 3,769 | — | $512,622 |
| Ido Dolev | PSU | 2025-06-02 | 2,695 | 5,390 | — | 10,780 | 759,694 |
| Mark Slicer | PSU | 2025-03-03 | 1,471 | 2,941 | — | 5,882 | 414,514 |
| Ramil Yaldaei | PSU | 2025-03-03 | 1,884 | 3,768 | — | 7,536 | 531,081 |
| Mark Slicer | RSU | 2025-03-03 | — | — | 2,941 | — | 400,005 |
| Michael Plisinski | PSU | 2025-03-03 | 11,606 | 23,212 | — | 46,424 | 3,271,615 |
| Brian Roberts | RSU | 2025-09-02 | — | — | 21,175 | — | 2,200,083 |
| Michael Plisinski | RSU | 2025-03-03 | — | — | 23,212 | — | 3,157,064 |
| Shirley Chen | RSU | 2025-09-02 | — | — | 12,994 | — | 1,350,077 |
| Ido Dolev | RSU | 2025-06-02 | — | — | 26,953 | — | 2,500,160 |
Vehicle mix — grant-date fair value by award type
| Named executive officer | Time-vested (RSU) | Performance-vested (PSU) | Options / SARs | % performance-vested |
|---|---|---|---|---|
| Ramil Yaldaei | $512,622 | $531,081 | $0 | 50.9% |
| Ido Dolev | 2,500,160 | 759,694 | 0 | 23.3% |
| Mark Slicer | 400,005 | 414,514 | 0 | 50.9% |
| Michael Plisinski | 3,157,064 | 3,271,615 | 0 | 50.9% |
| Brian Roberts | 2,200,083 | 0 | 0 | 0.0% |
| Shirley Chen | 1,350,077 | 0 | 0 | 0.0% |
% performance-vested = PSU grant-date fair value ÷ (RSU + PSU + Options), a computed value with the derivation shown in the register.
Outstanding equity awards at fiscal year-end 2025
| Executive | Award | Shares unvested | Exercise price | Market value unvested |
|---|---|---|---|---|
| Mark Slicer | PSU | 1,039 | — | $172,339 |
| Ramil Yaldaei | RSU | 1,125 | — | 186,604 |
| Ramil Yaldaei | PSU | 1,688 | — | 279,989 |
| Ramil Yaldaei | RSU | 1,694 | — | 280,984 |
| Mark Slicer | PSU | 2,022 | — | 335,389 |
| Mark Slicer | RSU | 2,024 | — | 335,720 |
| Mark Slicer | PSU | 2,281 | — | 378,349 |
| Ramil Yaldaei | PSU | 3,768 | — | 624,998 |
| Ramil Yaldaei | RSU | 3,769 | — | 625,164 |
| Ido Dolev | PSU | 5,390 | — | 894,039 |
| Michael Plisinski | RSU | 7,883 | — | 1,307,553 |
| Michael Plisinski | RSU | 7,962 | — | 1,320,657 |
| Michael Plisinski | PSU | 11,824 | — | 1,961,247 |
| Michael Plisinski | PSU | 11,942 | — | 1,980,820 |
| Shirley Chen | RSU | 12,994 | — | 2,155,315 |
| Ido Dolev | RSU | 19,765 | — | 3,278,421 |
| Brian Roberts | RSU | 21,175 | — | 3,512,297 |
| Michael Plisinski | RSU | 23,212 | — | 3,850,174 |
| Michael Plisinski | PSU | 23,212 | — | 3,850,174 |
Director compensation
| Director | Cash fees | Stock awards | Option awards | Non-equity incentive | All other | Total |
|---|---|---|---|---|---|---|
| Christopher A. SeamsIndependent · Board Chair | $151,875 | $200,027 | $0 | $0 | $0 | $351,902 |
| Susan D. LynchIndependent | 101,250 | 200,027 | 0 | 0 | 0 | 301,277 |
| May SuIndependent · Compensation (Chair) · Nominating & Governance | 96,875 | 200,027 | 0 | 0 | 0 | 296,902 |
| David B. MillerIndependent | 95,625 | 200,027 | 0 | 0 | 0 | 295,652 |
| Stephen D. KelleyIndependent · Audit · Compensation | 87,500 | 200,027 | 0 | 0 | 0 | 287,527 |
| Stephen S. SchwartzIndependent | 85,625 | 200,027 | 0 | 0 | 0 | 285,652 |
| Christine A. TsingosIndependent · Audit · Compensation · Departed during FY | 21,875 | — | 0 | 0 | 0 | 21,875 |
| Leo BerlinghieriIndependent · Audit · Nominating & Governance · Departed during FY | 21,250 | — | 0 | 0 | 0 | 21,250 |
| Michael P. PlisinskiEmployee director | 0 | 0 | 0 | — | 0 | 0 |
Board fee structure and ownership guideline
| Annual cash retainer | $70,000 |
|---|---|
| Annual equity retainer | $200,000 |
| Per board meeting fee | — |
| Committee chair fees (audit / comp / nom-gov) | 25,000 / 20,000 / 20,000 |
| Stock ownership guideline | 3x annual retainer ($210,000) |
Total cost of the board
| Component | FY2025 |
|---|---|
| Cash retainers and fees | $661,875 |
| Equity awards (grant-date value) | $1,200,162 |
| All other compensation | $0 |
| Total cost of the board | $1,862,037 |
Computed as the sum of the director compensation table rows above; inputs and formula shown in the register.
Peer group, and who names Onto Innovation as a peer
Companies that benchmark against ONTO
15 companies name ONTO as a compensation peer
The list of companies that name ONTO as a peer is temporarily unavailable — recheck shortly.
Disclosed peer group — fiscal year 2025
The compensation peer group as the company disclosed it in its own proxy — the reference set behind the percentile above.
AEIS Advanced Energy Industries Inc.COHU Cohu, Inc.FORM FormFactor, Inc.IPGP IPG Photonics CorporationLSCC Lattice Semiconductor CorporationNOVT Novanta Inc.SLAB Silicon Laboratories Inc.SYNA Synaptics IncorporatedTER Teradyne, Inc.VECO Veeco Instruments Inc.ALGM Allegro MicroSystems, Inc.CGNX Cognex CorporationENTG Entegris, Inc.MTSI MACOM Technology Solutions Holdings, Inc.POWI Power Integrations, Inc.ACLS Axcelis Technologies, Inc.MPWR Monolithic Power Systems, Inc.
Peer reciprocity
The companies Onto Innovation Inc names as compensation peers that name it back in their own disclosed peer groups.
FormFactor, Inc. (FORM)65IPG Photonics Corporation (IPGP)66Veeco Instruments Inc. (VECO)67Cognex Corporation (CGNX)68Axcelis Technologies, Inc. (ACLS)69
Chief executive pay against the peer group
Most recent fiscal-year chief executive compensation at each disclosed peer, taken from that company’s own proxy statement.
| Rank | Company | FY | Chief executive | Salary | Stock awards | Option awards | Non-equity incentive | Total |
|---|---|---|---|---|---|---|---|---|
| 1 | Monolithic Power Systems, Inc. | 2025 | Michael Hsing | $1,030,962 | $12,686,332 | $0 | $6,210,000 | $19,930,736 |
| 2 | Synaptics Incorporated | 2026 | Rahul Patel | 800,000 | 17,790,286 | 0 | 1,150,000 | 19,755,176 |
| 3 | Teradyne, Inc. | 2025 | Gregory Smith | 959,457 | 10,186,513 | 1,033,335 | 1,914,283 | 14,107,588 |
| 4 | Entegris, Inc. | 2025 | David Reeder | 432,404 | 7,232,007 | 3,329,868 | 308,515 | 11,507,888 |
| 5 | Silicon Laboratories Inc. | 2025 | R. Matthew Johnson | 715,862 | 9,609,267 | 0 | 958,889 | 11,296,077 |
| 6 | Advanced Energy Industries Inc. | 2025 | Stephen Kelley | 977,792 | 8,426,221 | — | 1,767,095 | 11,187,208 |
| 7 | Allegro MicroSystems, Inc. | 2026 | Michael Doogue | 700,000 | 9,685,198 | 0 | 0 | 10,459,680 |
| 8 | Macom Technology Solutions Holdings, Inc. | 2025 | Stephen Daly | 815,000 | 8,147,392 | 0 | 1,138,165 | 10,102,699 |
| 9 | Novanta Inc. | 2025 | Matthijs Glastra | 863,039 | 8,275,535 | 0 | 854,479 | 10,042,292 |
| 10 | IPG Photonics Corporation | 2025 | Mark Gitin | 879,423 | 6,999,990 | 0 | 1,159,600 | 9,071,490 |
| 11 | Cognex Corporation | 2025 | Matthew Moschner | 528,846 | 1,670,040 | 4,829,911 | 1,059,436 | 8,099,369 |
| 12 | Onto Innovation Inc | 2025 | Michael Plisinski | 762,461 | 6,428,679 | 0 | 611,002 | 7,813,551 |
| 13 | Power Integrations, Inc. | 2025 | Jennifer Lloyd | 295,000 | 6,024,623 | 0 | 0 | 6,321,439 |
| 14 | FormFactor, Inc. | 2025 | Michael Slessor | 664,615 | 4,398,770 | 0 | 406,035 | 5,481,644 |
| 15 | Axcelis Technologies, Inc. | 2025 | Russell Low | 608,654 | 3,852,701 | 0 | 627,522 | 5,100,394 |
| 16 | Veeco Instruments Inc. | 2025 | William Miller | 680,961 | 3,931,130 | 0 | 0 | 4,624,824 |
| 17 | Cohu, Inc. | 2025 | Luis Müller | 715,000 | 3,508,493 | 0 | 250,345 | 4,498,059 |
| 18 | Lattice Semiconductor Corporation | 2025 | Ford Tamer | 800,000 | 0 | 0 | 917,308 | 1,725,091 |
Each peer’s compensation is from its most recently filed proxy; fiscal years differ by company. Each peer’s figures come from its own filings; the subject company is highlighted. Peers whose chief executive compensation is outside our coverage universe are stated as such, never left blank.
Incentive design against the same peers
| Company | Annual incentive payout | Long-term vehicle mix | PSU measures include TSR | Compensation consultant |
|---|---|---|---|---|
| Onto Innovation Inc | not disclosed | not disclosed | not disclosed | Compensia, Inc. |
| Advanced Energy Industries Inc. | 144.4% | PSU 60 · RSU 40 | No | Compensia, Inc. |
| Allegro MicroSystems, Inc. | 182.9% | PSU 50 · RSU 50 | Yes — Relative TSR vs. Russell 3000 custom list of semiconductor and semiconductor equipment peers | Meridian Compensation Partners, LLC |
| Axcelis Technologies, Inc. | 103.1% | RSU 50 · PRSU 50 | No | Pearl Meyer |
| Cognex Corporation | 193% | Options 33 · RSU 33 · PSU 33 | No | Pay Governance, LLC |
| Cohu, Inc. | 31.8% | PSU 60 · RSU 40 | Yes — TSR performance relative to the Russell 2000 Index | Compensia |
| Entegris, Inc. | 69.0% | RSU 40 · Option 30 · PSU 30 | Yes — Relative TSR | FW Cook |
| FormFactor, Inc. | 61.8% | PSU 50 · RSU 50 | Yes — Total Shareholder Return (TSR) | Aon's Human Capital Solutions practice |
| IPG Photonics Corporation | 113.9% | PSU 50 · RSU 50 | No | FW Cook |
| Lattice Semiconductor Corporation | 90% | PRSU 57 · RSU 43 | No | Semler Brossy |
| Macom Technology Solutions Holdings, Inc. | 103.5% | PSU 82 · RSU 18 | Yes — Relative TSR | Pearl Meyer & Partners, LLC |
| Monolithic Power Systems, Inc. | 400% | PSU 100 | Yes — Relative TSR vs. PHLX Index | Radford |
| Novanta Inc. | 65.3% | PSU 70 · RSU 30 | No | Aon |
| Power Integrations, Inc. | 76.8% | PSU 50 · RSU 50 | No | Aon's Human Capital Solutions practice |
| Silicon Laboratories Inc. | 103% | RSU 54 · PSU 46 | No | Mercer (US) LLC |
| Synaptics Incorporated | not disclosed | RSU 34 · MSU 33 · PSU 33 | No | Compensia |
| Teradyne, Inc. | not disclosed | not disclosed | Yes — TSR vs NYSE Composite Index | Compensia, Inc. |
| Veeco Instruments Inc. | not disclosed | PSU 65 · RSU 35 | No | Compensation Strategies, Inc. |
Read from each company’s Compensation Discussion and Analysis: annual incentive payout as a percentage of target, the disclosed long-term vehicle mix, whether performance-share measures include a total shareholder return component, and the retained compensation consultant. “Not disclosed” appears only where the company’s filing does not state the item.
Say-on-pay history and pay ratio
| Meeting year | Meeting date | For | Against | Abstain | Support | Outcome |
|---|---|---|---|---|---|---|
| 2026 | 2026-05-20 | 40,624,022 | 1,196,481 | 201,194 | 97.14% | Passed |
| 2025 | 2025-05-21 | 40,021,164 | 1,505,709 | 46,516 | 96.37% | Passed |
| 2024 | 2024-05-22 | 42,746,549 | 1,403,028 | 111,874 | 96.82% | Passed |
| 2023 | 2023-05-09 | 42,306,919 | 1,658,630 | 77,720 | 96.23% | Passed |
| 2022 | 2022-05-10 | 41,193,351 | 2,493,018 | 37,707 | 94.29% | Passed |
| 2021 | 2021-05-11 | 41,197,035 | 601,997 | 86,035 | 98.56% | Passed |
Rows are labeled by annual-meeting year, with the meeting date beside each; the vote held in a given year acts on the prior fiscal year’s compensation.
Say-on-pay — history, company’s computation
| Meeting year | Meeting date | Approval — company’s computation |
|---|---|---|
| 2026 | 2026-05-20 | 97.14%a |
| 2025 | 2025-05-21 | 96.37%b |
| 2024 | 2024-05-22 | 96.82%c |
a. Approved under the standard stated in the filing — “In order for a director in an uncontested election to be elected, the number of votes cast "for" his/her election must exceed the number of votes cast "against" his/her election (with "abstentions" and "broker non-votes" not counted as a vote cast either "for" or "against" that director's election).”.
b. Approved under the standard stated in the filing — “In order for a director in an uncontested election to be elected, the number of votes cast "for" his/her election must exceed the number of votes cast "against" his/her election (with "abstentions" and "broker non-votes" not counted as a vote cast either "for" or "against" that director's election).”.
c. Approved under the standard stated in the filing — “In order for a director in an uncontested election to be elected, the number of votes cast "for" his/her election must exceed the number of votes cast "against" his/her election (with "abstentions" and "broker non-votes" not counted as a vote cast either "for" or "against" that director's election).”.
Approval percentages are the company’s own reported computations under its own stated standard, not recomputed by Velarion. Where a company does not state a standard, none is assumed.
CEO pay ratio
| Ratio (CEO : median employee) | 63 : 1 |
|---|---|
| CEO total compensation | $7,813,551 |
| Median employee compensation | $123,868 |
Insider trades since the proxy
Every insider equity transaction reported on Form 4 after the 2025 proxy statement — acquisitions, dispositions, exercises, and withholdings — and therefore not reflected in any table in that document.
| Insider | Role | Transaction date | Code | Shares | Price | Value | Security | Source |
|---|---|---|---|---|---|---|---|---|
| Yoon Ah OH | SVP, Gen Counsel & Corp Sec | 2026-05-15 | D | 530 | $272 | $144,038 | Common | Form 4 ↗ |
| Ramil Yaldaei | Chief Operating Officer | 2026-05-15 | D | 625 | 272 | 169,856 | Common | Form 4 ↗ |
| Ramil Yaldaei | Chief Operating Officer | 2026-05-15 | D | 218 | 272 | 59,246 | Common | Form 4 ↗ |
| David B. Miller | Director | 2026-05-20 | A | 761 | 0 | 0 | Common | Form 4 ↗ |
| Stephen S. Schwartz | Director | 2026-05-20 | A | 761 | 0 | 0 | Common | Form 4 ↗ |
| Susan D. Lynch | Director | 2026-05-20 | A | 761 | 0 | 0 | Common | Form 4 ↗ |
| Christopher A. Seams | Director | 2026-05-20 | A | 761 | 0 | 0 | Common | Form 4 ↗ |
| May Su | Director | 2026-05-20 | A | 761 | 0 | 0 | Common | Form 4 ↗ |
| Stephen D. Kelley | Director | 2026-05-20 | A | 761 | 0 | 0 | Common | Form 4 ↗ |
| Susan D. Lynch | Director | 2026-08-21 | D | 1,000 | 302 | 302,300 | Common | Form 4 ↗ |
| Shirley Chen | Senior Vice President of Custo | 2026-09-02 | D | 1,516 | 255 | 385,898 | Common | Form 4 ↗ |
| Brian Roberts | Chief Financial Officer | 2026-09-02 | D | 3,239 | 255 | 824,487 | Common | Form 4 ↗ |
| Brian Roberts | Chief Financial Officer | 2026-09-02 | D | 3,239 | 255 | 824,487 | Common | Form 4 ↗ |
| David B. Miller | Director | 2026-09-29 | D | 2,000 | 300 | 600,000 | Common | Form 4 ↗ |
Transaction codes per Form 4: A acquisition · S open-market sale · F tax withholding · M option exercise · G gift. Value = shares × price as reported. Dividend-equivalent and fractional-share accrual rows (derivative Class A, under $10,000 and under 2,000 shares) are aggregated per date; every row appears in full below.
Sources (69 citations)
Each figure is listed with the filing it comes from, where it appears in that filing, and the value as printed. Any figure can be independently confirmed against the source.
- Section 01, Michael Plisinski. DEF 14A, filed 2026-04-06. Section “Summary Compensation Table” · page 49. As printed: 7,813,551. View filing ↗
- Section 01, Ido Dolev. DEF 14A, filed 2026-04-06. Section “Summary Compensation Table”. As printed: 4,330,671. View filing ↗
- Section 01, Brian Roberts. DEF 14A, filed 2026-04-06. Section “Summary Compensation Table”. As printed: 3,054,878. View filing ↗
- Section 01, Mark Slicer. DEF 14A, filed 2026-04-06. Section “Summary Compensation Table”. As printed: 2,929,602. View filing ↗
- Section 01, Shirley Chen. DEF 14A, filed 2026-04-06. Section “Summary Compensation Table”. As printed: 1,816,401. View filing ↗
- Section 01, Ramil Yaldaei. DEF 14A, filed 2026-04-06. Section “EXECUTIVE COMPENSATION TABLES”. As printed: 1,669,244. View filing ↗
- Section 03, Ramil Yaldaei RSU. DEF 14A, filed 2026-04-06. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
- Section 03, Ido Dolev PSU. DEF 14A, filed 2026-04-06. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
- Section 03, Mark Slicer PSU. DEF 14A, filed 2026-04-06. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
- Section 03, Ramil Yaldaei PSU. DEF 14A, filed 2026-04-06. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
- Section 03, Mark Slicer RSU. DEF 14A, filed 2026-04-06. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
- Section 03, Michael Plisinski PSU. DEF 14A, filed 2026-04-06. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
- Section 03, Brian Roberts RSU. DEF 14A, filed 2026-04-06. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
- Section 03, Michael Plisinski RSU. DEF 14A, filed 2026-04-06. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
- Section 03, Shirley Chen RSU. DEF 14A, filed 2026-04-06. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
- Section 03, Ido Dolev RSU. DEF 14A, filed 2026-04-06. Section “Grants of Plan-Based Awards” · grants of plan-based awards table. View filing ↗
- Section 07, pay ratio. DEF 14A, filed 2026-04-06. Section “CEO Pay Ratio”. As printed: 63 : 1. View filing ↗
- Section 08, Christopher A. Seams. DEF 14A, filed 2026-04-06. Section “Director Compensation”. As printed: 351,902. View filing ↗
- Section 08, Susan D. Lynch. DEF 14A, filed 2026-04-06. Section “Director Compensation”. As printed: 301,277. View filing ↗
- Section 08, May Su. DEF 14A, filed 2026-04-06. Section “Director Compensation”. As printed: 296,902. View filing ↗
- Section 08, David B. Miller. DEF 14A, filed 2026-04-06. Section “Director Compensation”. As printed: 295,652. View filing ↗
- Section 08, Stephen D. Kelley. DEF 14A, filed 2026-04-06. Section “Director Compensation”. As printed: 287,527. View filing ↗
- Section 08, Stephen S. Schwartz. DEF 14A, filed 2026-04-06. Section “Director Compensation”. As printed: 285,652. View filing ↗
- Section 08, Christine A. Tsingos. DEF 14A, filed 2026-04-06. Section “Director Compensation”. As printed: 21,875. View filing ↗
- Section 08, Leo Berlinghieri. DEF 14A, filed 2026-04-06. Section “Director Compensation”. As printed: 21,250. View filing ↗
- Section 08, Michael P. Plisinski. DEF 14A, filed 2026-04-06. Section “Director Compensation”. As printed: 0. View filing ↗
- Section 02, Yoon Ah OH 2026-05-15. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
- Section 02, Ramil Yaldaei 2026-05-15. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
- Section 02, Ramil Yaldaei 2026-05-15. Form 4, filed 2026-05-18. Insider equity transaction reported since the proxy statement. View filing ↗
- Section 02, David B. Miller 2026-05-20. Form 4, filed 2026-05-22. Insider equity transaction reported since the proxy statement. View filing ↗
- Section 02, Stephen S. Schwartz 2026-05-20. Form 4, filed 2026-05-22. Insider equity transaction reported since the proxy statement. View filing ↗
- Section 02, Susan D. Lynch 2026-05-20. Form 4, filed 2026-05-22. Insider equity transaction reported since the proxy statement. View filing ↗
- Section 02, Christopher A. Seams 2026-05-20. Form 4, filed 2026-05-22. Insider equity transaction reported since the proxy statement. View filing ↗
- Section 02, May Su 2026-05-20. Form 4, filed 2026-05-22. Insider equity transaction reported since the proxy statement. View filing ↗
- Section 02, Stephen D. Kelley 2026-05-20. Form 4, filed 2026-05-22. Insider equity transaction reported since the proxy statement. View filing ↗
- Section 02, Susan D. Lynch 2026-08-21. Form 4, filed 2026-08-25. Insider equity transaction reported since the proxy statement. View filing ↗
- Section 02, Shirley Chen 2026-09-02. Form 4, filed 2026-09-04. Insider equity transaction reported since the proxy statement. View filing ↗
- Section 02, Brian Roberts 2026-09-02. Form 4, filed 2026-09-04. Insider equity transaction reported since the proxy statement. View filing ↗
- Section 02, Brian Roberts 2026-09-02. Form 4, filed 2026-09-04. Insider equity transaction reported since the proxy statement. View filing ↗
- Section 02, David B. Miller 2026-09-29. Form 4, filed 2026-10-01. Insider equity transaction reported since the proxy statement. View filing ↗
- Section 06, 2026 vote. Form 8-K, filed 2026-05-20. Item 5.07 · say-on-pay result. As reported: 97.14% (votes for as printed: 40,624,022). View filing ↗
- Section 06, 2025 vote. Form 8-K, filed 2025-05-21. Item 5.07 · say-on-pay result. As reported: 96.37% (votes for as printed: 40,021,164). View filing ↗
- Section 06, 2024 vote. Form 8-K, filed 2024-05-22. Item 5.07 · say-on-pay result. As reported: 96.82% (votes for as printed: 42,746,549). View filing ↗
- Section 01 trend, Δ column (computed). Computed. Δ = current-FY total − prior-FY total per named officer.
- Section 03b vehicle mix (computed). Computed. RSU / PSU / Options grant-date fair values summed per officer from the grants table; % performance-vested = PSU ÷ (RSU+PSU+Options).
- Section 09b board cost (computed). Computed. Cash 661,875 + equity 1,200,162 + all other 0 = 1,862,037, summed across the director compensation table rows.
- Monolithic Power Systems, Inc., Section 10b CEO total. DEF 14A, filed 2026-04-30. CEO total compensation as printed in Monolithic Power Systems, Inc.'s own proxy. As printed: 19,930,736. View filing ↗
- Synaptics Incorporated, Section 10b CEO total. DEF 14A, filed 2026-09-15. CEO total compensation as printed in Synaptics Incorporated's own proxy. As printed: 19,755,176. View filing ↗
- Teradyne, Inc., Section 10b CEO total. DEF 14A, filed 2026-03-27. CEO total compensation as printed in Teradyne, Inc.'s own proxy. As printed: 14,107,588. View filing ↗
- Entegris, Inc., Section 10b CEO total. DEF 14A, filed 2026-03-23. CEO total compensation as printed in Entegris, Inc.'s own proxy. As printed: 11,507,888. View filing ↗
- Silicon Laboratories Inc., Section 10b CEO total. DEF 14A, filed 2026-03-11. CEO total compensation as printed in Silicon Laboratories Inc.'s own proxy. As printed: 11,296,077. View filing ↗
- Advanced Energy Industries Inc., Section 10b CEO total. DEF 14A, filed 2026-03-26. CEO total compensation as printed in Advanced Energy Industries Inc.'s own proxy. As printed: 11,187,208. View filing ↗
- Allegro MicroSystems, Inc., Section 10b CEO total. DEF 14A, filed 2026-06-24. CEO total compensation as printed in Allegro MicroSystems, Inc.'s own proxy. As printed: 10,459,680. View filing ↗
- Macom Technology Solutions Holdings, Inc., Section 10b CEO total. DEF 14A, filed 2026-01-16. CEO total compensation as printed in Macom Technology Solutions Holdings, Inc.'s own proxy. As printed: 10,102,699. View filing ↗
- Novanta Inc., Section 10b CEO total. DEF 14A, filed 2026-04-24. CEO total compensation as printed in Novanta Inc.'s own proxy. As printed: 10,042,292. View filing ↗
- IPG Photonics Corporation, Section 10b CEO total. DEF 14A, filed 2026-04-01. CEO total compensation as printed in IPG Photonics Corporation's own proxy. As printed: 9,071,490. View filing ↗
- Cognex Corporation, Section 10b CEO total. DEF 14A, filed 2026-03-13. CEO total compensation as printed in Cognex Corporation's own proxy. As printed: 8,099,369. View filing ↗
- Onto Innovation Inc (subject), Section 10b CEO total. DEF 14A, filed 2026-04-06. CEO total compensation as printed in Onto Innovation Inc's own proxy. As printed: 7,813,551. View filing ↗
- Power Integrations, Inc., Section 10b CEO total. DEF 14A, filed 2026-04-21. CEO total compensation as printed in Power Integrations, Inc.'s own proxy. As printed: 6,321,439. View filing ↗
- FormFactor, Inc., Section 10b CEO total. DEF 14A, filed 2026-04-02. CEO total compensation as printed in FormFactor, Inc.'s own proxy. As printed: 5,481,644. View filing ↗
- Axcelis Technologies, Inc., Section 10b CEO total. DEF 14A, filed 2026-03-31. CEO total compensation as printed in Axcelis Technologies, Inc.'s own proxy. As printed: 5,100,394. View filing ↗
- Veeco Instruments Inc., Section 10b CEO total. DEF 14A, filed 2026-03-19. CEO total compensation as printed in Veeco Instruments Inc.'s own proxy. As printed: 4,624,824. View filing ↗
- Cohu, Inc., Section 10b CEO total. DEF 14A, filed 2026-04-02. CEO total compensation as printed in Cohu, Inc.'s own proxy. As printed: 4,498,059. View filing ↗
- Lattice Semiconductor Corporation, Section 10b CEO total. DEF 14A, filed 2026-03-18. CEO total compensation as printed in Lattice Semiconductor Corporation's own proxy. As printed: 1,725,091. View filing ↗
- Section 10a, FormFactor, Inc. reciprocity. DEF 14A. FormFactor, Inc. names Onto Innovation Inc in its own disclosed peer group (read from its most recent proxy). View filing ↗
- Section 10a, IPG Photonics Corporation reciprocity. DEF 14A. IPG Photonics Corporation names Onto Innovation Inc in its own disclosed peer group (read from its most recent proxy). View filing ↗
- Section 10a, Veeco Instruments Inc. reciprocity. DEF 14A. Veeco Instruments Inc. names Onto Innovation Inc in its own disclosed peer group (read from its most recent proxy). View filing ↗
- Section 10a, Cognex Corporation reciprocity. DEF 14A. Cognex Corporation names Onto Innovation Inc in its own disclosed peer group (read from its most recent proxy). View filing ↗
- Section 10a, Axcelis Technologies, Inc. reciprocity. DEF 14A. Axcelis Technologies, Inc. names Onto Innovation Inc in its own disclosed peer group (read from its most recent proxy). View filing ↗